The present invention relates to a vacuum multi-sensing unit (10) used for adhesion and transfer of an object (P) together with a vacuum pump (23) in a vacuum transfer system. The multi-sensing unit (10) of the present invention includes a plurality of sensors (13) to perform multi-sensing, wherein individual and collective control of the built-in sensors (13) is possible. Therefore, in particular, when a plurality of vacuum pumps (23) are required for transfer of objects (P), the plurality of vacuum pumps (23) are allowed to correspond to a single unit (10), and thus, compared to a conventional sensing unit individually attached to each vacuum pump, there is superior effect in terms of the efficiency of manufacture, installation, management, operation, and control of the unit (10).

The present invention relates to a vacuum multi-sensing unit (10) used for adhesion and transfer of an object (P) together with a vacuum pump (23) in a vacuum transfer system. The multi-sensing unit (10) of the present invention includes a plurality of sensors (13) to perform multi-sensing, wherein individual and collective control of the built-in sensors (13) is possible. Therefore, in particular, when a plurality of vacuum pumps (23) are required for transfer of objects (P), the plurality of vacuum pumps (23) are allowed to correspond to a single unit (10), and thus, compared to a conventional sensing unit individually attached to each vacuum pump, there is superior effect in terms of the efficiency of manufacture, installation, management, operation, and control of the unit (10).

An improved diaphragm vacuum gauge includes a pressure receiving unit having an electrical property that changes in accordance with displacement of a diaphragm caused by pressure of a measurement target medium; a heater that heats the pressure receiving unit; a temperature sensor that measures a temperature of the pressure receiving unit; a pressure measurement unit that converts a change in the electrical property of the pressure receiving unit to a pressure measurement value; a storage unit that stores a plurality of heating temperature settings; a heating temperature setting unit that selects one heating temperature setting from among the plurality of heating temperature settings in accordance with a digital input signal that is externally input; and a controller that controls power supply to the heater based on the temperature measured by the temperature sensor and the heating temperature setting selected by the heating temperature setting unit.

An improved diaphragm vacuum gauge including a sensor chip that includes a first electrode provided on a base and a second electrode provided on a diaphragm so as to face the first electrode, the diaphragm and the base being disposed with a gap therebetween, and in which a distance between the first electrode and the second electrode changes in accordance with displacement of the diaphragm caused by pressure of a measurement target medium. The diaphragm vacuum gauge further includes an operational amplifier that converts a current output from the first electrode to a voltage and amplifies the voltage, and a coaxial cable that connects the first electrode and the operational amplifier with each other. Further, the first electrode is connected to a virtual ground of the operational amplifier by a core wire of the coaxial cable.

An improved diaphragm vacuum gauge including a sensor chip that includes a first electrode provided on a base and a second electrode provided on a diaphragm so as to face the first electrode, the diaphragm and the base being disposed with a gap therebetween, and in which a distance between the first electrode and the second electrode changes in accordance with displacement of the diaphragm caused by pressure of a measurement target medium. The diaphragm vacuum gauge further includes an operational amplifier that converts a current output from the first electrode to a voltage and amplifies the voltage, and a coaxial cable that connects the first electrode and the operational amplifier with each other. Further, the first electrode is connected to a virtual ground of the operational amplifier by a core wire of the coaxial cable.

A photonically multiplexed optical measurement apparatus for performing optical multiplexing includes a laser that produces laser light, an optical switch that receives the laser light from the laser and produces a switched laser light, and a plurality of sensor heads, each sensor head being configured to measure a respective physical property of a plurality of cold atoms disposed in the sensor head. The optical switch optically switches the laser light from the laser to a selected sensor head and subsequently to a different sensor head.

A method and system for wireless communication in a conveyor system. The method includes: formulating a command from a master controller to an accessory controller; translating the command into a simplified protocol; transmitting the simplified command via a wireless communications channel; receiving the simplified command at a wireless receiver; processing the simplified command by the accessory controller; formulating a response to the master controller from the accessory controller; transmitting the response via the wireless communications channel; and translating the response for handling by the master controller. The system includes: a downlink converter/transmitter configured to translate a command into a simplified protocol and send a simplified command via a wireless signal; an accessory receiver/transmitter configured to receive the wireless signal; and an accessory interface configured to communicate the simplified command to the accessory for execution.

A system of measuring and correcting for distortions in homodyne systems and a method for operating a data processing system to provide an estimate of distortions in homodyne systems are disclosed. The method for operating a data processing system to provide an estimate of a distortion introduced by a homodyne system when the homodyne system processes a time a multi-tone time domain input signal, x(t), to obtain a time domain output signal, y(t) includes receiving a frequency spectrum, X(f), of the multi-tone time domain input signal, x(t) and measuring an output frequency spectrum, Y(f), when the homodyne system operates on x(t). A plurality of parameters of a model that represents a linear frequency response of the homodyne system when operating on X(f) to arrive at Y(f) by fitting the model to Y(f) and X(f) is determined, and the model is applied to X(f) and Y(f) to estimate the distortions.

A pressure gauge includes: an outer container defining an outer chamber set to a reference pressure (Pr); an inner container disposed in the outer container; and a tube setting the inside of a first inner chamber of the inner container to a measurement pressure (Px). The inner container includes: a cylindrical rigid wall portion; first and second pressure receiving plates that displace due to a differential pressure between the reference pressure and the measurement pressure; a bellows partitioning the inner container into the first inner chamber and a second inner chamber; and a pressure detection element disposed in the second inner chamber and detecting the measurement pressure based on the displacements of the first and the second pressure receiving plates. The outer chamber and the second inner chamber are set to the reference pressure of a high vacuum that is lower than a lower limit of the measurement pressure.

A pressure sensor includes a diaphragm of a thin plate shape, the diaphragm forming part of a wall surface of a pressure chamber into and out from which a measurement target fluid flows. Multiple recesses are formed in the diaphragm on a side in contact with the measurement target fluid, and an interval between adjacent two of the multiple recesses is 10 μm or less.