A method for reviewing a defect including a light capturing step that illuminates a sample with light under plural optical conditions, while varying only at least one of illumination conditions, sample conditions, or detection conditions, and detects plural lights scattering from the sample; a signal obtaining step that obtains plural signals based on the lights detected; and a processing step that discriminates a defect from noise according to a waveform characteristic quantity, an image characteristic quantity, or a value characteristic quantity created using the signals and derives the coordinates of defect.

When a reticle is first used, the reticle is loaded in a projection exposure device and measured by either oblique measurement and random measurement, thereby avoiding the fear of uneven sampling and determining the reticle transmittance of the entire reticle as the parent population, without increasing the sampling count. The same effect can be obtained by making the measurement spot size, which is fixed in general, variable and by changing the angle of incidence in relation to the measurement spot size.

Provided are a foreign material detecting device and method for detecting only a foreign material on a surface of a substrate except for a foreign material on a lower surface of the substrate in a manufacturing process of a transparent substrate passing light therethrough, such as a glass substrate used in a flat panel display (FPD) such as a liquid crystal display (LCD), an organic light emitting diode (OLED), a plasma display panel (PDP), etc., a sapphire wafer used in some of semiconductors, or the like, and in a pattern forming process in a manufacturing process of the FPD and the semiconductor using the transparent substrate. More particularly, provided are a foreign material detecting device and method for detecting only a foreign material on a surface of an ultra-thin transparent substrate having a thickness of 0.3 T or less.

A method, system, and apparatus for determining chlorophyll content of a plant sample. The method includes emitting light at a first wavelength and a second wavelength into a plant sample with a chlorophyll meter; detecting the light after passing through the plant sample; generating an optical value responsive to a ratio of the percentage of transmitted light through the plant sample for the first wavelength and the second wavelength; and determining chlorophyll content based on the optical value compared with an optical/absolute chlorophyll relationship that was determined by a matched combination of extraction method, extraction solvent, spectrophotometric equation, and spectrophotometer resolution, wherein the optical/absolute relationship is one of a plurality of different optical/absolute relationships that a user may select from for different species. These relationships may link in situ optical measurements with in vitro chlorophyll concentration for display on a chlorophyll meter in units of mass or moles of chlorophyll per unit area or mass of tissue.

Systems and methods for processing sample processing devices. The system can include a sample processing device comprising a detection chamber, a motor configured to rotate the sample processing device about an axis of rotation, and an optical module operatively positioned relative to the sample processing device and configured to determine whether a selected volume of material is present in the detection chamber of the sample processing device. The method can include rotating the sample processing device about an axis of rotation, and determining whether a selected volume of material is present in the detection chamber, while rotating the sample processing device. In some embodiments, determining whether a selected volume of material is present can be performed by optically interrogating the detection chamber for an optical property of the material.

For measuring concentrations of fluid-soluble gases with improved drift stability and low production costs, thus dispensing with tedious calibration and/or drift correction routines and re-membraning procedures, a sensor and a system are provided, comprising at least two electrodes, which are covered by sensor fluid at at least one detection site; and an ion-balancing means (50), for example a mixed-bed ion-exchange resin, in contact with the sensor fluid for removing polluting ions.

A zeroing method and zeroing device for an optical time-domain reflectometer (OTDR) are disclosed. The zeroing method includes: before starting the optical time-domain reflectometer, when a laser device is in an off state, sending a zeroing signal; and performing zeroing processing according to the zeroing signal. In the embodiments of the present invention, the feedback zeroing can be performed on a receiving circuit by utilizing the idle time prior to a test or during the test, thus the influence of an offset voltage is reduced, and a problem of operational-amplifier zero drift also can be solved in the meantime, which improves a detectability of the OTDR, and overcomes a disadvantage that a manual zeroing method is not intelligent and a measured waveform introduced in an automatic zeroing method is bad.

A metal film of a measurement device including a transparent dielectric substrate is irradiated with first light from a transparent dielectric substrate side, an optical electric field enhanced by an optical electric field enhancing effect of a localized plasmon induced to a surface of the metal film by the irradiation is generated, light emitted from the transparent dielectric substrate side is detected, a specimen installed on a surface of a metal fine concavo-convex structure layer and a matrix agent are irradiated with second light from a side opposite to the side of the irradiation with the first light in a state where a voltage is applied to the metal fine concavo-convex structure layer through a voltage application electrode, an analysis target substance for mass spectrometry in the specimen is desorbed from the surface by the irradiation, and the desorbed analysis target substance is detected.

The present set of embodiments relate to a system, method, and apparatus for an optical configuration in a flow cytometer that allows for independent adjustment of focusing for each light source. Such systems, methods, and apparatuses require a final focusing element to be moved near the beginning of the optical train and for each optical element coming after the final focusing element to be configured to accommodate converging light beams while minimizing the introduction of aberrations into those beams.

An inspection apparatus for simultaneous dark field (DF) and differential interference contrast (DIC) inspection includes an illumination source and a sample stage configured to secure a sample. The inspection apparatus includes a first sensor, a second sensor and an optical sub-system. The optical sub-system includes an objective, one or more optical elements arranged to direct, through the objective, illumination from the one or more illumination sources to a surface of the sample. The objective is configured to collect a signal from the surface of the sample, wherein the collected signal includes a scattering-based signal and/or a phase-based signal from the sample. The inspection apparatus includes one or more separation optical elements arranged to spatially separate the collected signal into a DF signal and a DIC signal by directing the DF signal and the DIC signal along a DF path and DIC path respectively.