An earthquake sensing module includes an acceleration sensor configured to detect accelerations on a plurality of detection axes, a module control unit configured to control the acceleration sensor, and a module storage unit configured to store state information of the acceleration sensor.

For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

A method for calibrating a radial acceleration sensor of a wheel of a vehicle including the following steps: acquisition, by the sensor, of signals S.sub.i, each signal S.sub.i being acquired during a predetermined time window W.sub.i when the vehicle is in motion, the windows W.sub.i being different from one another; detection, for each time window W.sub.i, of local extrema of the signal S.sub.i associated respectively with phase values and detection instants; determination, for each time window W.sub.i, of a frequency F.sub.i of the rotation of the wheel of the vehicle as a function of the phase values and of the detection instants for the local extrema detected; low-pass filtering of the signals S.sub.i, so as to obtain, for each time window W.sub.i, a filtered value Z.sub.i; calibration of a constant error E.sub.c of the radial acceleration sensor as a function of the filtered values Z.sub.i and of the frequencies F.sub.i.

A method for calibrating a radial acceleration sensor of a wheel of a vehicle including the following steps: acquisition, by the sensor, of signals S.sub.i, each signal S.sub.i being acquired during a predetermined time window W.sub.i when the vehicle is in motion, the windows W.sub.i being different from one another; detection, for each time window W.sub.i, of local extrema of the signal S.sub.i associated respectively with phase values and detection instants; determination, for each time window W.sub.i, of a frequency F.sub.i of the rotation of the wheel of the vehicle as a function of the phase values and of the detection instants for the local extrema detected; low-pass filtering of the signals S.sub.i, so as to obtain, for each time window W.sub.i, a filtered value Z.sub.i; calibration of a constant error E.sub.c of the radial acceleration sensor as a function of the filtered values Z.sub.i and of the frequencies F.sub.i.

A method for automatically calibrating a rocker-type sensor module having a position or acceleration sensor involves measuring a position of the sensor module as an angle relative to a fixed spatial direction, and outputting an output signal that depends on whether the measured angle is less than or greater than a switching angle. The output signal is set to a first output value if the measured angle exceeds the switching angle. The switching angle is set to a value corresponding to the measured angle minus an “off” free pivot angle, as long as the value of the measured angle continues to increase. The output signal is set to a second output value if the measured angle falls below the switching angle. The switching angle is set to a value corresponding to the measured angle plus an “on” free pivot angle, as long as the value of the measured angle continues to fall.

A method for automatically calibrating a rocker-type sensor module having a position or acceleration sensor involves measuring a position of the sensor module as an angle relative to a fixed spatial direction, and outputting an output signal that depends on whether the measured angle is less than or greater than a switching angle. The output signal is set to a first output value if the measured angle exceeds the switching angle. The switching angle is set to a value corresponding to the measured angle minus an “off” free pivot angle, as long as the value of the measured angle continues to increase. The output signal is set to a second output value if the measured angle falls below the switching angle. The switching angle is set to a value corresponding to the measured angle plus an “on” free pivot angle, as long as the value of the measured angle continues to fall.

Methods, systems and devices for installing, configuring and orienting an accelerometer device into an application in which the orientation of the accelerometer device is arbitrary are disclosed herein.

Methods, systems and devices for installing, configuring and orienting an accelerometer device into an application in which the orientation of the accelerometer device is arbitrary are disclosed herein.

An acceleration device includes an actuator configured to displace a mass in a reciprocating motion at a desired frequency, a mount configured to hold a device, such as an accelerometer device, and at least one spring connecting the mount to the mass. The actuator is used to apply a force to achieve resonance. The actuator may comprise a voice coil motor, wherein the voice coil motor includes a permanent magnet and an armature and wherein said armature comprises part of said mass. The actuator applies a periodic force to the mass. The periodic force may be a sinusoidal force. Preferably, the applied force is aligned with a resulting velocity of the mass. The mount may include a test socket to which the device is electrically connected. The spring may comprises one or more flexure elements. The acceleration device may be used with a handler device to connect and disconnect the device to and from the mount. Optionally, the handler device includes an environmental chamber surrounding the mount.

An acceleration device includes an actuator configured to displace a mass in a reciprocating motion at a desired frequency, a mount configured to hold a device, such as an accelerometer device, and at least one spring connecting the mount to the mass. The actuator is used to apply a force to achieve resonance. The actuator may comprise a voice coil motor, wherein the voice coil motor includes a permanent magnet and an armature and wherein said armature comprises part of said mass. The actuator applies a periodic force to the mass. The periodic force may be a sinusoidal force. Preferably, the applied force is aligned with a resulting velocity of the mass. The mount may include a test socket to which the device is electrically connected. The spring may comprises one or more flexure elements. The acceleration device may be used with a handler device to connect and disconnect the device to and from the mount. Optionally, the handler device includes an environmental chamber surrounding the mount.