Patent classifications
G01P21/00
Systems and methods to determine stiction failures in MEMS devices
Various embodiments of the invention provide for stiction testing in MEMS devices, such as accelerometers. In certain embodiments, testing is accomplished by a high voltage smart circuit that enables an analog front-end circuit to accurately read the position of a movable proof-mass relative to a biased electrode in order to allow the detection of both contact and release conditions. Testing allows to detect actual or potential stiction failures and to reject defective parts in a Final Test stage of a manufacturing process where no other contributors to stiction issue can occur, thereby, minimizing stiction failure risks and extending the reliability of MEMS devices.
Systems and methods to determine stiction failures in MEMS devices
Various embodiments of the invention provide for stiction testing in MEMS devices, such as accelerometers. In certain embodiments, testing is accomplished by a high voltage smart circuit that enables an analog front-end circuit to accurately read the position of a movable proof-mass relative to a biased electrode in order to allow the detection of both contact and release conditions. Testing allows to detect actual or potential stiction failures and to reject defective parts in a Final Test stage of a manufacturing process where no other contributors to stiction issue can occur, thereby, minimizing stiction failure risks and extending the reliability of MEMS devices.
VECTOR AIR DATA DYNAMIC CONSTRAINING AND SELF-CHECKING SYSTEMS AND METHODS
In an embodiment, a method is provided. The method comprises selecting at least one set of line of sight (LOS) vectors oriented in one or more directions outward from a vehicle; determining at least one air data solution based on the at least one set of LOS vectors; adjusting at least one value of an air vector equation based on a predetermined quantity; upon adjusting the at least one value, then determining at least one modified air data solution, wherein the at least one modified air data solution is determined based on the at least one set of LOS vectors and the at least one value; and comparing a difference between the at least one air data solution and the at least one modified air data solution to a threshold value, wherein the threshold value is indicative of error with respect to the at least one set of LOS vectors.
MEASURING CIRCUIT
A measuring circuit comprising a sensing element configured to generate a measuring signal from a measuring object, a signal injector configured to generate an auxiliary signal, and an evaluation circuit comprising a first upstream amplifier with a first input connected to a first pole of the sensing element via a first signal line and a second upstream amplifier with a first input connected to a second pole of the sensing element via a second signal line. A measuring circuit with an improved reliable control of its measuring chain allowing continuous testing of the integrity of the measurement signal coming from the sensing element and/or to allow the measuring circuit to be upgradable with respect to a different sensing unit and/or evaluation unit, the first upstream amplifier comprises a second input connected to the signal injector, and the evaluation circuit comprises a first downstream amplifier having a first input connected to the signal injector and a second input connected to an output of the first upstream amplifier.
INERTIAL MEASUREMENT UNIT
An inertial measurement unit comprising at least one inertial sensor that is arranged to output an inertial measurement and a primary temperature sensor spatially associated with each inertial sensor that is arranged to output a temperature measurement, and a processor that receives the outputs; wherein the processor is arranged to differentiate the temperature measurement with respect to time so as to determine a temporal temperature gradient output. Existing temperature sensor(s) can be used to observe not only absolute temperature, but also thermal gradients, to further improve performance of the inertial measurement unit (IMU). This approach is distinct from the conventional calibration approach adopted for inertial sensors and IMUs in that the temperature sensor(s) in the device are used to determine temporal temperature gradients, in addition to a temperature output alone, one or both of which can be used for parametric compensation.
Method of Detecting Whether Microelectromechanical System Device Is Hermetic
A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.
Method of Detecting Whether Microelectromechanical System Device Is Hermetic
A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.
Calibration of Vectors in a Measurement System
A method of data calibration, and in particular sensor calibration, which involves gathering an initial first estimate and then binning the data samples, so that calibration can be performed without the need for a known reference stimulus. The present disclosure relates to calibration of vectors in a measurement system, and in particular to calibration of a correction function for systematic errors in successive data vectors. There is provided a method of determining a vector calibration function comprising: binning successive data vectors; and optimising the binned data vectors once data vectors allocated to a minimum number of unique bins have been observed. The method comprises establishing an initial calibration estimate and where the binning and optimising are performed based on said initial calibration estimate.
Calibration of Vectors in a Measurement System
A method of data calibration, and in particular sensor calibration, which involves gathering an initial first estimate and then binning the data samples, so that calibration can be performed without the need for a known reference stimulus. The present disclosure relates to calibration of vectors in a measurement system, and in particular to calibration of a correction function for systematic errors in successive data vectors. There is provided a method of determining a vector calibration function comprising: binning successive data vectors; and optimising the binned data vectors once data vectors allocated to a minimum number of unique bins have been observed. The method comprises establishing an initial calibration estimate and where the binning and optimising are performed based on said initial calibration estimate.
METHOD AND SYSTEM FOR CALIBRATING A PEDOMETER
A method of calibrating a wearable electronic device includes providing an indication of a target speed for an activity to a user wearing the wearable electronic device and receiving location data from a location data unit during the activity. The method also includes receiving, concurrently with the location data, user stride data associated with the user during the activity and computing a speed of the user as a function of the location data as a function of time. The method further includes populating a table of the speed of the user as a function of the user stride data and calibrating the wearable electronic device in accordance with the table.