A scanning probe microscope with a first actuator (3) configured to move a feature in the form of a tip (2) so that the feature follows a scanning motion. A vision system (10) is configured to collect light from a field of view to generate image data. The field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element (13). A tracking control system (15)bis configured to generate one or more tracking drive signals in accordance with stored reference data. A second actuator (14) is configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the field of view. An image analysis system (20) is configured to analyse the image data from the vision system to identify the feature and measure an apparent motion of the feature relative to the field of view. A calibration system is configured to adjust the stored reference data based on the apparent motion measured by the image analysis system.

Embodiments described herein are generally directed to a device that monitors for the presence of objects passing through or impinging on a virtual shell near the device, referred to herein as a light curtain, which is created by rapidly rotating a line sensor and a line laser in synchrony. The boundaries of the light curtain are defined by a sweeping line defined by the intersection of the sensing and illumination planes.

A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.

A method for detecting the presence of an energized e-field in a space, wherein the space includes at least one electrically conductive element disposed in the space and coupled with a controller, the method including receiving in the controller a signal from the at least one electrically conductive element, determining that an energized e-field occupies the space, and generating an indication, by the controller, indicative of the presence of the energized e-field in the space.

A method for detecting the presence of an energized e-field in a space, wherein the space includes at least one electrically conductive element disposed in the space and coupled with a controller, the method including receiving in the controller a signal from the at least one electrically conductive element, determining that an energized e-field occupies the space, and generating an indication, by the controller, indicative of the presence of the energized e-field in the space.

An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.

A scanning probe microscope analyses a sample by moving a probe and the sample relative to one another. The scanning probe microscope includes a detection unit for detecting an image of a gap between the sample and the probe in a substantially horizontal side view.

A scanning probe microscope analyses a sample by moving a probe and the sample relative to one another. The scanning probe microscope includes a detection unit for detecting an image of a gap between the sample and the probe in a substantially horizontal side view.

Provided herein are systems and methods for simultaneous imaging and stimulation using a microscope system. The microscope system can have a relatively small size compared to an average microscope system. The microscope can comprise in part an imaging light source and a stimulation light source. Light from the imaging light source and the stimulation light source can be spectrally separated to reduce cross talk between the stimulation light and the imaging light.

Methods, devices, and systems for forming atomically precise structures are provided. In some embodiments, the methods, devices, and systems of the present disclosure utilize a scanning tunneling microscope (STM) system to receive a sample having a surface to be patterned. The system positions a conductive tip over a pixel region of the surface. While the conductive tip remains laterally fixed relative to the surface, the system applies a bias voltage between the conductive tip and the surface such that a current between the conductive tip and the surface removes at least one atom from the pixel region. The system stops applying the voltage and current when it senses the removal of the at least one atom. The system then verifies that the at least one atom has been removed from the pixel region.