A scanning probe microscope with a first actuator (3) configured to move a feature in the form of a tip (2) so that the feature follows a scanning motion. A vision system (10) is configured to collect light from a field of view to generate image data. The field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element (13). A tracking control system (15)bis configured to generate one or more tracking drive signals in accordance with stored reference data. A second actuator (14) is configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the field of view. An image analysis system (20) is configured to analyse the image data from the vision system to identify the feature and measure an apparent motion of the feature relative to the field of view. A calibration system is configured to adjust the stored reference data based on the apparent motion measured by the image analysis system.

A scanning probe microscope with a first actuator (3) configured to move a feature in the form of a tip (2) so that the feature follows a scanning motion. A vision system (10) is configured to collect light from a field of view to generate image data. The field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element (13). A tracking control system (15)bis configured to generate one or more tracking drive signals in accordance with stored reference data. A second actuator (14) is configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the field of view. An image analysis system (20) is configured to analyse the image data from the vision system to identify the feature and measure an apparent motion of the feature relative to the field of view. A calibration system is configured to adjust the stored reference data based on the apparent motion measured by the image analysis system.

A calibration apparatus for a tip-enhanced Raman microscope includes a substrate; a two-dimensional Raman scatterer that is mounted on an upper surface of the substrate; and a well-defined topographic structure that is formed at the upper surface of the substrate. The topographic structure may include convex geometric shapes such as triangles and squares arranged in one or more periodic lattices. Calibration is via adjusting a focal length of a laser beam until a signal from a spectrometer repeatedly exhibits a stepped response when a focal point of the laser beam traverses an edge of a two-dimensional Raman scatterer, then adjusting the relative lateral positions of a scanning probe microscope probe tip and the focal point until the signal from the spectrometer and a signal from the scanning probe microscope repeatedly change within an acceptable time delay while the focal point and the probe tip traverse edges of the topographic structure.

A calibration apparatus for a tip-enhanced Raman microscope includes a substrate; a two-dimensional Raman scatterer that is mounted on an upper surface of the substrate; and a well-defined topographic structure that is formed at the upper surface of the substrate. The topographic structure may include convex geometric shapes such as triangles and squares arranged in one or more periodic lattices. Calibration is via adjusting a focal length of a laser beam until a signal from a spectrometer repeatedly exhibits a stepped response when a focal point of the laser beam traverses an edge of a two-dimensional Raman scatterer, then adjusting the relative lateral positions of a scanning probe microscope probe tip and the focal point until the signal from the spectrometer and a signal from the scanning probe microscope repeatedly change within an acceptable time delay while the focal point and the probe tip traverse edges of the topographic structure.

A method and system for calibrating force (F12) in a dynamic mode atomic force microscope (AFM). An AFM tip (11) is disposed on a first cantilever (12). The first cantilever (12) is actuated to oscillate the AFM tip (11) in a dynamic mode. A first sensor (16) is configured to measure a first parameter (A1) of the oscillating AFM tip (11). A second sensor (26) is configured to measure a second parameter (A2) of a resilient element (22). The oscillating AFM tip (11) is moved in proximity to the resilient element (22) while measuring the first parameter (A1) of the AFM tip (11) and the second parameter (A2) of the resilient element (22). A force (F12) between the oscillating AFM tip (11) and the resilient element (22) is calculated based on the measured second parameter (A2) and a calibrated force constant (K2) of the resilient element (22).

A method and system for calibrating force (F12) in a dynamic mode atomic force microscope (AFM). An AFM tip (11) is disposed on a first cantilever (12). The first cantilever (12) is actuated to oscillate the AFM tip (11) in a dynamic mode. A first sensor (16) is configured to measure a first parameter (A1) of the oscillating AFM tip (11). A second sensor (26) is configured to measure a second parameter (A2) of a resilient element (22). The oscillating AFM tip (11) is moved in proximity to the resilient element (22) while measuring the first parameter (A1) of the AFM tip (11) and the second parameter (A2) of the resilient element (22). A force (F12) between the oscillating AFM tip (11) and the resilient element (22) is calculated based on the measured second parameter (A2) and a calibrated force constant (K2) of the resilient element (22).

Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.

Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.

A calibration apparatus for a tip-enhanced Raman microscope includes a substrate; a two-dimensional Raman scatterer that is mounted on an upper surface of the substrate; and a well-defined topographic structure that is formed at the upper surface of the substrate. The topographic structure may include convex geometric shapes such as triangles and squares arranged in one or more periodic lattices. Calibration is via adjusting a focal length of a laser beam until a signal from a spectrometer repeatedly exhibits a stepped response when a focal point of the laser beam traverses an edge of a two-dimensional Raman scatterer, then adjusting the relative lateral positions of a scanning probe microscope probe tip and the focal point until the signal from the spectrometer and a signal from the scanning probe microscope repeatedly change within an acceptable time delay while the focal point and the probe tip traverse edges of the topographic structure.

A calibration apparatus for a tip-enhanced Raman microscope includes a substrate; a two-dimensional Raman scatterer that is mounted on an upper surface of the substrate; and a well-defined topographic structure that is formed at the upper surface of the substrate. The topographic structure may include convex geometric shapes such as triangles and squares arranged in one or more periodic lattices. Calibration is via adjusting a focal length of a laser beam until a signal from a spectrometer repeatedly exhibits a stepped response when a focal point of the laser beam traverses an edge of a two-dimensional Raman scatterer, then adjusting the relative lateral positions of a scanning probe microscope probe tip and the focal point until the signal from the spectrometer and a signal from the scanning probe microscope repeatedly change within an acceptable time delay while the focal point and the probe tip traverse edges of the topographic structure.