Patent classifications
G01Q70/00
Sharpening method for probe tip of atomic force microscope (AFM)
A sharpening method for a probe tip of an Atomic Force Microscope (AFM) includes the steps of dripping a prepared slurry on a glass slide to form a droplet on the glass slide, where particles of the prepared slurry are diamond powder; infiltrating the tip to be sharpened with the prepared slurry; setting operation mode of the AFM to tapping in the fluid and lowering the probe into droplet till the probe cantilever beam is immersed completely in the droplet; setting vibration parameters, scanning parameters, and sharpening time, performing tip sharpening; and evaluating the sharpening results, and finishing sharpening. When the AFM works in a tapping mode in fluid, the tip of the self-excited oscillating probe is sharpened under the grinding effect of the diamond particles. The method is simple and effective, and easy to implement.
SHARPENING METHOD FOR PROBE TIP OF ATOMIC FORCE MICROSCOPE (AFM)
A sharpening method for a probe tip of an Atomic Force Microscope (AFM) includes the steps of dripping a prepared slurry on a glass slide to form a droplet on the glass slide, where particles of the prepared slurry are diamond powder; infiltrating the tip to be sharpened with the prepared slurry; setting operation mode of the AFM to tapping in the fluid and lowering the probe into droplet till the probe cantilever beam is immersed completely in the droplet; setting vibration parameters, scanning parameters, and sharpening time, performing tip sharpening; and evaluating the sharpening results, and finishing sharpening. When the AFM works in a tapping mode in fluid, the tip of the self-excited oscillating probe is sharpened under the grinding effect of the diamond particles. The method is simple and effective, and easy to implement.
Multi-axis positioning device
A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.
Probe system and method for receiving a probe of a scanning probe microscope
The invention relates to a probe system for a scanning probe microscope which (a) has a receptacle apparatus for a probe, (b) has a probe storage, which provides at least one probe for the scanning probe microscope, (c) wherein the probe, the probe storage, and the receptacle apparatus are embodied in such a way that the probe can form a releasable first connection with the probe storage and a releasable second connection with the receptacle apparatus, wherein the first connection and/or the second connection use a magnetic force; and wherein the receptacle apparatus and the probe storage are movable relative to one another in such a way for receiving the probe that the probe forms the second connection before the first connection is released.
Probe system and method for receiving a probe of a scanning probe microscope
The invention relates to a probe system for a scanning probe microscope which (a) has a receptacle apparatus for a probe, (b) has a probe storage, which provides at least one probe for the scanning probe microscope, (c) wherein the probe, the probe storage, and the receptacle apparatus are embodied in such a way that the probe can form a releasable first connection with the probe storage and a releasable second connection with the receptacle apparatus, wherein the first connection and/or the second connection use a magnetic force; and wherein the receptacle apparatus and the probe storage are movable relative to one another in such a way for receiving the probe that the probe forms the second connection before the first connection is released.
METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
Apparatus and method for exchanging probe
An apparatus for exchanging a probe includes a stacker configured to receive a probe and to align the probe, a probe connector connected to the probe, and a laser alignment unit including a light emitter and a light receiver. The light emitter is configured to emit a laser beam to the probe, and the light receiver is configured to detect the laser beam reflected by the probe. The laser alignment unit is configured to detect when the probe is properly aligned on the probe connector using the light receiver, and the laser alignment unit is configured to stop moving the stacker when it is detected that the probe is properly aligned.
METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
Measurement system
A measurement system comprising: a radiation source arranged to generated a detection beam; a probe; and a probe positioning system arranged to move the probe from an un-aligned position in which it is not illuminated by the detection beam, to an aligned position in which it is illuminated by the detection beam and the detection beam is reflected by the probe to generate a reflected detection beam. A scanner generates a relative scanning motion between the probe and a sample, the sample being aligned with the probe and interacting with the probe during the relative scanning motion. A sensor detects the reflected detection beam during the relative scanning motion to collect a first data set from the sample. A second device is provided for modifying the sample or obtaining a second data set from the sample. A sample stage is arranged to move the sample in accordance with an offset vector stored in a memory so that it becomes un-aligned from the probe and aligned with the second device.