Testing probe and semiconductor testing fixture, and their fabrication methods are provided. A plurality of first testing pins is formed on the substrate, each first testing pin including a first testing terminal on a top and a first connection terminal on a bottom. An insulating layer is formed on a sidewall surface of each first testing pin. A number of second testing pins are formed on the insulating layers, each second testing pin including a second testing terminal on a top thereof and a second connection terminal on a bottom thereof. A first concave surface is formed on a top of the second testing terminal, and surrounds a corresponding first testing pin.

A probe card includes a ceramic substrate; an electrode connection part connecting an electrode pad and a via pad which are provided on one surface of the ceramic substrate; a bonding pad provided on an upper surface of the electrode pad and disposed inwardly of an edge of the electrode pad; and a probe bonded to an upper surface of the bonding pad by a solder layer between the bonding pad and the probe. The bonding pad includes a lead part protruding from a side surface of the bonding pad. As a result, overflowed solder at the time of attaching the probe onto the upper surface of the bonding pad may be dispersed to the lead part.

An optical magnetometer comprising: an optical resonator having a central void; and a magnetostrictive material located in the central void such that a change in dimension of the magnetostrictive material causes a change in mechanical modes of the optical resonator. Also a method of making the optical magnetometer.

An optical magnetometer comprising: an optical resonator having a central void; and a magnetostrictive material located in the central void such that a change in dimension of the magnetostrictive material causes a change in mechanical modes of the optical resonator. Also a method of making the optical magnetometer.

A monolithic three-axis magnetic field sensor comprises an X-axis sensor, a Y-axis sensor and a Z-axis sensor integrated into the same substrate. The X-axis sensor and the Y-axis are both referenced bridge structures. The magnetoresistive sensing elements of the reference arm are beneath the corresponding magnetic flux guides, and the magnetoresistive sensing elements are in the gaps between the corresponding magnetic flux guides. The magnetoresistive elements of these two sensors are aligned perpendicular to each other, and the magnetization directions of the pinned layer of these magnetoresistive elements are perpendicular to each other as well. The Z-axis sensor is a push-pull bridge structure. The push arms and pull arms of the magnetoresistive sensors are respectively aligned above or beneath the edges of the magnetic flux guides. The manufacturing method for this monolithic three-axis magnetic field sensor is also disclosed.

Cantilever probes are produced for use in a test apparatus of integrated electronic circuits. The probes are configured to contact corresponding terminals of the electronic circuits to be tested during a test operation. The probe bodies are formed of electrically conductive materials. On a lower portion of each probe body that, in use, is directed to the respective terminal to be contacted, an electrically conductive contact region is formed having a first hardness value equal to or greater than 300 HV; each contact region and the respective probe body form the corresponding probe.

Cantilever probes are produced for use in a test apparatus of integrated electronic circuits. The probes are configured to contact corresponding terminals of the electronic circuits to be tested during a test operation. The probe bodies are formed of electrically conductive materials. On a lower portion of each probe body that, in use, is directed to the respective terminal to be contacted, an electrically conductive contact region is formed having a first hardness value equal to or greater than 300 HV; each contact region and the respective probe body form the corresponding probe.

A test system includes a test printed circuit board (PCB), a flip chip package mounted on the PCB, one or more test probes coupled to the flip chip package and a first integrated circuit (IC) coupled to the test probes to enable testing of the first IC using electrical circuitry of the flip chip package.

A test system includes a test printed circuit board (PCB), a flip chip package mounted on the PCB, one or more test probes coupled to the flip chip package and a first integrated circuit (IC) coupled to the test probes to enable testing of the first IC using electrical circuitry of the flip chip package.

A microelectronic test device comprising an organic substrate, a probe holder, and an interposer disposed between the organic substrate and the probe holder, wherein the interposer has a coefficient of thermal expansion that is less than a coefficient of thermal expansion of the organic substrate. The interposer may effectively decouple the organic substrate from probes in the probe holder, which may substantially reduce or eliminate probe misalignment due to the coefficient of thermal expansion mismatch between the organic substrate and other components of the microelectronic test device and to provide require stiffness to the organic substrate.