Examples of a multiple-mask multiple-exposure lithographic technique and suitable masks are provided herein. In some examples, a photomask includes a die area and a stitching region disposed adjacent to the die area and along a boundary of the photomask. The stitching region includes a mask feature for forming an integrated circuit feature and an alignment mark for in-chip overlay measurement.

Provided is a mask assembly, including: an annular mask frame; a supporting structure, located on a side of the mask frame, fixedly connected to the mask frame, and having an opening; and a mask structure, located on a side of the mask frame and fixedly connected to the mask frame, and including a strip-shaped mask body and a sheet-shaped mask piece corresponding to the opening, wherein the mask piece is fixedly connected to a side edge of the mask body and has a plurality of first through holes, wherein an orthographic projection of the mask body on a bearing surface of the mask frame does not overlap with an orthographic projection of the opening on the bearing surface, and an orthographic projection of the mask piece on the bearing surface overlaps with the orthographic projection of the opening on the bearing surface.

Collection reflectors with multiple reflector elements defined on a curved surface are used to collect EUV optical radiation from an EUV emitting area. Each of the reflector elements can image the emitting area at or near a corresponding reflective element of a second multi-element reflector that overlaps radiation from each of the multiple reflector element of the collection reflector to illuminate a grating reticle. Systems with such a collection reflector can use fewer optical elements. In addition, grating reticles are defined on a curve substrate an include a plurality of grating phase steps so that the grating reticle provides phase curvature along two axes but with physical curvature along a single axis. Methods of producing varying duty cycle 1D patterns are also disclosed.

This application discloses a display panel, a mask for manufacturing same, and a display device. The display panel includes a first substrate, a second substrate, a liquid crystal layer, a plurality of grooves, and a spacer. The second substrate and the first substrate are arranged oppositely. The liquid crystal layer is formed between the first substrate and the second substrate. The plurality of grooves are provided on the first substrate and depressed from the surface of the first substrate. The spacer is formed on the first substrate and arranged between the first substrate and the second substrate. The spacer includes a main spacer and sub-spacers, the main spacer being higher than the sub-spacers, and the sub-spacers being located inside the grooves.

A mask includes a first region and a second region. The first region includes a first light-shielding strip and a second light-shielding strip, the second region includes a third light-shielding strip, the first light-shielding strip, the second light-shielding strip is located between the first light-shielding strip and the third light-shielding strip, the first light-shielding strip, the second light-shielding strip and the third light-shielding strip are configured to shield light and bound spaces, and the spaces are configured in such a manner that light is allowed to pass through the spaces. A width of the first light-shielding strip in a first direction is larger than a width of the second light-shielding strip in the first direction, and the width of the second light-shielding strip in the first direction is larger than a width of the third light-shielding strip in the first direction.

A display panel and a manufacturing method thereof are disclosed. The display panel has a display area and a peripheral area, including: an array substrate, an opposite substrate, and a sealant layer including a first edge close to the display area and a second edge away from the display area. The array substrate includes a base substrate, a driving circuit and an organic insulating layer including a first part and a second part. In a direction perpendicular to a substrate surface, the first part overlaps with the sealant layer, and the second part has no overlap. In a direction parallel to the substrate surface, an edge of the first part away from the display area is between the first edge and the second edge. The driving circuit includes a gate scan driving circuit at least partially overlapped with the first part in the direction perpendicular to the substrate surface.

A method of forming patterned features on a substrate is provided. The method includes positioning a plurality of masks arranged in a mask layout over a substrate. The substrate is positioned in a first plane and the plurality of masks are positioned in a second plane, the plurality of masks in the mask layout have edges that each extend parallel to the first plane and parallel or perpendicular to an alignment feature on the substrate, the substrate includes a plurality of areas configured to be patterned by energy directed through the masks arranged in the mask layout. The method further includes directing energy towards the plurality of areas through the plurality of masks arranged in the mask layout over the substrate to form a plurality of patterned features in each of the plurality of areas.

An operating method includes: placing a first mask, a second mask, a third mask and a fourth mask on a rotating base, in which each of the first, second, third and fourth masks has a first exposure unit, a second exposure unit, a third exposure unit and a fourth exposure unit; overlaying the first, second, third and fourth masks such that the first exposure unit of the first mask, the second exposure unit of the second mask, the third exposure unit of the third mask and the fourth exposure unit of the fourth mask are arranged adjacently to form an exposure area; simulating a first coordinate information according to the exposure area by an image simulation unit; scanning the exposure area, by a scanning electron microscope (SEM), to obtain a second coordinate information; and comparing the first coordinate information with the second coordinate information.

Systems and methods for custom photolithography masking via a precision dispense apparatus and process are disclosed. Methods include creating a toolpath instruction for depositing opaque onto a substrate, programming a precision dispense apparatus to execute the created toolpath instruction, and causing the precision dispense tool to deposit opaque material onto the substrate to form the photomask. The substrate may be an optically transparent plate or film or may be an electronic substrate where the opaque material is deposited directly onto a photoresist coating. Capabilities of the systems and methods disclosed herein extend to 3D substrates and custom photolithography masking, among others.

Systems and methods for custom photolithography masking via a precision dispense apparatus and process are disclosed. Methods include creating a toolpath instruction for depositing opaque onto a substrate, programming a precision dispense apparatus to execute the created toolpath instruction, and causing the precision dispense tool to deposit opaque material onto the substrate to form the photomask. The substrate may be an optically transparent plate or film or may be an electronic substrate where the opaque material is deposited directly onto a photoresist coating. Capabilities of the systems and methods disclosed herein extend to 3D substrates and custom photolithography masking, among others.