An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. For some embodiments of the invention, the photoemissive structure is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In some embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.

System and method for nanoscale X-ray imaging of biological specimen. The imaging system comprises an X-ray source including a plurality of spatially and temporally addressable electron sources, an X-ray detector arranged such that incident X-rays are oriented normal to an incident surface of the X-ray detector and a stage arranged between the X-ray source and the X-ray detector, the stage configured to have mounted thereon a biological specimen through which X-rays generated by the X-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the stage to acquire a set of intensity data by the X-ray detector as the stage moves along a three-dimensional trajectory.

Disclosed herein is an apparatus suitable for detecting X-ray, comprising: an X-ray absorption layer comprising an electrode; an electronics layer, the electronics layer comprising: a substrate having a first surface and a second surface, an electronics system in or on the substrate, an electric contact on the first surface, and a first via extending from the first surface toward the second surface; wherein the electrode is electrically connected to the electric contact; wherein the electronics system comprises a controller connected in series with and between the electric contact and the first via.

Disclosed herein is an apparatus comprising: a radiation absorption layer comprising an electrode; a counter configured to register a number of radiation particles absorbed by the radiation absorption layer; a controller configured to start a time delay from a time at which an absolute value of an electrical signal on the electrode equals or exceeds an absolute value of a first threshold; wherein the controller is configured to cause the number registered by the counter to change, in response to the absolute value of the electrical signal equaling or exceeding an absolute value of a second threshold during the time delay.

Objects undergoing processing by a high resolution x-ray microscope with a high flux x-ray source that allows high speed metrology or inspection of objects such as integrated circuits (ICs), printed circuit boards (PCBs), and other IC packaging technologies. The object to be investigated is illuminated by collimated, high-flux x-rays from an extended source having a designated x-ray spectrum. The system also comprises a stage to control the position and orientation of the object; a scintillator that absorbs x-rays and emits visible photons positioned in very close proximity to (or in contact with) the object; an optical imaging system that forms a highly magnified, high-resolution image of the photons emitted by the scintillator; and a detector such as a CCD array to convert the image to electronic signals.

Objects undergoing processing by a high resolution x-ray microscope with a high flux x-ray source that allows high speed metrology or inspection of objects such as integrated circuits (ICs), printed circuit boards (PCBs), and other IC packaging technologies. The object to be investigated is illuminated by collimated, high-flux x-rays from an extended source having a designated x-ray spectrum. The system also comprises a stage to control the position and orientation of the object; a scintillator that absorbs x-rays and emits visible photons positioned in very close proximity to (or in contact with) the object; an optical imaging system that forms a highly magnified, high-resolution image of the photons emitted by the scintillator; and a detector such as a CCD array to convert the image to electronic signals.

A method, target, and apparatus are disclosed for investigating a specimen using X-ray tomography. The specimen in mounted on a specimen holder. An X-ray target has a substrate of relatively low-atomic-number material carrying an array of mutually isolated nuggets of a relatively high-atomic number material. X-rays are generated by irradiating a single nugget in the target with a charged particle beam, which then illuminates the specimen along a first line of sight through the specimen. A flux of X-rays transmitted through the specimen is detected to form a first image. The illumination process is repeated for a series of different lines of sight through the specimen, to produce a series of images. A mathematical reconstruction on the series of images is then performed to produce a tomogram of at least part of the specimen.

A method, target, and apparatus are disclosed for investigating a specimen using X-ray tomography. The specimen in mounted on a specimen holder. An X-ray target has a substrate of relatively low-atomic-number material carrying an array of mutually isolated nuggets of a relatively high-atomic number material. X-rays are generated by irradiating a single nugget in the target with a charged particle beam, which then illuminates the specimen along a first line of sight through the specimen. A flux of X-rays transmitted through the specimen is detected to form a first image. The illumination process is repeated for a series of different lines of sight through the specimen, to produce a series of images. A mathematical reconstruction on the series of images is then performed to produce a tomogram of at least part of the specimen.

Disclosed herein is an apparatus comprising: a radiation absorption layer comprising an electrode; a counter configured to register a number of radiation particles absorbed by the radiation absorption layer; a controller configured to start a time delay from a time at which an absolute value of an electrical signal on the electrode equals or exceeds an absolute value of a first threshold; a comparator configured to compare the electrical signal to a second threshold; wherein the controller is configured to activate the comparator during the time delay; wherein the controller is configured to cause the number registered by the counter to change, if the comparator determines that an absolute value of the electrical signal equals or exceeds an absolute value of the second threshold.

An imaging device includes an image processor configured to: i) determine that a detection intensity distribution indicating detection intensity with respect to position coordinates of a stage is a convolution of an image intensity distribution on an extension line of a linear pixel and a window function; (ii) calculate an image intensity distribution for each linear pixel by deconvolution from the detection intensity distribution; and (iii) generate an image of the subject by disposing the image intensity distribution calculated in all the linear pixels in an arrangement direction of the linear pixels.