The present teaching relates to methods, systems, and apparatus for X-ray imaging with a detector capable of resolving photon energy. In one example, an X-ray microscope is disclosed. The X-ray microscope comprises an X-ray source and a detector. The X-ray source is configured for irradiating X-ray to a sample. The detector is configured for: detecting X-ray photons from the irradiated X-ray, determining energy of each of the detected X-ray photons, and generating an image of the sample based on detected X-ray photons that have energies in a predetermined range.

The present teaching relates to methods, systems, and apparatus for X-ray imaging with a detector capable of resolving photon energy. In one example, an X-ray microscope is disclosed. The X-ray microscope comprises an X-ray source and a detector. The X-ray source is configured for irradiating X-ray to a sample. The detector is configured for: detecting X-ray photons from the irradiated X-ray, determining energy of each of the detected X-ray photons, and generating an image of the sample based on detected X-ray photons that have energies in a predetermined range.

The present invention relates to a method of analyzing strain of a thin film by using a Strain Tensor Using Computational Fourier Transform Moiré (STC) method, and the method includes: receiving two Bragg peaks selected from a reciprocal lattice image obtained by Fourier transforming a two-dimensional (2D) lattice image of a thin film; shifting the two received Bragg peaks to an origin point of the reciprocal lattice image; calculating a moiré fringe pattern by Fourier-inverse-transforming the two Bragg peaks shifted to the origin point; calculating a strain tensor by differentiating the calculated moiré fringe pattern; and analyzing strain of the thin film by using the calculated strain tensor. The present invention, it is possible to obtain a considerably accurate strain analysis result with minimal errors even in the case where strain of a thin film is complex, and measure shear strain, as well as axial strain, of a thin film.

In one embodiment, an automated high-speed X-ray inspection tool may emit, by an X-ray source, an X-ray beam to an object of interest with a portion of the X-ray beam penetrating through the object of interest. The automated high-speed X-ray inspection tool may capture, by an X-ray sensor, one or more X-ray images of the object of interest based on the portion of the X-ray beam that penetrates through the object of interest. Each of the X-ray images may be captured with a field of view of at least 12 million pixels.

In one embodiment, an automated high-speed X-ray inspection tool may emit, by an X-ray source, an X-ray beam to an object of interest with a portion of the X-ray beam penetrating through the object of interest. The automated high-speed X-ray inspection tool may capture, by an X-ray sensor, one or more X-ray images of the object of interest based on the portion of the X-ray beam that penetrates through the object of interest. Each of the X-ray images may be captured with a field of view of at least 12 million pixels.

In this patent, we teach methods to generate coherent X-ray and UUV rays beams for X ray and UUV microscopes using intense femtosecond pulses resulting the Ultra-Supercontinuum (USC) and Higher Harmonic Generation (HHG) from χ3 and χ.sup.5 media produce from electronic and molecular Kerr effect. The response of n.sub.2 (χ3) and n.sub.4 (χ5) at the optical frequency from instantaneously response of carrier phase of envelope results in odd HHG and spectral broadening about each harmonic on the anti-Stokes side of the pump pulse at wo typically in the visible, NIR, and MIR. From the slower molecular Kerr response on femtosecond to picosecond from orientation and molecular motion on n.sub.2 and n.sub.4 which follow the envelope of optical field of the laser gives rise to extreme broadening without HHG. The resulting spectra extend on the Stokes side towards the IR, RF to DC covering most of the electromagnetic spectrum. These HHG and Super broadening covering UUV to X rays and possibly to gamma ray regime for microscopes.

In this patent, we teach methods to generate coherent X-ray and UUV rays beams for X ray and UUV microscopes using intense femtosecond pulses resulting the Ultra-Supercontinuum (USC) and Higher Harmonic Generation (HHG) from χ3 and χ.sup.5 media produce from electronic and molecular Kerr effect. The response of n.sub.2 (χ3) and n.sub.4 (χ5) at the optical frequency from instantaneously response of carrier phase of envelope results in odd HHG and spectral broadening about each harmonic on the anti-Stokes side of the pump pulse at wo typically in the visible, NIR, and MIR. From the slower molecular Kerr response on femtosecond to picosecond from orientation and molecular motion on n.sub.2 and n.sub.4 which follow the envelope of optical field of the laser gives rise to extreme broadening without HHG. The resulting spectra extend on the Stokes side towards the IR, RF to DC covering most of the electromagnetic spectrum. These HHG and Super broadening covering UUV to X rays and possibly to gamma ray regime for microscopes.

A specimen radiography system may include a controller and a cabinet. The cabinet may include an x-ray source, an x-ray detector, and a specimen drawer disposed between the x-ray source and the x-ray detector. The specimen drawer may be automatically positionable along a vertical axis between the x-ray source and the x-ray detector.

A specimen radiography system may include a controller and a cabinet. The cabinet may include an x-ray source, an x-ray detector, and a specimen drawer disposed between the x-ray source and the x-ray detector. The specimen drawer may be automatically positionable along a vertical axis between the x-ray source and the x-ray detector.

An imaging type X-ray microscope capable of enlarging a numerical aperture even with high energy X-rays and acquiring a magnified image with sufficient intensity even in a laboratory. The imaging type X-ray microscope comprises an X-ray irradiation unit having a microfocal and high-power X-ray source and a condenser mirror for focusing and irradiating the emitted X-rays toward a sample, a sample holding unit for holding the sample, a reflecting mirror type X-ray lens unit for imaging X-rays transmitted through the sample, and an imaging unit for acquiring the imaged X-ray image, wherein each mirror constituting the condenser mirror and the reflecting mirror type X-ray lens unit has a reflecting surface formed with a multilayer film having a high reflectivity in X-rays of a specific wavelength.