H01J35/00

Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
11940736 · 2024-03-26 · ·

A tin trap device for collecting tin in a chamber device which causes tin to be turned into plasma with laser light in an internal space thereof may include a housing provided with a gas inlet port through which exhaust gas in the chamber device flows and a gas exhaust port through which the exhaust gas is exhausted; and a main heater arranged in the housing, configured to have a temperature equal to or higher than the melting point of tin and lower than the boiling point thereof, and having a projection surface projected toward a direction in which the exhaust gas flows in the gas inlet port cover the gas inlet port.

LINEAR ACCELERATOR FOR GENERATING HIGH X-RAY DOSES
20240090112 · 2024-03-14 ·

An X-ray generation system is configured to generate an X-ray beam configured to be delivered to a patient undergoing radiation therapy. The X-ray generation system includes a linear accelerator system configured to generate an electron beam configured to impinge a target configured to respond to the incident electron beam by emitting an X-ray beam configured to deliver an X-ray dose rate to the patient in a range of 40 Gy/s to 1000 Gy/s within a treatment delivery window.

X-ray source with an electromagnetic pump

An electromagnetic pump for pumping an electrically conductive liquid, including a first conduit section and a second conduit section. The electromagnetic pump further includes a current generator arranged to provide an electric current through the liquid in the first conduit section and the liquid in the second conduit section such that a direction of the electric current is intersecting the flow of the liquid in the first conduit section and in the second conduit section, and a magnetic field generating arrangement arranged to provide a magnetic field passing through the liquid in the first conduit section and the second conduit section such that a direction of the magnetic field is intersecting the flow of the liquid and the direction of the electric current.

X-ray generating tube including electron gun, X-ray generating apparatus and radiography system
10497533 · 2019-12-03 · ·

Provided is an X-ray generating tube including an electron gun, which includes a grid electrode secured to a support member. In the X-ray generating tube, thermal stress generated at a joining portion between the support member and the grid electrode is reduced, to thereby maintain a position of an electron beam on a target irradiated with the electron beam accurately for a long time. A grid electrode and a support member are secured to each other via a buffer member, which has an elastic coefficient that is lower than elastic coefficients of the grid electrode and the support member, and which is joined to the grid electrode and the support member through a first joining portion on the grid electrode side and a second joining portion on the support member side, respectively.

High voltage supply for compact radiation generator

Disclosed is a radiation logging tool, comprising a tool housing; a compact generator that produces radiation; a power supply coupled to the compact generator; and control circuitry. Embodiments of the compact generator comprise a generator vacuum tube comprising a source generating charged particles, and a target onto which the charged particles are directed; and a high voltage supply comprising a high voltage multiplier ladder located laterally adjacent to the generator vacuum tube. The high voltage supply applies a high voltage between the source and the target to accelerate the charged particles to a predetermined energy level. The compact generator also includes an electrical coupling between an output of the high voltage supply and the target of the generator vacuum tube to accommodate the collocated positions of the generator vacuum tube and the high voltage power supply.

X-ray systems and methods including X-ray anodes
10490385 · 2019-11-26 ·

An anode for an X-ray tube can include a body comprising one or more of a yttrium-oxide derivative, titanium diboride, boron carbide, titanium suboxide, reaction bonded silicon carbide, and reaction boded silicon nitride. Upon collision with an anode, the kinetic energy of an electron beam in an X-ray tube is converted to high frequency electromagnetic waves, i.e., X-rays. An anode with a body from one or more of the above materials can reduce costs and/or weight, extend the life of the anode or associated components (e.g., bearings) and simultaneously provide a high heat storage capacity than traditional molybdenum and tungsten anodes.

X-ray source using electron impact excitation of high velocity liquid metal beam
10473599 · 2019-11-12 ·

An X-ray source uses excitation of a liquid metal beam of ions or ionized droplets to produce an X-ray output with higher brightness than conventional sources. The beam may be accelerated from a liquid metal source using an extraction electrode. The source may have an emitter tip, and the acceleration of the liquid metal may include field emission from a Taylor cone. An electrostatic or electromagnetic focusing electrode may be used to reduce a cross-sectional diameter of the beam. The liquid metal beam has a relatively high velocity as it does not suffer from flow turbulence, thus allowing for a more energetic excitation and a correspondingly higher brightness. A beam dump may also be used to collect the liquid metal beam after excitation, and may be concave with no direct sight lines to either an electron beam cathode or to X-ray windows of an enclosure for the source.

X-ray systems and methods including X-ray anodes with gradient profiles
10438768 · 2019-10-08 ·

An anode for an X-ray tube can include one or more of an yttrium-oxide derivative, titanium diboride, boron carbide, titanium suboxide, reaction-bonded silicon carbide, and reaction-bonded silicon nitride. Upon collision with an anode, the kinetic energy of an electron beam in an X-ray tube is converted to high-frequency electromagnetic waves, i.e., X-rays. An anode from one or more of the above materials and a gradient distribution of conductive metals can reduce costs and/or weight, extend the life of the anode or associated components (e.g., bearings) and simultaneously provide a higher heat storage capacity as compared to traditional molybdenum and tungsten anodes.

Thrust flange for x-ray tube with internal cooling channels

A bearing structure for an X-ray tube is provided that includes a journal bearing shaft with a radially protruding thrust bearing flange encased within a bearing housing or sleeve. The sleeve includes a thrust seal that is engaged with the sleeve in a manner to maintain coaxiality for the rotating liquid metal seal formed in the sleeve about the shaft. The shaft includes a central bore containing a cooling tube that directs coolant within the bore to maximize the heat transfer from the shaft to the coolant, allowing materials with lower thermal conductivities, such as steel, to be used to form the bearing shaft. The thrust flange on the shaft is formed with channel(s) therein that enable the coolant and/or the liquid metal to effect greater heat transfer on the components of the sleeve through the thrust flange, thereby reducing thermal deformation of the bearing components.

Composite target and X-ray tube with the composite target
10431414 · 2019-10-01 · ·

A composite target is provided and is interacted with an electron to generate an X-ray, and an energy of the electron can be changed by controlling a tube voltage at least. The composite target includes a target body and an interposing layer which is connected with the target body. The interposing layer moves a highest peak of an energy spectrum of the X-ray toward a high energy direction. The interposing layer may be a single metal or a metal mixture. Not only a low energy photon of the X-ray can be filtered by the interposing layer, but also a distribution of the low energy photon of the X-ray can be increased by increasing a thickness of the interposing layer. As the tube voltage is enhanced, an amount of a high energy photon of the X-ray generated is dramatically increased. An X-ray tube containing the above composite target is also provided.