A micro-electromechanical system (MEMS) device includes a support structure comprising a polycrystalline ceramic core, a first adhesion layer coupled to the polycrystalline ceramic core, a conductive layer coupled to the first adhesion layer, a second adhesion layer coupled to the conductive layer, and a barrier layer coupled to the second adhesion layer. The support structure defines a cavity. The MEMS device also includes a III-V membrane coupled to a portion of the support structure. A portion of the III-V membrane is suspended over the cavity defined by the support structure and defines a MEMS structure.

Metamaterial waveguides and shielded bridges are employed to improve the scalability and routing of quantum computing circuits. A metamaterial waveguide includes a signal conductor that has a periodic array of lumped element resonators distributed along and electrically coupled to a signal conductor. The periodic array of lumped element resonator pairs defines a bandgap within an operating bandwidth of the waveguide. Qubits can communicate within the operating bandwidth of the waveguide and communications via the waveguide can be controlled by changing a center frequency of the qubits. A shielded bridge is used to cross over high frequency communications and control CPW's in a quantum computing circuit. The shielded bridge includes a signal bridge that is elevated and extends over a separate CPW, and a ground bridge positioned between the signal bridge and the separate CPW.

Metamaterial waveguides and shielded bridges are employed to improve the scalability and routing of quantum computing circuits. A metamaterial waveguide includes a signal conductor that has a periodic array of lumped element resonators distributed along and electrically coupled to a signal conductor. The periodic array of lumped element resonator pairs defines a bandgap within an operating bandwidth of the waveguide. Qubits can communicate within the operating bandwidth of the waveguide and communications via the waveguide can be controlled by changing a center frequency of the qubits. A shielded bridge is used to cross over high frequency communications and control CPW's in a quantum computing circuit. The shielded bridge includes a signal bridge that is elevated and extends over a separate CPW, and a ground bridge positioned between the signal bridge and the separate CPW.

An example apparatus includes a connection module. The example connection module includes a connection interface and a connection matrix having a root transmission line to conduct signals to and from the connection interface. The connection matrix also includes branch transmission lines that are connectable electrically to the root transmission line to conduct the signals to and from the root transmission line. Each of the branch transmission lines is part of an electrical pathway between a device and the root transmission line. A housing encloses the connection matrix and enables access to the connection interface. The root transmission line and the branch transmission lines are each multi-conductor transmission lines that conduct the signals in transverse electromagnetic (TEM) mode.

Microwave photonic devices use light to carry and process microwave signals over a photonic link. Light can be used as a stimulus to microwave devices that directly control microwave signals. Previous optically controlled devices suffer from large footprint, high optical power level required for switching, lack of scalability and complex integration requirements, restricting their implementation in practical microwave systems. Disclosed are monolithic optically reconfigurable integrated microwave switches (MORIMSs) built on a CMOS compatible silicon photonic chip. The disclosed scalable micrometer-scale switches provide higher switching efficiency and operate using optical power that is orders of magnitude lower than previous devices. The disclosed devices and techniques provide examples of silicon photonic platforms integrating microwave circuitry.

A semiconductor structure includes a substrate including a p-type region and an n-type region, wherein the n-type region is in the p-type region and a distance between a top surface of the substrate and the n-type region is less than a distance between the top surface of the substrate and the p-type region. A buffer layer is over the n-type region and a first III-V compound layer is over the buffer layer. A second III-V compound layer is over the first III-V compound layer and a metal structure is over the second III-V compound layer. The metal structure may include a coplanar waveguide or a high electron mobility transistor.

Base station antenna feed boards are provided. A base station antenna feed board includes a phase shifter and a hybrid radio frequency transmission line that is coupled to the phase shifter. The hybrid radio frequency transmission line includes a coplanar waveguide and a microstrip line. Related base station antennas are also provided.

Superconducting circuits for processing input signals are described. An example superconducting circuit includes a first portion configured to receive an input signal having a data pattern represented by edge transitions in the input signal. The superconducting circuit further includes a second portion configured to provide an output signal, where the superconducting circuit is configured to, without applying a direct-current (DC) offset to the input signal, output the output signal corresponding to the edge transitions such that the output signal is substantially representative of the data pattern despite not applying the DC offset to the input signal.

Superconducting circuits for processing input signals are described. An example superconducting circuit includes a first portion configured to receive an input signal having a data pattern represented by edge transitions in the input signal. The superconducting circuit further includes a second portion configured to provide an output signal, where the superconducting circuit is configured to, without applying a direct-current (DC) offset to the input signal, output the output signal corresponding to the edge transitions such that the output signal is substantially representative of the data pattern despite not applying the DC offset to the input signal.

The present invention includes a method of creating electrical air gap or other low loss low cost RF mechanically and thermally stabilized interdigitated resonate filter in photo definable glass ceramic substrate. A ground plane may be used to adjacent to or below the RF filter in order to prevent parasitic electronic signals, RF signals, differential voltage build up and floating grounds from disrupting and degrading the performance of isolated electronic devices by the fabrication of electrical isolation and ground plane structures on a photo-definable glass substrate.