A spark plug and a method of manufacturing the same, where the spark plug has a metal shell, an insulator, a center electrode, a ground electrode, and a gasket located over a threaded portion of the shell and used to seal the spark plug against a cylinder head. Once the gasket is attached on the spark plug, it is shrunk to become a post-formed gasket with an inner diameter that prevents the post-formed gasket from slipping over a threaded portion of the metallic shell. This process may be carried out with a collet type machine that produces a post-formed gasket that is flat and has a substantially uniform thickness, which can improve the sealability of the gasket. This may be important when the spark plug is installed in a cylinder head made from a lost foam casting process or other process that creates a somewhat porous sealing surface.

A spark plug and a method of manufacturing the same, where the spark plug has a metal shell, an insulator, a center electrode, a ground electrode, and a gasket located over a threaded portion of the shell and used to seal the spark plug against a cylinder head. Once the gasket is attached on the spark plug, it is shrunk to become a post-formed gasket with an inner diameter that prevents the post-formed gasket from slipping over a threaded portion of the metallic shell. This process may be carried out with a collet type machine that produces a post-formed gasket that is flat and has a substantially uniform thickness, which can improve the sealability of the gasket. This may be important when the spark plug is installed in a cylinder head made from a lost foam casting process or other process that creates a somewhat porous sealing surface.

A corona igniter comprises an electrode with a central extended member extending along a central axis and a crown extending radially outwardly from the central extended member. The central extended member has an extended length and the crown has a crown length. The extended length is greater than the crown length such that the extended member approaches a piston more closely than the crown. In addition, the firing tips of the crown each present a first spherical radius which is less than a second spherical radius of the central extended member. Thus, if arcing occurs, it forms from the central extended member, rather than from the crown. Accordingly, the firing tips of the crown experience less wear and remain sharp. In addition, due to the sizes of the spherical radii, corona discharge is more likely to form from the firing tips than from the central extended member.

An ESD protection device includes an insulating ceramic body including a cavity, first and second discharge electrodes disposed so as to partially face each other with the cavity interposed therebetween, and a supporting electrode disposed so as to be at least partially exposed to the cavity and to be electrically connected to the first and second discharge electrodes. A void isolated from the cavity is provided in at least a portion of a boundary region between at least one of the first and second discharge electrodes, the supporting electrode, and the insulating ceramic body.

A discharge device according to the present disclosure includes a discharge electrode and a voltage applicator that applies a voltage to the discharge electrode and thus causes discharge that is further developed from corona discharge at the discharge electrode. The discharge is discharge in which a discharge path is intermittently formed by dielectric breakdown so as to stretch from the discharge electrode to a surrounding. This discharge can be called leader discharge. This makes it possible to increase an amount of generated active component while keeping an increase of ozone small.

A discharge device according to the present disclosure includes a discharge electrode and a voltage applicator that applies a voltage to the discharge electrode and thus causes discharge that is further developed from corona discharge at the discharge electrode. The discharge is discharge in which a discharge path is intermittently formed by dielectric breakdown so as to stretch from the discharge electrode to a surrounding. This discharge can be called leader discharge. This makes it possible to increase an amount of generated active component while keeping an increase of ozone small.

A substrate support chuck for use in a substrate processing system is provided herein. In some embodiments, a substrate support for use in a substrate processing chamber may include an electrostatic chuck having a top substrate support surface and a bottom surface, and a cooling ring assembly having a central opening disposed proximate the bottom surface of the electrostatic chuck, the cooling ring assembly including, a cooling section having a top surface thermally coupled to the bottom surface of the electrostatic chuck, the cooling section having a cooling channel formed in a bottom surface of the cooling section, and a cap coupled to a bottom surface of the cooling section and fluidly sealing the cooling channel formed in the cooling section.

An electrically conductive glass seal for providing a hermetic bond between an electrically conductive component and an insulator of a corona igniter is provided. The glass seal is formed by mixing glass frits, binder, expansion agent, and electrically conductive metal particles. The glass frits can include silica (SiO.sub.2), boron oxide (B.sub.2O.sub.3), aluminum oxide (Al.sub.2O.sub.3), bismuth oxide (Bi.sub.2O.sub.3), and zinc oxide (ZnO); the binder can include sodium bentonite or magnesium aluminum silicate, polyethylene glycol (PEG), and dextrin; the expansion agent can include lithium carbonate; and the electrically conductive particles can include copper. The finished glass seal includes the glass in a total amount of 50.0 to 85.0 weight (wt. %), and electrically conductive metal particles in an amount of 15.0 to 50.0 wt. %, based on the total weight of the glass seal.

An electrically conductive glass seal for providing a hermetic bond between an electrically conductive component and an insulator of a corona igniter is provided. The glass seal is formed by mixing glass frits, binder, expansion agent, and electrically conductive metal particles. The glass frits can include silica (SiO.sub.2), boron oxide (B.sub.2O.sub.3), aluminum oxide (Al.sub.2O.sub.3), bismuth oxide (Bi.sub.2O.sub.3), and zinc oxide (ZnO); the binder can include sodium bentonite or magnesium aluminum silicate, polyethylene glycol (PEG), and dextrin; the expansion agent can include lithium carbonate; and the electrically conductive particles can include copper. The finished glass seal includes the glass in a total amount of 50.0 to 85.0 weight (wt. %), and electrically conductive metal particles in an amount of 15.0 to 50.0 wt. %, based on the total weight of the glass seal.

An ESD protection device is manufactured such that its ESD characteristics are easily adjusted and stabilized. The ESD protection device includes an insulating substrate, a cavity provided in the insulating substrate, at least one pair of discharge electrodes each including a portion exposed in the cavity, the exposed portions being arranged to face each other, and external electrodes provided on a surface of the insulating substrate and connected to the at least one pair of discharge electrodes. A particulate supporting electrode material having conductivity is dispersed between the exposed portions of the at least one pair of discharge electrodes in the cavity