Described herein is a magnetically levitated linear transportation stage which utilizes a permanent magnet bias flux to generate a passive magnetic/suspension force/torque in a first set of directions orthogonal to a direction of transportation stage travel, a motor flux which forms a traveling wave along a direction of transportation stage travel and a suspension control force orthogonal to the direction of transportation stage travel. Such a magnetically levitated linear transportation stage is suitable for use in in-vacuum transportation tasks such as in conjunction with photo lithography systems (e.g. extreme ultra violet (EUV) machines).

Described herein is a magnetically levitated linear transportation stage which utilizes a permanent magnet bias flux to generate a passive magnetic/suspension force/torque in a first set of directions orthogonal to a direction of transportation stage travel, a motor flux which forms a traveling wave along a direction of transportation stage travel and a suspension control force orthogonal to the direction of transportation stage travel. Such a magnetically levitated linear transportation stage is suitable for use in in-vacuum transportation tasks such as in conjunction with photo lithography systems (e.g. extreme ultra violet (EUV) machines).

A transport system includes a mover, a stator, and a control unit. The mover moves in a first direction. The stator includes a plurality of coils arranged in the first direction and applies force to transport the mover in the first direction while using the plurality of coils, to which current is applied, to levitate the mover in a second direction intersecting the first direction. The control unit controls the current applied to the plurality of coils to control operation of the mover. The control unit controls the current applied to the plurality of coils using machine difference information of the mover to control an attitude of the mover while the mover is being levitated.

A transport system includes a mover, a stator, and a control unit. The mover moves in a first direction. The stator includes a plurality of coils arranged in the first direction and applies force to transport the mover in the first direction while using the plurality of coils, to which current is applied, to levitate the mover in a second direction intersecting the first direction. The control unit controls the current applied to the plurality of coils to control operation of the mover. The control unit controls the current applied to the plurality of coils using machine difference information of the mover to control an attitude of the mover while the mover is being levitated.

An apparatus for transferring a substrate to a substrate processing chamber includes: a substrate transfer chamber including a floor surface portion having a traveling surface-side magnet provided therein and a sidewall portion having an opening for transferring the substrate therethrough; a substrate transfer module including a substrate holder and a floating body-side magnet acting a repulsive force with the traveling surface-side magnet, and configured to be movable on a traveling surface formed in a region provided with the traveling surface-side magnet by magnetic floating using the repulsive force; the substrate processing chamber connected to the substrate transfer chamber via a gate valve constituting a non-traveling region in which the substrate transfer module is not movable by the magnetic floating; and a transfer assist mechanism for assisting the transfer of the substrate by the substrate transfer module between the substrate transfer chamber and the substrate processing chamber via the non-traveling region.

Multi-dimensional magnetic levitation and translation systems include at least one electromagnets located on each of three perpendicular axes. The at least three electromagnets are operated using a control system to apply a nonphysical force on objects contained within the magnetic field. An object is able to be levitated within the system in spite of any variable acceleration the system experiences due to the environment. The multi-dimensional magnetic levitation system is able to linearly translate an object within its volume of control.

Multi-dimensional magnetic levitation and translation systems include at least one electromagnets located on each of three perpendicular axes. The at least three electromagnets are operated using a control system to apply a nonphysical force on objects contained within the magnetic field. An object is able to be levitated within the system in spite of any variable acceleration the system experiences due to the environment. The multi-dimensional magnetic levitation system is able to linearly translate an object within its volume of control.

Systems and methods relate to a vertical takeoff and landing (VTOL) platform that can include a stator and a rotor magnetically levitated by the stator. The rotor and stator can be annular, such that the rotor rotates about a rotational axis. The stator can include magnets that provide guidance, levitation, and drive forces to drive the rotor, as well as to control operation of rotor blades of the rotor that can be independently rotated to specific pitch angles to control at least one of lift, pitch, roll, or yaw of the VTOL platform. Various controllers can be used to enable independent and redundant control of components of the VTOL platform.

Systems and methods relate to a vertical takeoff and landing (VTOL) platform that can include a stator and a rotor magnetically levitated by the stator. The rotor and stator can be annular, such that the rotor rotates about a rotational axis. The stator can include magnets that provide guidance, levitation, and drive forces to drive the rotor, as well as to control operation of rotor blades of the rotor that can be independently rotated to specific pitch angles to control at least one of lift, pitch, roll, or yaw of the VTOL platform. Various controllers can be used to enable independent and redundant control of components of the VTOL platform.

This application relates to simulation equipment, and more particularly to an apparatus and method for simulating a line running state of magnetic levitation. The apparatus includes a levitation-guidance mechanism, a moving mechanism and a magnetic guideway fluctuation simulated mechanism. The levitation-guidance mechanism is configured to detect a force on a single Dewar of a maglev train to be simulated. The moving mechanism is configured to move the levitation-guidance mechanism. The magnetic guideway fluctuation simulated mechanism is arranged below the levitation-guidance mechanism, and is configured to apply a variable force to the levitation-guidance mechanism. The variable force is configured to simulate a constantly-variable electromagnetic force applied to the levitation-guidance mechanism by a real track.