To provide a wavelength selection method or a plasma processing method to achieve accurate detection of residual thickness or etching amount, there is provided a plasma processing method, in which a processing object wafer is disposed within a processing chamber in the inside of a vacuum container, and plasma is generated by supplying a processing gas into the processing chamber and used to process a processing-object film layer beforehand formed on a surface of the wafer, and at least two wavelengths are selected from among wavelengths with large mutual information in emission of a plurality of wavelengths of plasma generated during processing of the processing-object film layer, and a temporal change in the emission of at least the two wavelengths is detected, and an endpoint of the processing of the film layer is determined based on a result of the detection.

A microwave-plasma disinfector (Origreen) with a microwave source with multi-feed points and variable output power. It also has a low-temperature atmospheric-pressure plasma source. This versatile microwave-plasma disinfector has the ability to decontaminate heat-sensitive materials by subjecting them to a microwave-assisted plasma with controlled microwave power. This dual-action, at suitable non-destructive microwave and plasma doses, sterilizes the equipment at a lower temperature with higher effectiveness than either plasma or microwaves alone

A device for the containment, mixing, acceleration, and controlled release of fast-flowing ionized fluids or plasma, consisting of a grooved sphere with interior and surface electromagnets of opposing polarity and variable power output. The grooves within the device allow for extremely high rates of ionized fluid/plasma flow and mixing of either the same or differing compositions for each groove, depending upon the materials injected into them, and for the release of accelerated ionized fluid/plasma instantaneously and simultaneously (with all grooves depressurizing synchronously and unidirectionally), gradually and simultaneously (with all grooves gradually depressurizing at the same or different rates), or non-simultaneously and gradually or instantaneously (with the grooves depressurizing at different rates and times). The invention also provides a means of slowing ionized fluid/plasma flow within the grooves by way of the magnetohydrodynamic effect, which offers the potential for partial power recovery.

A flexible ion generator device that includes a dielectric layer having a first end, a second end, a first side, a second side, a top side, and a bottom side, at least one trace positioned on the dielectric layer and having a plurality of emitters engaged to the at least one trace. A plurality of lights disposed on the dielectric layer.

A system for reducing plasma instability is disclosed. The system includes: an outer electrode having a first end and a second end spaced from the first end; and an inner electrode disposed inside of a void defined within the outer electrode and arranged coaxial with the outer electrode. The inner electrode includes: a base end defined by the first end of the outer electrode; and an apical end spaced from the base end. The system includes a fiber injector configured to inject a frozen fiber into the void from the apical end of the inner electrode; an electrode power source configured to energize the outer electrode and the inner electrode, and thereby, cause a plasma contained within the outer electrode to flow axially along the frozen fiber; and a frozen fiber power source configured to drive an electrical pulse to the frozen fiber.

A system for reducing plasma instability is disclosed. The system includes: an outer electrode having a first end and a second end spaced from the first end; and an inner electrode disposed inside of a void defined within the outer electrode and arranged coaxial with the outer electrode. The inner electrode includes: a base end defined by the first end of the outer electrode; and an apical end spaced from the base end. The system includes a fiber injector configured to inject a frozen fiber into the void from the apical end of the inner electrode; an electrode power source configured to energize the outer electrode and the inner electrode, and thereby, cause a plasma contained within the outer electrode to flow axially along the frozen fiber; and a frozen fiber power source configured to drive an electrical pulse to the frozen fiber.

A flexible ion generator device that includes a dielectric layer having a first end, a second end, a first side, a second side, a top side, and a bottom side, at least one trace positioned on the dielectric layer and having a plurality of emitters engaged to the at least one trace. A plurality of lights disposed on the dielectric layer.

A system for reducing plasma instability is disclosed. The system includes: an outer electrode having a first end and a second end spaced from the first end; and an inner electrode disposed inside of a void defined within the outer electrode and arranged coaxial with the outer electrode. The inner electrode includes: a base end defined by the first end of the outer electrode; and an apical end spaced from the base end. The system includes a fiber injector configured to inject a frozen fiber into the void from the apical end of the inner electrode; an electrode power source configured to energize the outer electrode and the inner electrode, and thereby, cause a plasma contained within the outer electrode to flow axially along the frozen fiber; and a frozen fiber power source configured to drive an electrical pulse to the frozen fiber.

A system for reducing plasma instability is disclosed. The system includes: an outer electrode having a first end and a second end spaced from the first end; and an inner electrode disposed inside of a void defined within the outer electrode and arranged coaxial with the outer electrode. The inner electrode includes: a base end defined by the first end of the outer electrode; and an apical end spaced from the base end. The system includes a fiber injector configured to inject a frozen fiber into the void from the apical end of the inner electrode; an electrode power source configured to energize the outer electrode and the inner electrode, and thereby, cause a plasma contained within the outer electrode to flow axially along the frozen fiber; and a frozen fiber power source configured to drive an electrical pulse to the frozen fiber.

A method of determining a peak intensity in an optical spectrum is described. The method includes producing a two-dimensional array of spectrum values by imaging the optical spectrum onto a detector array. An offset using an actual location and an expected location of a peak of an interpolated subarray is used to adjust an expected location of another peak that is within another two-dimensional subarray. Interpolated spectrum values are then used to produce a peak intensity value of the second peak.