Patent classifications
H05H1/00
FLOW FIELD VISUALIZATION DEVICE, FLOW FIELD OBSERVATION METHOD, AND PLASMA GENERATOR
A flow field visualization device includes a chamber, a power supply, at least one pair of electrodes, and at least two high-speed cameras. The power supply outputs a voltage for plasma generation, and the pair of electrodes is disposed in the chamber. The pair of electrodes includes a first electrode and a second electrode. The first electrode has a plurality of first tips, the second electrode has a plurality of second tips, and the first tips and the second tips are aligned with each other. The pair of electrodes generates a periodically densely distributed plasma by exciting a gas in the chamber through the voltage from the power supply. The high-speed cameras are disposed outside the chamber and are positioned in different directions corresponding to the pair of electrodes in order to capture images of different dimensions.
Water Vapor Quantification Methodology During Drying of Spent Nuclear Fuel
Methods and devices for detecting and quantifying water vapor concentration in spent nuclear fuel rods undergoing drying processes for safe storage purposes.
Multi-undulator spiral compact light source
A compact, small foot print, light source based on electron beam acceleration for insertion devices in EUV range metrology and actinic mask inspection using coherent scattering methods includes spiral storage rings providing plane straight sections. A magnet structure generates emittance for brilliance and coherent light content. A booster feeds the storage ring by top-up injection and keeps electron beam intensity stable. A booster level below the storage ring receives the electron beam from a linear accelerator in a central booster area. The source fits into laboratories or maintenance areas. Injection, RF-acceleration, beam manipulating devices and large diagnostics systems are required once. Higher average currents stored in the spiral enhance central cone power. Bunches are limited by ion trapping and a gap clears ions. The current is increased in the spiral. Gain in central cone power increases 5 fold, assuming a gap size of half single storage ring circumference.
Multi-undulator spiral compact light source
A compact, small foot print, light source based on electron beam acceleration for insertion devices in EUV range metrology and actinic mask inspection using coherent scattering methods includes spiral storage rings providing plane straight sections. A magnet structure generates emittance for brilliance and coherent light content. A booster feeds the storage ring by top-up injection and keeps electron beam intensity stable. A booster level below the storage ring receives the electron beam from a linear accelerator in a central booster area. The source fits into laboratories or maintenance areas. Injection, RF-acceleration, beam manipulating devices and large diagnostics systems are required once. Higher average currents stored in the spiral enhance central cone power. Bunches are limited by ion trapping and a gap clears ions. The current is increased in the spiral. Gain in central cone power increases 5 fold, assuming a gap size of half single storage ring circumference.
Non-linear optical simulator for collisional plasmas
A system for modeling a collisional plasma particles distribution is provided. The system includes an input beam generator configured to generate an input beam having a first set of values of a parameter modelling an initial distribution of particles in a collisional plasma, a non-linear optical medium configured to receive the input beam and produce a complex response function in response to receiving the input beam, an output detector configured to detect a second set of values of the parameter responsive to propagation of the input beam through the non-linear medium to the output detector, a feedback module configured to modify one or more properties of the non-linear optical medium, and a controller configured to select the first set of values, receive the second set of values, and determine, based on the first set and the second set of values, a final distribution of the particles in the collisional plasma.
Device for generating and delivering low temperature plasma
The present disclosure provides a low plasma generation system. In one implementation, the system includes a plurality of electrodes with a grounded electrode and at least one high-voltage electrode. The grounded and the high-voltage electrodes are arranged such that a tip of the grounded electrode and a tip of the at least one high-voltage electrode have a vertical-level difference.
Plasma generation apparatus including measurement device and plasma thruster
A plasma generation apparatus, and a plasma thruster configured to use the plasma generation apparatus are disclosed. The plasma generation apparatus includes a discharge vessel, a light-emitting monitor, a probe measuring instrument, a control device, and an optical axis driving unit. The discharge vessel is configured to ionize gas which is introduced to an inside thereof so as to generate plasma. The light-emitting monitor is configured to measure electron density of the plasma by emission spectra of the plasma. The probe measuring instrument is configured to measure the electron density of the plasma by a probe in the discharge vessel.
Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus
A substrate treating apparatus includes a chamber having a space therein in which a substrate is treated, a support unit that supports the substrate in the chamber, a gas supply unit that supplies gas into the chamber, and a plasma generation unit that excites the gas in the chamber into a plasma state. The plasma generation unit includes a high-frequency power supply, a first antenna connected to one end of the high-frequency power supply, a second antenna connected with the first antenna in parallel, and a current divider that distributes electric current to the first antenna and the second antenna. The current divider includes a first capacitor disposed between the first antenna and the second antenna, a second capacitor connected with the second antenna in parallel, and a third capacitor connected with the second antenna in series. The second capacitor and the third capacitor are implemented with a variable capacitor.
NON-LINEAR OPTICAL SIMULATOR FOR COLLISIONAL PLASMAS
A system for modeling a collisional plasma particles distribution is provided. The system includes an input beam generator configured to generate an input beam having a first set of values of a parameter modelling an initial distribution of particles in a collisional plasma, a non-linear optical medium configured to receive the input beam and produce a complex response function in response to receiving the input beam, an output detector configured to detect a second set of values of the parameter responsive to propagation of the input beam through the non-linear medium to the output detector, a feedback module configured to modify one or more properties of the non-linear optical medium, and a controller configured to select the first set of values, receive the second set of values, and determine, based on the first set and the second set of values, a final distribution of the particles in the collisional plasma.
PLASMA POWER GENERATOR (Z-box and Z-tower)
A plasma power generator wherein a plasma is generated by subjecting oxygen (O2) to a strong electromagnetic field. The oxygen plasma enters a chamber and is combined with free electrons from an electron-donation element thereby producing heat.