A composite beam apparatus includes an electron beam column for irradiating an electron beam onto a sample, a focused ion beam column for irradiating a focused ion beam onto the sample to form a cross section, and a neutral particle beam column having an acceleration voltage set lower than that of the focused ion beam column for irradiating a neutral particle beam onto the sample to perform finish processing of the cross section. The electron beam column, the focused ion beam column, and the neutral particle beam column are arranged such that the beams of the columns cross each other at an irradiation point. A controller controls the electron beam column to irradiate and scan the electron beam on the sample during cross section processing by the focused ion beam column and during finish processing by the neutral particle beam column. The composite beam apparatus is capable of suppressing the influence of charge build-up, or electric field or magnetic field leakage from an electron beam column, when subjecting a sample to cross-section processing with a focused ion beam and then performing finishing processing with another beam.

A composite beam apparatus includes an electron beam column for irradiating an electron beam onto a sample, a focused ion beam column for irradiating a focused ion beam onto the sample to form a cross section, and a neutral particle beam column having an acceleration voltage set lower than that of the focused ion beam column for irradiating a neutral particle beam onto the sample to perform finish processing of the cross section. The electron beam column, the focused ion beam column, and the neutral particle beam column are arranged such that the beams of the columns cross each other at an irradiation point. A controller controls the electron beam column to irradiate and scan the electron beam on the sample during cross section processing by the focused ion beam column and during finish processing by the neutral particle beam column. The composite beam apparatus is capable of suppressing the influence of charge build-up, or electric field or magnetic field leakage from an electron beam column, when subjecting a sample to cross-section processing with a focused ion beam and then performing finishing processing with another beam.

Transition radiation from nanotubes, nanosheets, and nanoparticles and in particular, boron nitride nanomaterials, can be utilized for the generation of light. Wavelengths of light of interest for microchip lithography, including 13.5 nm (91.8 eV) and 6.7 nm (185 eV), can be generated at useful intensities, by transition radiation light sources. Light useful for monitoring relativistic charged particle beam characteristics such as spatial distribution and intensity can be generated.

A system may include a laser source, an acousto-optic modulator (AOM) coupled to the laser source, an atom trap, and at least one optical medium coupled between the AOM and the atom trap. Furthermore, at least one piezoelectric transducer may be coupled to the at least one optical medium, and a beam polarization controller may be coupled to the at least one piezoelectric transducer.

A system may include a laser source, an acousto-optic modulator (AOM) coupled to the laser source, an atom trap, and at least one optical medium coupled between the AOM and the atom trap. Furthermore, at least one piezoelectric transducer may be coupled to the at least one optical medium, and a beam polarization controller may be coupled to the at least one piezoelectric transducer.

The present disclosure present and method and apparatus for controlling the direction of a Neutral Beam derived from a gas cluster ion beam.

The present disclosure present and method and apparatus for controlling the direction of a Neutral Beam derived from a gas cluster ion beam.

A three-dimensional magneto-optical trap (3D GMOT) configured to trap a cold-atom cloud is disclosed. The 3D GMOT includes a single input light beam having its direction along a first axis, an area along a second and third axis that are both normal to the first axis, and a substantially flat input light beam intensity profile extending across its area. The 3D GMOT may also include a circular, diffraction-grating surface positioned normal to the first axis and having closely adjacent grooves arranged concentrically around a gap formed in its center. The circular, diffraction-grating surface is configured to diffract first-order light beams that intersect within an intersection region that lies directly above the gap and suppresses reflections and diffractions of all other orders. The 3D GMOT may further include a quadrupole magnetic field with its magnitude being zero within the intersection region.

A method for a laser-induced excitation of a radio frequency plasma at a low air pressure using a hardware device. The hardware device includes a pulsed laser source, a convex lens, a target material, an ion source system, and a radio frequency power supply system. When an air pressure value of the gas in the ion source system is lower than 1 Pa, and it's difficult to generate the radio frequency plasma, bombarding the target material in the ion source system by a pulsed laser beam; after the ion source system reaches a relatively high vacuum degree, providing gas to generate a plasma for the ion source system, providing the radio frequency electromagnetic field for the internal environment of the ion source system; outputting the high-intensity laser pulse; focusing the laser pulse to form a light spot with a high-power density.

Disclosed is an improved method of manufacturing cooled accelerator grid with full penetration weld configuration. In a preferred form, the method includes the steps of: machining a plurality of stubs, a first and a second end of a plurality of inconel pipes; welding the stubs with the first end of the inconel pipes forming a water connector assembly; machining of a base plate; welding the base plate with the water connector assembly; machining the base plate welded with the water connector assembly, wherein machining further comprises milling of plurality of cooling channels across angled plane of the base plate welded with the water connector assembly; closing of plurality of cooling channels located on the base plate welded with the water connector assembly; and welding each of plurality of external hydraulic circuits with the second end of each of the plurality of inconel pipes.