A negative ion source includes a plasma chamber, a microwave source, a negative ion converter, a magnetic filter and a beam formation mechanism. The plasma chamber contains gas to be ionized. The microwave source transmits microwaves to the plasma chamber to ionize the gas into atomic species including hyperthermal neutral atoms. The negative ion converter converts the hyperthermal neutral atoms to negative ions. The magnetic filter reduces a temperature of an electron density provided between the plasma chamber and the negative ion converter. The beam formation mechanism extract the negative ions.

Disclosed is a composite beam apparatus capable of suppressing the influence of charge build-up, or electric field or magnetic field leakage from an electron beam column when subjecting a sample to cross-section processing with a focused ion beam and then performing finishing processing with another beam. The Composite beam apparatus includes: an electron beam column irradiating an electron beam onto a sample; a focused ion beam column irradiating a focused ion beam onto the sample to form a cross section; a neutral particle beam column having an acceleration voltage set lower than that of the focused ion beam column, and irradiating a neutral particle beam onto the sample to perform finish processing of the cross section, wherein the electron beam column, the focused ion beam column, and the neutral particle beam column are arranged such that the beams of the columns cross each other at an irradiation point.

Disclosed is a composite beam apparatus capable of suppressing the influence of charge build-up, or electric field or magnetic field leakage from an electron beam column when subjecting a sample to cross-section processing with a focused ion beam and then performing finishing processing with another beam. The Composite beam apparatus includes: an electron beam column irradiating an electron beam onto a sample; a focused ion beam column irradiating a focused ion beam onto the sample to form a cross section; a neutral particle beam column having an acceleration voltage set lower than that of the focused ion beam column, and irradiating a neutral particle beam onto the sample to perform finish processing of the cross section, wherein the electron beam column, the focused ion beam column, and the neutral particle beam column are arranged such that the beams of the columns cross each other at an irradiation point.

The invention relates to a method for controlling the divergence of a jet of particles in vacuo with an aerodynamic lens, the aerodynamic lens including at least one chamber; a diaphragm, a so-called inlet diaphragm, intended to form an inlet of the aerodynamic lens for a jet of particles, the inlet diaphragm having a given diameter (d.sub.1); and another diaphragm, a so-called outlet diaphragm, intended to form an outlet of the aerodynamic lens for this jet of particles; the method including: a step for generating the jet of particles from the inlet to the outlet, in vacuo, of the aerodynamic lens; and a step for adjusting the diameter (d.sub.s) of the outlet diaphragm for controlling the divergence of the jet of particles.

The invention relates to a method for controlling the divergence of a jet of particles in vacuo with an aerodynamic lens, the aerodynamic lens including at least one chamber; a diaphragm, a so-called inlet diaphragm, intended to form an inlet of the aerodynamic lens for a jet of particles, the inlet diaphragm having a given diameter (d.sub.1); and another diaphragm, a so-called outlet diaphragm, intended to form an outlet of the aerodynamic lens for this jet of particles; the method including: a step for generating the jet of particles from the inlet to the outlet, in vacuo, of the aerodynamic lens; and a step for adjusting the diameter (d.sub.s) of the outlet diaphragm for controlling the divergence of the jet of particles.

A method of generating at least one trapped atom of a specific species, the method comprising the steps of : positioning a sample material (18) comprising a specific species in a vacuum (14); generate an atomic vapour (20) of the specific species by irradiating the sample material with a first laser (12); trapping one or more atoms from the generated atomic vapour.

A negative ion-based neutral beam injector comprising a negative ion source, accelerator and neutralizer to produce about a 5 MW neutral beam with energy of about 0.50 to 1.0 MeV. The ions produced by the ion source are pre-accelerated before injection into a high energy accelerator by an electrostatic multi-aperture grid pre-accelerator, which is used to extract ion beams from the plasma and accelerate to some fraction of the required beam energy. The beam from the ion source passes through a pair of deflecting magnets, which enable the beam to shift off axis before entering the high energy accelerator. After acceleration to full energy, the beam enters the neutralizer where it is partially converted into a neutral beam. The remaining ion species are separated by a magnet and directed into electrostatic energy converters. The neutral beam passes through a gate valve and enters a plasma chamber.

A system and method for stress testing a sample, the system comprising a high-intensity laser unit and a target for laser-matter interaction, wherein the high-intensity laser unit delivers an intensity of at least 10.sup.13 W/cm.sup.2 on the target, and resulting laser-accelerated particles generated by the target irradiate the sample.

A system and method for stress testing a sample, the system comprising a high-intensity laser unit and a target for laser-matter interaction, wherein the high-intensity laser unit delivers an intensity of at least 10.sup.13 W/cm.sup.2 on the target, and resulting laser-accelerated particles generated by the target irradiate the sample.

A device for measuring a quantity representative of a population (N) of cold atoms, the cold atoms being located in a cloud of cold atoms to be analyzed, the device includes a microwave source configured to generate an incident signal at a predetermined signal frequency, a microwave guide configured to propagate the incident signal and an antenna configured to emit the incident signal to the cloud of cold atoms and its environment, the antenna and the microwave guide also being able to recover an atomic reflected signal resulting from a reflection of the incident signal by the cloud and its environment, and which propagates in the waveguide in the opposite direction to the incident signal, a splitting device coupled to the microwave guide and configured to extract at least part of the atomic reflected signal, a detector configured to detect the atomic reflected signal extracted by the splitting device, the quantity representative of the population of cold atoms (N) being obtained from a detected value of the atomic reflected signal and from a detected value of a signal reflected by the environment in the absence of the cloud, called reference reflected signal.