H10B12/00

SEMICONDUCTOR DEVICE
20230055062 · 2023-02-23 ·

A semiconductor device with a novel structure is provided. A plurality of memory circuits, a switching circuit, and an arithmetic circuit are included. Each of the plurality of memory circuits has a function of retaining weight data and a function of outputting the weight data to a first wiring. The switching circuit has a function of switching a conduction state between any one of the plurality of first wirings and a second wiring. The arithmetic circuit has a function of performing arithmetic processing using input data and the weight data supplied to the second wiring. The memory circuits are provided in a first layer. The switching circuit and the arithmetic circuit are provided in a second layer. The first layer is provided in a layer different from the second layer.

SEMICONDUCTOR DEVICE AND FORMING METHOD THEREOF
20230053500 · 2023-02-23 ·

The present disclosure relates to a semiconductor device and a forming method thereof. The forming method includes: providing a substrate; forming node contacts inside the substrate; forming landing pads on an upper surface of the substrate, where the landing pad is in contact with the node contact; forming a barrier layer on exposed surfaces of the landing pads and the node contacts; and after performing an electrical test on the semiconductor device on which the barrier layer is formed, removing the barrier layer on an upper surface of the landing pads.

METHOD FOR RESOLVING DEFECT OF SURFACE STRUCTURE OF TRENCH AND METHOD FOR PREPARING SEMICONDUCTOR STRUCTURE
20230055868 · 2023-02-23 ·

The embodiments of the present disclosure propose a method for resolving a defect of surface structures of trenches and a method for preparing a semiconductor structure. The method for resolving a defect of surface structures of trenches includes: cleaning the trenches on a base with a cleaning liquid after the trenches are formed on the base, where the cleaning liquid is water.

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE
20230055977 · 2023-02-23 ·

The present disclosure provides a manufacturing method of a semiconductor structure and a semiconductor structure. The manufacturing method includes: providing a substrate, where the substrate includes a complete die region and an incomplete die region; forming a stack on the substrate; forming a first mask layer with a first pattern on the stack; forming a first photoresist layer on the first mask layer; exposing the first photoresist layer, and developing to remove the first photoresist layer on the complete die region; and etching the stack by using the first mask layer on the complete die region and the first photoresist layer on the incomplete die region as masks.

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE
20230059079 · 2023-02-23 ·

The present disclosure provides a manufacturing method of a semiconductor structure and a semiconductor structure. The manufacturing method includes: providing a substrate, where the substrate includes a complete die region and an incomplete die region; forming a stack on the substrate, where the stack includes sacrificial layers and supporting layers; forming a first photoresist layer on the stack; exposing the first photoresist layer, and developing to remove the first photoresist layer on the incomplete die region; and etching the stack by using the first photoresist layer on the complete die region as a mask.

METHOD FOR MANUFACTURING MEMORY AND MEMORY
20230059275 · 2023-02-23 ·

The present disclosure provides a method for manufacturing a memory, including: providing a substrate, and forming a sacrificial layer on the substrate; patterning the sacrificial layer, and forming a plurality of discrete pseudo bit line layers on the substrate; forming a support layer, the support layer filling areas between the adjacent pseudo bit line layers; removing the pseudo bit line layers to form bit line spaces between adjacent parts of the support layer; forming bit line structures, the bit line structures filling the bit line spaces, and the bit line structures including a bit line conductive layer and a bit line insulating layer sequentially stacked; and removing the support layer, and forming openings between the adjacent bit line structures.

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME
20230056204 · 2023-02-23 ·

Embodiments of the present disclosure provide a semiconductor structure and a method for manufacturing the same. The semiconductor structure includes: a substrate and a plurality of discrete bit line structures disposed on the substrate, a conductive plug being arranged between each adjacent bit line structures, a top surface of the conductive plug being lower than or flush with top surfaces of the bit line structures; and landing pads, one of the landing pads covering at least the top surface and part of side wall surfaces of the conductive plug.

ETCHING DEFECT DETECTION METHOD
20230054464 · 2023-02-23 ·

The present disclosure provides an etching defect detection method, relating to the field of semiconductor technology. The detection method includes: providing a substrate, and sequentially forming a conductive layer and a dielectric layer on the substrate; etching the dielectric layer to form a trench structure; taking the conductive layer as a cathode, and filling the trench structure with an electroplating layer by an electroplating process, to form a product to-be-detected; and testing the product to-be-detected by a defect density detection assembly, to obtain a top-view image of the trench structure, and determining an etching defect of the product to-be-detected according to the top-view image. The etching defect detection method can improve the accuracy of defect identification and prevent a capacitor from failing due to suspension.

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE
20230055490 · 2023-02-23 ·

The present disclosure provides a method for forming semiconductor structure and a semiconductor structure. The method for forming semiconductor structure includes: providing a semiconductor base with a substrate and a first oxide material layer; wherein the first oxide material layer is arranged on the substrate, the first oxide material layer includes a first region and a second region located at edge of the first region; patterning and etching the first oxide material layer; wherein oxide line structures are formed, and an annular empty slot structure is formed; refilling a second material; wherein the second material in the first region forms a plurality of isolation line structures, and the second material in the second region forms an annular dummy isolation layer; removing the oxide line structure by patterning and etching, and forming through hole structures; and forming a conductive material layer in the through hole structures.

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
20230054358 · 2023-02-23 ·

The present disclosure provides a semiconductor device and a manufacturing method thereof. The method for manufacturing a semiconductor device includes: providing a semiconductor substrate, with a plurality of trench isolation structures and a plurality of functional regions between the trench isolation structures being formed; forming a buried bit line structure, the buried bit line structure being formed in the semiconductor substrate; and forming a word line structure and a plurality of active regions, the word line structures and the active regions being formed on a surface of the semiconductor substrate and located above the functional regions.