Patent classifications
H10B20/00
METHOD FOR PROCESSING A 3D INTEGRATED CIRCUIT AND STRUCTURE
A method for processing a 3D integrated circuit, the method including: providing a first level including a first wafer, the first wafer including a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers, where the first copper interconnecting layers at least interconnect the plurality of first transistors; processing a second level including a second wafer, the second wafer including a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers, where the second copper interconnecting layers at least interconnect the plurality of second transistors; then forming a bonded structure by bonding the second level to the first level, where the bonding includes metal to metal bonding, where the bonding includes oxide to oxide bonding; and then performing a lithography process to define dice lines for the bonded structure; and etching the dice lines.
3D SEMICONDUCTOR DEVICE AND STRUCTURE
A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second transistors are horizontally oriented and each include a High-k metal gate, where the second level is bonded to the first level, and where the bonded includes oxide to oxide bonds.
3D SEMICONDUCTOR DEVICE AND STRUCTURE
A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second transistors are horizontally oriented, where the second transistors are raised source drain extension transistors, where the second level includes a memory array, where the first level includes control circuits to control data written to the memory array, where the second level is bonded to the first level, and where the bonded includes oxide to oxide bonds.
NON-VOLATILE MEMORY ELEMENTS WITH ONE-TIME OR MULTIPLE-TIME PROGRAMMABILITY
Structures for a non-volatile memory and methods of forming such structures. A gate electrode and a gate dielectric layer are formed over an active region with the gate dielectric layer between the gate electrode and the active region. A first doped region is formed in the active region, a second doped region is formed in the active region, and a source line is coupled to the second doped region. The first doped region is positioned in the active region at least in part beneath the gate dielectric layer, and the second doped region is positioned in the active region adjacent to the first doped region. The first doped region has a first conductivity type, and the second doped region has a second conductivity type opposite to the first conductivity type.
3D SEMICONDUCTOR DEVICE AND STRUCTURE
A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second transistors are horizontally oriented, where the second level is bonded to the first level, where the bonded includes oxide to oxide bonds, where the device includes at least a first logic circuit and a second logic circuit, and where the device includes a control function adapted to use the second logic circuit as a redundancy for the first logic circuit so to overcome a fault in the first logic circuit.
3D INTEGRATED CIRCUIT DEVICE AND STRUCTURE WITH BONDING
A 3D integrated circuit, the circuit including: a first level including a first wafer, the first wafer including a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers, where the first copper interconnecting layers at least interconnect the plurality of first transistors; and a second level including a second wafer, the second wafer including a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers, where the second copper interconnecting layers at least interconnect the plurality of second transistors, where the second level is bonded to the first level, where the bonded includes metal to metal bonding, where the bonded includes oxide to oxide bonding, and where at least one of the second transistors include a replacement gate.
3D DEVICE AND DEVICES WITH BONDING
A 3D device including: a first level including first single crystal transistors overlaid by a second level including second single crystal transistors; a third level including third single crystal transistors, the second level is overlaid by the third level; a fourth level including fourth single crystal transistors, the third level is overlaid by the fourth level; first bond regions including first oxide to oxide bonds, where the first bond regions are between the first level and the second level; second bond regions including second oxide to oxide bonds, where the second bond regions are between the second level and the third level; and third bond regions including third oxide to oxide bonds, where the third bond regions are between the third level and the fourth level, where the second level, third level, and fourth level each include one array of memory cells, and where the one array of memory cells is a DRAM type memory.
Methods for producing a 3D semiconductor memory device and structure
A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching holes within the third level; performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level; and performing a bonding of a fourth level above the third level, where the fourth level includes a second single crystal layer, where each of the first memory cells include one first transistor, where each of the second memory cells include one second transistor, where at least one of the first or second transistors has a channel, a source and a drain having a same doping type.
3D SEMICONDUCTOR MEMORY DEVICE AND STRUCTURE
A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and at least one metal layer, where the at least one metal layer interconnecting the first transistors; a plurality of first logic gates including the at least one metal layer interconnecting the first transistors; a plurality of second transistors atop the at least one metal layer; a plurality of third transistors atop the second transistors; a top metal layer atop the third transistors; and a memory array including wordlines, where the memory array includes at least four rows by four columns of memory mini arrays, where each of the mini arrays includes at least four rows by four columns of memory cells, and where each of the memory cells includes at least one of the second transistors or at least one of the third transistors.
3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH MEMORY
A 3D semiconductor device including: a first level including logic circuits, the logic circuits include a plurality of first single crystal transistors and a first metal layer; a second level including a plurality of second transistors, where the second level includes memory cells including the plurality of second transistors; a second metal layer atop the second level; where the plurality of second transistors are junction-less transistors, where at least one of the plurality of second transistors includes polysilicon, where the memory cells are structured as a plurality of at least sixteen sub-arrays, where each of the sub-arrays is independently controlled, where at least one of the plurality of at least sixteen sub-arrays is at least partially atop at least one of the logic circuits, and where the at least one of the logic circuits is designed to control at least one of the plurality of at least sixteen sub-arrays.