A selectivity can be improved in a desirable manner when etching a processing target object containing silicon carbide. An etching method of processing the processing target object, having a first region containing silicon carbide and a second region containing silicon nitride and in contact with the first region, includes etching the first region to remove the first region atomic layer by atomic layer by repeating a sequence comprising: generating plasma from a first gas containing nitrogen to form a mixed layer containing ions contained in the plasma generated from the first gas in an atomic layer of an exposed surface of the first region; and generating plasma from a second gas containing fluorine to remove the mixed layer by radicals contained in the plasma generated from the second gas.

The present invention provides a conversion material including a first phase providing a matrix and a second phase comprising a nanoscale or microscale material providing electron mobility. The conversion material converts heat from a single macroscopic reservoir into voltage.

Thermoelectric devices and methods of using thermoelectric devices. A thermoelectric device includes a thermoelectric element comprised of a material having a non-zero Berry curvature. The device may operate as a Nernst generator that generates electricity in response to application of a temperature gradient to the thermoelectric element, or as an Ettingshausen cooler that pumps heat into or out of an object to be heated or cooled in response to application of a current to the thermoelectric element. In either application, the non-zero Berry curvature of the material allows the device to operate without an externally applied magnetic field.

The invention relates to a method for cyclical operation of a thermoelectric cell arrangement by periodically changing the temperature of the thermoelectric cell arrangement, wherein the thermoelectric cell arrangement is thermally coupled to a cyclically operated absorption heat pump. The following method steps are carried out cyclically: thermally coupling the thermoelectric cell arrangement during a cooling phase to a cold side of the absorption heat pump, thermally coupling the thermoelectric cell arrangement during a heating phase to a hot side of the absorption heat pump. The invention also relates to a harvester device for generating electrical energy by means of a thermoelectric cell arrangement, wherein the thermoelectric cell arrangement is thermally coupled to an absorption heat pump, wherein the thermal coupling makes it possible to effect, in time with the working cycle of the absorption heat pump, a temperature change in the thermoelectric cell arrangement.

A method for forming a junction in a germanium (Ge) layer of a substrate includes arranging the substrate in a processing chamber. The method includes performing a plasma pretreatment on the substrate in the processing chamber for a predetermined pretreatment period using a pretreatment plasma gas mixture including hydrogen gas species. The method includes supplying a doping plasma gas mixture to the processing chamber including a phosphorous (P) gas species and an antimony (Sb) gas species. The method includes striking plasma in the processing chamber for a predetermined doping period. The method includes annealing the substrate during a predetermined annealing period to form the junction in the germanium (Ge) layer.

[Problem] To provide a heat exchange device with which efficient electric power generation can be performed while transfer of a heat amount is maintained. [Solution] A heat exchange device comprising a heat exchange section 1 and a magnetic body 2. The heat exchange section 1 includes a first heat transmission interface 3 in contact with a heat source, and a second heat transmission interface 4 in contact with a heat bath having a temperature different from that of the heat source. The magnetic body 2 is interposed between the first heat transmission interface 3 and the second heat transmission interface 4 of the heat exchange section 1, and includes a magnetization component in a direction intersecting a heat flux produced between the first heat transmission interface 3 and the second heat transmission interface 4.

System for quantum energy storage can include a quantum information engine including topological insulator having at least one edge. A coherence capacitor can include nuclei of atoms within the topological insulator, and each nucleus can have a spin direction. An energy source can be electrically connected to the topological insulator and configured to supply a current along the at least one edge of the topological insulator. The current can interact with at least one nucleus of the nuclei to flip a spin direction of the at least one nucleus. Methods for quantum energy storage, systems and methods for storing and using quantum energy, quantum information engines, and quantum heat engines are also disclosed.

An electrochernical cell comprises a first electrode having a first inner surface; a second electrode having a second inner surface, the second inner surface facing the first inner surface; a nanostructured material positioned on at least one of the first inner surface and second inner surface; and an ionic liquid positioned between the first inner surface and the second inner surface, the ionic liquid being in electrical communication with the first electrode and second electrode.

A product includes an array of cold spray-formed structures. Each of the structures is characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material. A product includes a cold spray-formed structure characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material.

A product includes an array of cold spray-formed structures. Each of the structures is characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material. A product includes a cold spray-formed structure characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material.