A sensor and/or transducer device having at least one bending structure including at least one piezoelectric layer in each case, using which an intermediate volume between at least two electrodes of the bending structure is at least partially filled in each case, the sensor and/or transducer device including an electronic unit, which is designed to apply at least one predefined or established actuator voltage between two of the electrodes at a time of the bending structure in such a way that a deformation of the bending structure triggered by an intrinsic stress gradient in the bending structure may be at least partially compensated for. A method for operating a sensor and/or transducer device having at least one bending structure, which includes at least one piezoelectric layer, and a method for calibrating a microphone having at least one bending structure, which includes at least one piezoelectric layer, are also described.

Aspects of the subject disclosure include a pressure-sensing device consisting of a housing including a membrane and one or more piezoresistive elements disposed on the membrane to sense a displacement due to a deflection of the membrane. A first set of electrodes is disposed over the membrane, and a second set of electrodes is disposed on a permeable port of the device at a distance from the membrane. The first and second sets of electrodes form an electrostatic actuator to exert a repulsive force onto the membrane to reduce the deflection of the membrane.

A piezoelectric, poly (γ-benzyl-α,L-glutamate) (“PBLG”) planar microphone, and method for construction thereof, are disclosed. The microphone includes at least a polyester film, a piezoelectric, hot pressed poly (γ-benzyl-α,L-glutamate) (“HPPBLG”) layer, and an aluminum coating for the HPPBLG layer. The coated HPPBLG layer is coupled to the polyester film.

A sensor includes a substrate having a curved surface, a piezoelectric element, and an adhesive disposed between the piezoelectric element and the curved surface along a vertical direction. The adhesive attaches the piezoelectric element to the substrate. The adhesive has an exterior bond surface that has a tapered shape along the vertical direction from the piezoelectric element to the curved surface.

A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. The PMUT is also configured to operate in a Surface Acoustic Wave (SAW) mode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/SAW dual-mode devices, and a PMUT/SAW dual-mode device.

A method of monitoring a curing process for fiber reinforced composite materials that includes positioning an actuator on uncured composite material at a first location. At least one sensor is positioned at a second location that is spaced apart from the first location. The actuator excites waves in the composite part at the first location. At least one sensor is positioned at a second location that is spaced apart from the first location. The actuator excites waves in the composite part at the first location. The waves propagate through the composite part due to internal reflection. At least one wave metric is measured at the second location utilizing the sensor. At least one parameter of the curing process may be adjusted based, at least in part, on a wave metric measured by the sensor.

A wireless power transmitter includes: a switching unit configured to receive a direct current (DC) voltage and to perform switching to output a first alternating current (AC) voltage; a piezoelectric transformer configured to receive the first AC voltage through a first piezoelectric element, and to output a second AC voltage corresponding to mechanical vibration of a second piezoelectric element caused by mechanical vibration of the first piezoelectric element; and a resonator configured to receive the second AC voltage to wirelessly transmit power.

A method and structure for a transfer process for an acoustic resonator device. In an example, a bulk acoustic wave resonator (BAWR) with an air reflection cavity is formed. A piezoelectric thin film is grown on a crystalline substrate. Patterned electrodes are deposited on the surface of the piezoelectric film. An etched sacrificial layer is deposited over the electrodes and a planarized support layer is deposited over the sacrificial layer. The device can include a dielectric protection layer (DPL) that protects the piezoelectric layer from etching processes that can produce rough surfaces and reduces parasitic capacitance around the perimeter of the resonator when the DPL's dielectric constant is lower than that of the piezoelectric layer. The DPL can be configured between the top electrode and the piezoelectric layer, between the bottom electrode and the piezoelectric layer, or both.

A stator or a rotor for use in an electrical machine comprises a composite element having a rigid mass suitable for including at least one magnetostrictive electrode bar, at least one magnetostrictive electrode bar, and a piezoelectric material in between the rigid mass material and the magnetostrictive electrode bars. The rigid mass, the magnetostrictive electrode bars and the piezoelectric material are arranged such that applying a voltage between the rigid mass and one or more magnetostrictive electrodes, causes piezoelectric effects in the piezoelectric material inducing stress in the bi-axial plane of the at least one magnetostrictive bar and an altered permeability of the at least one magnetostrictive bar in a direction perpendicular to the bi-axial stress plane.

SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.