A discharge method includes discharging discharge products including a first discharge gas and solid by-products from a process chamber, in which a substrate processing process is performed in a vacuum state, into an inside of a collection device, collecting the solid by-products in the collection device, introducing a portion of a second discharge gas discharged from a load lock chamber into the collection device, and vaporizing the solid by-products in the collection device and discharging vaporized solid by-products to an outside of the collection device.

A discharge method includes discharging discharge products including a first discharge gas and solid by-products from a process chamber, in which a substrate processing process is performed in a vacuum state, into an inside of a collection device, collecting the solid by-products in the collection device, introducing a portion of a second discharge gas discharged from a load lock chamber into the collection device, and vaporizing the solid by-products in the collection device and discharging vaporized solid by-products to an outside of the collection device.

A multi-stage process to remove contaminant gases from raw methane streams is provided. The present technology is an innovative solution to recover and purify biogas by use of a process having at least two pressure swing adsorption stages. Taking advantage of the presence of carbon dioxide in the raw biogas streams, nitrogen and oxygen are bulky removed in the first stage, using selective adsorbents, and a nitrogen and oxygen-depleted intermediate stream is yielded to the second stage. The second stage employs an adsorbent or adsorbents to selectively remove carbon dioxide and trace amounts of remaining nitrogen and oxygen, thus producing a purer methane stream that meets pipeline and natural gas specifications.

A compact desiccant air breather with unidirectional air flow comprises a housing with a plurality of air inlets adjacent an upper end for air intake. A desiccant bed of water absorbing material is within the intake flow path of air and an air chamber is within the intake flow path of air downstream of the desiccant bed. A one-way inflow check valve is adjacent the desiccant bed between the desiccant bed and the air chamber and is configured to allow airflow from the desiccant bed material to the air chamber and to prevent reverse airflow. A coupling member has an air flow conduit there-through which is in fluid communication with the air chamber and forms an air intake flow path exit. A one-way exhaust check valve in fluid communication with the air chamber is configured to allow airflow from the air chamber to the exterior and to prevent reverse flow.

A compact desiccant air breather with unidirectional air flow comprises a housing with a plurality of air inlets adjacent an upper end for air intake. A desiccant bed of water absorbing material is within the intake flow path of air and an air chamber is within the intake flow path of air downstream of the desiccant bed. A one-way inflow check valve is adjacent the desiccant bed between the desiccant bed and the air chamber and is configured to allow airflow from the desiccant bed material to the air chamber and to prevent reverse airflow. A coupling member has an air flow conduit there-through which is in fluid communication with the air chamber and forms an air intake flow path exit. A one-way exhaust check valve in fluid communication with the air chamber is configured to allow airflow from the air chamber to the exterior and to prevent reverse flow.

An exhaust gas purification apparatus for an internal combustion engine, capable of carrying out oxidation removal of PM deposited in a filter as a whole in an efficient manner, includes a filter arranged in an exhaust passage of the internal combustion engine and having an oxidation catalyst supported in at least an upstream side portion thereof, and a heating device arranged so as to be able to heat the upstream side portion of the filter irrespective of oxidation reaction heat of the oxidation catalyst, wherein when filter upstream regeneration processing to oxidize and remove deposition PM in the upstream side portion of the filter is carried out by controlling a heating device, an amount of decrease of the upstream side deposition PM by the filter upstream regeneration processing is reflected on an amount of filter PM deposition in the ordinary filter regeneration processing which oxidizes and removes the deposition PM in the entire filter by means of oxidation reaction heat of unburnt fuel generated by the oxidation catalyst supported in the filter, and the filter upstream regeneration processing is ended, even if the thus reflected amount of filter PM deposition is in a state of being larger than a reference amount of deposition which is a threshold value for ending the ordinary filter regeneration processing.

A system for integrated removal of multiple pollutants includes an economizer, an air preheater, an electrostatic precipitator, a flue gas cooler and a low-temperature adsorber; the economizer has a shell side inlet for feeding boiler flue gas, a tube side inlet for feeding boiler feedwater, and a shell side outlet connected to a tube side inlet of the air preheater; the air preheater has a shell side inlet for introducing boiler intake air, and a tube side outlet connected to the electrostatic precipitator; the electrostatic precipitator has a dust discharge port at a bottom thereof and a flue gas outlet connected to the flue gas cooler; the flue gas cooler has a condensate outlet at a bottom thereof and a cold flue gas outlet at a top thereof and connected to the low-temperature adsorber; and the low-temperature adsorber has a purified flue gas outlet at a tail thereof.

The present invention discloses methods for extracting and recycling hydrogen in an MOCVD process by FTrPSA. Through pretreatment, fine deamination, PSA hydrogen extraction, deep dehydration and hydrogen purification procedures, ammonia-containing waste hydrogen from an MOCVD process is purified to meet the electronic-level hydrogen (the purity is greater than or equal to 99.99999% v/v) standard required by the MOCVD process, to implement resource reuse of exhaust gases, where the hydrogen yield is greater than or equal to 75-86%. The present invention solves the technical problem that atmospheric-pressure or low-pressure waste hydrogen from MOCVD processes cannot be returned to the MOCVD processes for use after being recycled, and fills the gap in green and circular economy development of the LED industry.

A system, method, and apparatus for ameliorating deposits in selective catalytic reduction systems for the reduction of nitrogen oxide emissions in steam methane reformers. The system includes positioning a dual stage refractory particulate (RP) filter placed in an upstream airflow from a Selective Catalytic Reduction System (SCRS). The first stage is formed of a perforated steel plate with a second stage formed of a wire mesh screen. The system may employ air cannons to clean each of the first stage and the second stages.

A system, method, and apparatus for ameliorating deposits in selective catalytic reduction systems for the reduction of nitrogen oxide emissions in steam methane reformers. The system includes positioning a dual stage refractory particulate (RP) filter placed in an upstream airflow from a Selective Catalytic Reduction System (SCRS). The first stage is formed of a perforated steel plate with a second stage formed of a wire mesh screen. The system may employ air cannons to clean each of the first stage and the second stages.