The present invention provides a catalyst for catalytic reduction of an industrial flue gas SO.sub.2 with CO to prepare sulfur, a method for preparing the same and use thereof. A CeO.sub.2 nanocarrier is prepared by using a hydrothermal method, La and Y are loaded as active components, pre-sulfurization is conducted with 6% of SO.sub.2 and 3% of CO, and finally, the catalyst is prepared. The catalyst has high reactivity and sulfur selectivity and strong stability. The by-product sulfur generated by the reaction is recovered with a solvent CS.sub.2, and the solvent CS.sub.2 is recovered by using a distillation process. The preparation method is low in cost, causes no secondary pollution and is high in sulfur recovery rate. The problem of low sulfur production in China at present is solved.

The present invention provides a catalyst for catalytic reduction of an industrial flue gas SO.sub.2 with CO to prepare sulfur, a method for preparing the same and use thereof. A CeO.sub.2 nanocarrier is prepared by using a hydrothermal method, La and Y are loaded as active components, pre-sulfurization is conducted with 6% of SO.sub.2 and 3% of CO, and finally, the catalyst is prepared. The catalyst has high reactivity and sulfur selectivity and strong stability. The by-product sulfur generated by the reaction is recovered with a solvent CS.sub.2, and the solvent CS.sub.2 is recovered by using a distillation process. The preparation method is low in cost, causes no secondary pollution and is high in sulfur recovery rate. The problem of low sulfur production in China at present is solved.

ABSTRACT An apparatus is for collecting a by-product in a semiconductor manufacturing process. The apparatus includes: a housing cooling channel on an inner wall thereof to cool exhaust gas which is temperature-controlled by a heater while being introduced through a gas inlet of an upper plate; an internal collecting tower including multiple vertical plates and multiple horizontal plates that are assembled, and condensing and collecting a by-product from the exhaust gas; a main cooling channel having a serpentine shape and cooling the exhaust gas uniformly by using coolant while passing through the internal collecting tower; and a multi-connection pipe sequentially supplying the coolant to the upper plate cooling channel, the housing cooling channel, and the main cooling channel and discharging the coolant, by using a supply pipe and a discharge pipe that are provided outside the housing.

ABSTRACT An apparatus is for collecting a by-product in a semiconductor manufacturing process. The apparatus includes: a housing cooling channel on an inner wall thereof to cool exhaust gas which is temperature-controlled by a heater while being introduced through a gas inlet of an upper plate; an internal collecting tower including multiple vertical plates and multiple horizontal plates that are assembled, and condensing and collecting a by-product from the exhaust gas; a main cooling channel having a serpentine shape and cooling the exhaust gas uniformly by using coolant while passing through the internal collecting tower; and a multi-connection pipe sequentially supplying the coolant to the upper plate cooling channel, the housing cooling channel, and the main cooling channel and discharging the coolant, by using a supply pipe and a discharge pipe that are provided outside the housing.

A method of converting a liquid hydrocarbon stream to lower boiling point hydrocarbons may include converting the liquid hydrocarbon stream to an aerosolized hydrocarbon particle stream, and subjecting the aerosolized hydrocarbon particle stream to reaction conditions. Reaction conditions may include a temperature from 25° C. to 1,000° C. and a pressure from 1 bar to 15 bar. The method may further include forming the lower boiling point hydrocarbons in the aerosolized hydrocarbon particle stream and separating the lower boiling point hydrocarbons from the aerosolized hydrocarbon particle stream. The lower boiling point hydrocarbons may comprise at least C.sub.2-C.sub.4 olefins.

A method of converting a liquid hydrocarbon stream to lower boiling point hydrocarbons may include converting the liquid hydrocarbon stream to an aerosolized hydrocarbon particle stream, and subjecting the aerosolized hydrocarbon particle stream to reaction conditions. Reaction conditions may include a temperature from 25° C. to 1,000° C. and a pressure from 1 bar to 15 bar. The method may further include forming the lower boiling point hydrocarbons in the aerosolized hydrocarbon particle stream and separating the lower boiling point hydrocarbons from the aerosolized hydrocarbon particle stream. The lower boiling point hydrocarbons may comprise at least C.sub.2-C.sub.4 olefins.

Device and method for the cryogenic purification of a stream of gas, comprising a purification circuit comprising a first inlet and a first set of filters arranged in series, the first set of filters comprising a terminal heat exchanger in a heat-exchange relationship with a cold source, the purification circuit comprising, downstream of the terminal exchanger, a first outlet, the device comprising at least one drive member intended to set the stream of gas in motion in the circuit, the purification circuit further comprising, between the terminal exchanger and the first outlet, a second set of filter(s), and the at least one drive member being configured to set two successive volumes of gas for purification in motion in opposite directions of circulation in the circuit. The invention also relates to a machine including such a device.

Device and method for the cryogenic purification of a stream of gas, comprising a purification circuit comprising a first inlet and a first set of filters arranged in series, the first set of filters comprising a terminal heat exchanger in a heat-exchange relationship with a cold source, the purification circuit comprising, downstream of the terminal exchanger, a first outlet, the device comprising at least one drive member intended to set the stream of gas in motion in the circuit, the purification circuit further comprising, between the terminal exchanger and the first outlet, a second set of filter(s), and the at least one drive member being configured to set two successive volumes of gas for purification in motion in opposite directions of circulation in the circuit. The invention also relates to a machine including such a device.

A gas trap system for metal organic chemical vapor deposition (MOCVD) exhaust abatement operations is provided. The gas trap system may include a housing including an inlet configured to receive exhaust gas and an outlet. The gas trap system may also include a conical inlet shield positioned within the housing. The conical inlet shield may form a first path between the housing and the conical inlet shield, wherein the first path receives the exhaust gas from the inlet. The conical inlet shield may also cool the exhaust gas and cause the exhaust gas to be uniformly distributed in the first path. The gas trap system may also include a filter configured to receive the exhaust gas from the first path and to filter the exhaust gas, wherein the filtered gas exhaust is provided to the outlet.

A gas trap system for metal organic chemical vapor deposition (MOCVD) exhaust abatement operations is provided. The gas trap system may include a housing including an inlet configured to receive exhaust gas and an outlet. The gas trap system may also include a conical inlet shield positioned within the housing. The conical inlet shield may form a first path between the housing and the conical inlet shield, wherein the first path receives the exhaust gas from the inlet. The conical inlet shield may also cool the exhaust gas and cause the exhaust gas to be uniformly distributed in the first path. The gas trap system may also include a filter configured to receive the exhaust gas from the first path and to filter the exhaust gas, wherein the filtered gas exhaust is provided to the outlet.