A plasma-generating nozzle and a plasma device including the plasma-generating nozzle are provided. The plasma-generating nozzle includes a plasma-generating channel, a cooling channel at least partially surrounding the plasma-generating channel, and a pair of electrodes partially disposed in the plasma-generating channel for generating plasma. The plasma device includes a housing enclosing a plasma treatment space and a component space, and the plasma-generating nozzle removable disposed in the plasma treatment space.

Methods for making particulate material include providing a first solution comprising one or more solvents and an active agent, providing a second solution comprising an antisolvent, mixing the first solution with the second solution to form a mixture, atomizing the mixture with a gas to produce droplets, and drying the droplets by directing the droplets into a chamber for removal of the solvent and the antisolvent to produce solid particles. Various apparatuses for producing particulate material in this manner are also provided.

An underwater remote cleaning device includes a submersible assembly, a cleaning conduit, and a thruster conduit. The submersible assembly has an upper frame and a lower frame spaced-apart from each other and at least one vertically extending element having a first end and a second end. The first end of the vertically extending element is engaged to the upper frame and the second end of the vertically extending element is engaged to the lower frame. The cleaning conduit is disposed within the submersible assembly with an inlet for receiving a liquid and at least one nozzle disposed on the cleaning conduit for spraying the liquid. The thruster conduit is disposed within the submersible assembly with an inlet for receiving a liquid and at least one nozzle disposed on the cleaning conduit for spraying the liquid.

Apparatus and methods for providing a desired volumetric conditioned airflow rate and for reducing noise level, airflow recirculation and airflow separation are disclosed. An example apparatus includes a nozzle housing having a pair of opposing sidewalls and a front and back wall that define an airflow passage. The airflow passage has a centerline extending between the inlet and the outlet and has a plurality of cross-sections taken perpendicular to the centerline that collectively define a smooth contour along a length of the airflow passage. The cross-sections each have a thickness between the front and back wall that is greater at side edges than at the centerline. The thickness of the cross-sections decreases along a length of at least a first portion of the nozzle housing. A width of each of the cross-sections between the sidewalls increases along the length of at least the first portion of the nozzle housing.

Embodiments of a gas distribution plate for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate includes a diffuser plate having an upstream side and a downstream side, and a plurality of gas passages passing between the upstream and downstream sides of the diffuser plate. At least one of the gas passages has a cylindrical shape for a portion of its length extending from the upstream side and a coaxial conical shape for the remainder length of the diffuser plate, the upstream end of the conical portion having substantially the same diameter as the cylindrical portion and the downstream end of the conical portion having a larger diameter.

A gas nozzle having a fired surface excellent in particle reduction effect is provided. The gas nozzle 1 is a columnar gas nozzle made of sintered ceramics, provided with at least one through-hole 2 through which gas flows. The entire inner surface 2a of the through-hole 2 and the end face 1A on which outlet 2b of the through-hole 2 is provided are both fired surfaces. The inner surface 2a of the through-hole 2 has a first region A in the vicinity of the outlet 2b and a second region B which is located at a further position than the first region A. The average crystal grain size in the first region A is formed to be smaller than the average crystal grain size in the second region B.

A fluid dispenser with a fluid pump for dispensing fluid on movement of an actuator, and an air pump for delivering a stream of air through at least one sound generator on movement of the actuator. The sound generator produces at least two sounds as the actuator is moved from a first position to a second position, with each sound produced in a different time period during a cycle of operation, or differing from the other sound in respect of one or more detectable sound characteristics, such as duration, frequency, temporal alignment, amplitude, and/or timbre. The time period of each sound is a function of the relative location of the actuator between the first and second positions.

A particle removed from a substrate is suppressed from adhering to the substrate again. A substrate cleaning apparatus includes a substrate holder configured to hold the substrate; a gas nozzle configured to jet a cleaning gas to the substrate on the substrate holder; and a nozzle cover provided to surround the gas nozzle. The cleaning gas is jetted to a decompression chamber of the nozzle cover from the gas nozzle, and a gas cluster configured to remove the particle on the substrate in the decompression chamber is generated. A gas for a gas curtain is jetted from an end portion of the nozzle cover toward the substrate, and the gas curtain is formed between the substrate and the end portion of the nozzle cover.

Embodiments described herein generally related to a substrate processing apparatus, and more specifically to an improved showerhead assembly for a substrate processing apparatus. The showerhead assembly includes a chill plate, a gas plate, and a gas distribution plate having a top surface and a bottom surface. A plurality of protruded features contacts the top surface of the gas distribution plate. A fastener and an energy storage structure is provided on the protruded features. The energy storage structure is compressed by the fastener and axially loads at least one of the protruded features to compress the chill plate, the gas plate and the gas distribution plate.

Gas distribution faceplates are disclosed that feature clusters of gas passages extending from inlet gas ports on a first side thereof to outlet gas ports on a second side thereof. The gas passages may each have at least a portion thereof that is at an oblique angle with respect to a nominal centerline of the gas distribution faceplate, thereby allowing the inlet gas ports for a given cluster of gas passages to be tightly grouped together and the outlet gas ports for that cluster of gas passages to be more widely spaced apart. This allows for a large numbers of gas passages to be used, thereby allowing for a reduction of flow rate through each gas passage and an attendant decrease in gas passage erosion rate, while reducing or eliminating the effects of overlapping wear zones around each outlet gas port.