B24B25/00

POLISHING APPARATUS AND WAFER POLISHING METHOD

A polishing apparatus which is an index system polishing apparatus which includes a polishing head for holding a wafer, a plurality of turn tables to which polishing pads for polishing the wafer are attached, and a loading/unloading stage for loading the wafer to the polishing head or unloading the wafer from the polishing head, and which polishes the wafer while switching the turn tables to be used for polishing the wafer held at the polishing head by causing the polishing head to perform rotation movement, the polishing apparatus including a turn table upward and downward movement mechanism which allows the turn table to move upward and downward. With this polishing apparatus, it is possible to reduce an amount of displacement caused when moment load is applied on the polishing head during polishing.

Automatic box sorting device for large-scale mall game coins
20200180099 · 2020-06-11 ·

The invention discloses a glass bottle mouth fine grinding device, which includes a working box and a working chamber located in the working box. A placing box is slidably arranged in the working chamber. The placing box is provided with a placing chamber. A glass bottle is slidably disposed in the placement cavity, and first cavities are symmetrically arranged on the left and right sides of the placement cavity. A circular clamping block is slidably disposed in the first cavity. The first cavity is connected by a first spring, and a second cavity is provided at the bottom of the placing box. A sliding block is slidably disposed in the second cavity, and the sliding block and the second cavity are connected by a second spring.

Numerical controller and method of controlling a numerical controller
10642254 · 2020-05-05 · ·

A numerical controller in which a plurality of software packages using the same type of parameters are installed includes a parameter storage unit having a plurality of storage areas for storing the parameters, for each of parameter types, and a storage unit configured to store, for each of the software packages, a parameter information file in which information of the storage areas used by each of the software packages is described for each of the parameter types.

Polishing apparatus and wafer polishing method

A polishing apparatus which is an index system polishing apparatus which includes a polishing head for holding a wafer, a plurality of turn tables to which polishing pads for polishing the wafer are attached, and a loading/unloading stage for loading the wafer to the polishing head or unloading the wafer from the polishing head, and which polishes the wafer while switching the turn tables to be used for polishing the wafer held at the polishing head by causing the polishing head to perform rotation movement, the polishing apparatus including a turn table upward and downward movement mechanism which allows the turn table to move upward and downward. With this polishing apparatus, it is possible to reduce an amount of displacement caused when moment load is applied on the polishing head during polishing.

Polishing apparatus and wafer polishing method

A polishing apparatus which is an index system polishing apparatus which includes a polishing head for holding a wafer, a plurality of turn tables to which polishing pads for polishing the wafer are attached, and a loading/unloading stage for loading the wafer to the polishing head or unloading the wafer from the polishing head, and which polishes the wafer while switching the turn tables to be used for polishing the wafer held at the polishing head by causing the polishing head to perform rotation movement, the polishing apparatus including a turn table upward and downward movement mechanism which allows the turn table to move upward and downward. With this polishing apparatus, it is possible to reduce an amount of displacement caused when moment load is applied on the polishing head during polishing.

Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method

There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.

Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method

There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.

Efficient brake disc processing device

The present invention discloses an efficient brake disc processing device, which relates to the technical field of brake disc processing, comprising a lathe bed, an upright vertical lathe and a first power tool holder installed on a top end of the lathe bed, and an inverted vertical lathe and a second power tool holder installed on a rear side of the top end of the lathe bed, wherein the upright vertical lathe is cooperated with the second power tool holder to process an upper brake surface of a brake disc, and the inverted vertical lathe is cooperated with the first power tool holder to process a lower brake surface of the brake disc.

POLISHING CLEANING MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.

Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method

There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.