A MEMS device and methods of forming are provided. A dielectric layer of a first substrate is patterned to expose conductive features and a bottom layer through the dielectric layer. A first surface of a second substrate is bonded to the dielectric layer and the second substrate is patterned to form a membrane and a movable element. A cap wafer is bonded to the second substrate, where bonding the cap wafer to the second substrate forms a first sealed cavity comprising the movable element and a second sealed cavity that is partially bounded by the membrane. Portions of the cap wafer are removed to expose the second sealed cavity to ambient pressure.

A disclosed controller is configured with logic that, when executed, performs actions to extend landing gear of a maglev vehicle. The actions include receiving a height control target value and transitioning between a standby control state and an active control state. The controller maintains the landing gear in a fixed position when the controller is in the standby control state, and the controller controls extension and retraction of the landing gear according to the height control target value when the controller is in the active control state.

A disclosed controller is configured with logic that, when executed, performs actions to extend landing gear of a maglev vehicle. The actions include receiving a height control target value and transitioning between a standby control state and an active control state. The controller maintains the landing gear in a fixed position when the controller is in the standby control state, and the controller controls extension and retraction of the landing gear according to the height control target value when the controller is in the active control state.