A conveyance apparatus includes a stator including a plurality of coils arranged along a first direction and a mover. The mover moves along the plurality of coils and includes a first magnet group including a plurality of first magnets arranged to face the plurality of coils along the first direction, and a second magnet group including a plurality of second magnets arranged to face the plurality of coils along a second direction intersecting with the first direction. At least one of the plurality of coils includes a core, a wire-wound portion wound around the core, and a yoke. The yoke is adjacent to an outer periphery of a portion of the wire-wound portion along the first direction and extends in the first direction.

Support structure for a transport unit of a planar motor to reduce or prevent transmission of force to an active surface of a stator. The transport unit is movable by at least one stator of the planar motor and a product is positionable on the transport unit. In at least one support position of the transport unit defined in relation to the support structure, the support structure applies at least one supporting force to the transport unit, while at least one process force, which acts on the product, is at least partially transmitted to the transport unit and counteracted. The transport unit is movable into and out of the support position in a floating manner via the at least one stator. The support structure is mounted on a base and at least partially diverts the counterforce caused by the supporting force to the base.

A conveyance apparatus includes a stator in which a plurality of coils is arranged along a first direction and a movable element to move along the plurality of coils. The stator includes a first magnet group including a plurality of first magnets arranged along the first direction and magnetized in one direction. The movable element includes a second magnet group including a plurality of second magnets arranged to face the plurality of coils, and a third magnet group including a plurality of third magnets arranged to face the first magnet group and magnetized in a direction repelling the first magnet group.

A conveyance apparatus includes a stator in which a plurality of coils is arranged along a first direction and a movable element to move along the plurality of coils. The stator includes a first magnet group including a plurality of first magnets arranged along the first direction and magnetized in one direction. The movable element includes a second magnet group including a plurality of second magnets arranged to face the plurality of coils, and a third magnet group including a plurality of third magnets arranged to face the first magnet group and magnetized in a direction repelling the first magnet group.

Guide device for shuttles of a planar motor has a first end and a second end and defines a pose course of a shuttle between the first and second end. The first end, which defines an introductory pose of the shuttle, is arrangeable on a first stator of the planar motor so that the introductory pose corresponds to an operationally controllable pose in relation to the first stator. The second end, which defines an exit pose of the shuttle, is arrangeable on the first stator or a second stator of the planar motor so that the exit pose corresponds to an operationally controllable pose with respect to the first or second stator. The pose course includes at least one pose which is an operationally non-controllable pose with respect to stators of the planar motor. The guide device supports and stabilizes the shuttle in the at least one operationally non-controllable pose.

A conveyance apparatus includes a stator in which a plurality of coils is arranged along a first direction and a movable element to move along the plurality of coils. The stator includes a first magnet group including a plurality of first magnets arranged along the first direction and magnetized in one direction. The movable element includes a second magnet group including a plurality of second magnets arranged to face the plurality of coils, and a third magnet group including a plurality of third magnets arranged to face the first magnet group and magnetized in a direction repelling the first magnet group.

A conveyance apparatus includes a stator in which a plurality of coils is arranged along a first direction and a movable element to move along the plurality of coils. The stator includes a first magnet group including a plurality of first magnets arranged along the first direction and magnetized in one direction. The movable element includes a second magnet group including a plurality of second magnets arranged to face the plurality of coils, and a third magnet group including a plurality of third magnets arranged to face the first magnet group and magnetized in a direction repelling the first magnet group.

An enclosure includes a furnace 1 and plates 7A to 7D arranged in the furnace 1 and used for placement of articles 5. Each of the plates 7A to 7D is movable vertically in the furnace 1. The enclosure further includes guide members 60A and 60B, each of which is disposed adjacent to a side of one plate of the plates 7A to 7D that is disposed at a loading/unloading position where the articles 5 are allowed to be loaded into or unloaded from the furnace 1. The guide members 60A and 60B guide the articles 5 and are rotatable with vertical movement of the plate.

Support structure for a transport unit of a planar motor to reduce or prevent transmission of force to an active surface of a stator. The transport unit is movable by at least one stator of the planar motor and a product is positionable on the transport unit. In at least one support position of the transport unit defined in relation to the support structure, the support structure applies at least one supporting force to the transport unit, while at least one process force, which acts on the product, is at least partially transmitted to the transport unit and counteracted. The transport unit is movable into and out of the support position in a floating manner via the at least one stator. The support structure is mounted on a base and at least partially diverts the counterforce caused by the supporting force to the base.

Guide device for shuttles of a planar motor has a first end and a second end and defines a pose course of a shuttle between the first and second end. The first end, which defines an introductory pose of the shuttle, is arrangable on a first stator of the planar motor so that the introductory pose corresponds to an operationally controllable pose in relation to the first stator. The second end, which defines an exit pose of the shuttle, is arrangable on the first stator or a second stator of the planar motor so that the exit pose corresponds to an operationally controllable pose with respect to the first or second stator. The pose course includes at least one pose which is an operationally non-controllable pose with respect to stators of the planar motor. The guide device supports and stabilizes the shuttle in the at least one operationally non-controllable pose.