B
PERFORMING OPERATIONS; TRANSPORTING
B
PERFORMING OPERATIONS; TRANSPORTING
B81
MICROSTRUCTURAL TECHNOLOGY
B81
MICROSTRUCTURAL TECHNOLOGY
B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201/00
Specific applications of microelectromechanical systems
2201/00
Specific applications of microelectromechanical systems