The present disclosure discloses a method and apparatus for manufacturing a microfluidic chip with a femtosecond plasma grating. The method is characterized in that two or more beams of femtosecond pulse laser act on quartz glass together at a certain included angle and converge in the quartz glass, and when pulses achieve synchronization in time domain, the two optical pulses interfere; Benefited by constraint of an interference field, only one optical filament is formed in one interference period; and numbers of optical filaments are arranged equidistantly in space to form the plasma grating. The apparatus for manufacturing the microfluidic chip includes a plasma grating optical path, a microchannel processing platform, and a hydrofluoric acid ultrasonic cell.

The present disclosure discloses a method and apparatus for manufacturing a microfluidic chip with a femtosecond plasma grating. The method is characterized in that two or more beams of femtosecond pulse laser act on quartz glass together at a certain included angle and converge in the quartz glass, and when pulses achieve synchronization in time domain, the two optical pulses interfere; Benefited by constraint of an interference field, only one optical filament is formed in one interference period; and numbers of optical filaments are arranged equidistantly in space to form the plasma grating. The apparatus for manufacturing the microfluidic chip includes a plasma grating optical path, a microchannel processing platform, and a hydrofluoric acid ultrasonic cell.

The invention belongs to the technical field of metal micro-forming, and in particular relates to a method for inflating micro-channels. The present invention is aimed at the problems of low process flexibility, single product type, and non-closed structure of the micro-channel when preparing metal micro-channels by micro-plastic forming of ultra-thin metal strips. The present invention uses a method combining numerical simulation and bond rolling experiment to analyze the effect of the hydrogen pressure and bond strength of the metal composite ultra-thin strip after bond rolling on the pore diameter of the micro-channel, and the corresponding relationship between the micro-channel pore diameter and the titanium hydride content, heating temperature, and bond strength of the metal composite ultra-thin strip is obtained. The present invention has no special requirements on molds, wide selection of metal materials, low requirements for equipment capabilities; closed tubular micro-channel products with different pore diameters and different distributions can be prepared according to requirements, with rich product categories and high process flexibility.

The invention belongs to the technical field of metal micro-forming, and in particular relates to a method for inflating micro-channels. The present invention is aimed at the problems of low process flexibility, single product type, and non-closed structure of the micro-channel when preparing metal micro-channels by micro-plastic forming of ultra-thin metal strips. The present invention uses a method combining numerical simulation and bond rolling experiment to analyze the effect of the hydrogen pressure and bond strength of the metal composite ultra-thin strip after bond rolling on the pore diameter of the micro-channel, and the corresponding relationship between the micro-channel pore diameter and the titanium hydride content, heating temperature, and bond strength of the metal composite ultra-thin strip is obtained.

Methods, systems, and techniques for the high speed manufacture of micro-electrical mechanical systems (MEMS) arrays, such as arrays of polymeric capacitive micromachined ultrasonic transducers (CMUTs). A sheet of material from which to form cavities for the devices is obtained, and physical or energy projections are projected into the material to form the cavities. Upper and lower surfaces of the material are respectively contacted with and bonded to upper and lower metalized films. The metalized portions of the upper and lower metalized films may serve as electrodes for a CMUT, and the films themselves may be the CMUT's substrate and membrane.