Provided is an oil diffusion pump equipped with an oil vapor generator capable of eliminating the problems occurring when a heater wire is used as a heating source for an operating oil. The present invention is a vacuum pump for which an oil vapor generator (70) is arranged within a casing (51) and this oil vapor generator is operated to vaporize an operating oil (8), thereby producing oil vapor and this oil vapor is sprayed from a jet (53, 53a) to exhaust intake air. The oil vapor generator (70) is equipped with: a container (71, 72) in the interior of which oil is stored, with the lower end of the tubular member (71), which comprises a material to be heated, being closed; and induction coil (75) wrapped around the atmosphere-side perimeter of the tubular member (71) (in particular, the case inner wall (71b)) with an insulating material (73) therebetween; and a power supply means that applies a low-frequency alternating current of several tens of Hz to several hundreds of Hz to the induction coil (75). The configuration is such that the tubular member (71) itself is heated when the power supply means is operated and the low-frequency alternating current is applied to the induction coil (75), thereby vaporizing the oil within the container.

A diffusion pump, in particular an energy-efficient diffusion pump comprising a housing and a boiling chamber connected to the housing. In the area of the boiling chamber a heating element is arranged. Further, a nozzle is arranged in the housing which nozzle is connected to the boiling chamber. In the area of the nozzle a condenser is arranged at an internal surface of the housing, wherein in the area of the condenser a cooling system for cooling the condenser is provided. The boiling chamber is thermally isolated from the condenser by an isolator. Alternatively or additionally, the cooling system of the condenser is at least partially a water cooling system. Alternatively or additionally, the cooling system of the condenser is connected to the heating element via a heat pump such that heat from the condenser is supplied to the heating element. Alternatively or additionally, a temperature measuring device is provided which measures the condenser temperature, wherein the temperature measuring device is connected to a condenser cooling system regulator for regulating the cooling system of the condenser. Alternatively or additionally, the heating element has connected thereto a heating element regulator for adjusting the heat output of the heating element to the prevailing pumping situation.

Provided is a vacuum ejector pump that operates through high-speed compressed air. The ejector pump includes an external C-shaped clip for securely fixing a casing assembled to a nozzle body, an internal fastening groove and protrusion to prevent arbitrary rotation of the casing relative to the body, and a guide groove and protrusion to indicate the assembly orientation of the body and the casing. Additionally, a check valve that is organically coupled to the body is further included. Accordingly, when using the vacuum ejector pump, the entire structure may be maintained in a robust and stable manner. As a result, vacuum leakage may be minimized.

Provided is a vacuum ejector pump that operates through high-speed compressed air. The ejector pump includes an external C-shaped clip for securely fixing a casing assembled to a nozzle body, an internal fastening groove and protrusion to prevent arbitrary rotation of the casing relative to the body, and a guide groove and protrusion to indicate the assembly orientation of the body and the casing. Additionally, a check valve that is organically coupled to the body is further included. Accordingly, when using the vacuum ejector pump, the entire structure may be maintained in a robust and stable manner. As a result, vacuum leakage may be minimized.

Provided is a vacuum ejector pump that operates through high-speed compressed air. The ejector pump includes an external C-shaped clip for securely fixing a casing assembled to a nozzle body, an internal fastening groove and protrusion to prevent arbitrary rotation of the casing relative to the body, and a guide groove and protrusion to indicate the assembly orientation of the body and the casing. Additionally, a check valve that is organically coupled to the body is further included. Accordingly, when using the vacuum ejector pump, the entire structure may be maintained in a robust and stable manner. As a result, vacuum leakage may be minimized.

Provided is a vacuum ejector pump that operates through high-speed compressed air. The ejector pump includes an external C-shaped clip for securely fixing a casing assembled to a nozzle body, an internal fastening groove and protrusion to prevent arbitrary rotation of the casing relative to the body, and a guide groove and protrusion to indicate the assembly orientation of the body and the casing. Additionally, a check valve that is organically coupled to the body is further included. Accordingly, when using the vacuum ejector pump, the entire structure may be maintained in a robust and stable manner. As a result, vacuum leakage may be minimized.