A vacuum trap, a plasma etch system using the vacuum trap and a method of cleaning the vacuum trap. The vacuum trap includes a baffle housing; and a removable baffle assembly disposed in the baffle housing, the baffle assembly comprising a set of baffle plates, the baffle plates spaced along a support rod from a first baffle plate to a last baffle plate, the baffle plates alternately disposed above and below the support rod and alternately disposed in an upper region and a lower region of the baffle housing.

A vacuum trap, a plasma etch system using the vacuum trap and a method of cleaning the vacuum trap. The vacuum trap includes a baffle housing; and a removable baffle assembly disposed in the baffle housing, the baffle assembly comprising a set of baffle plates, the baffle plates spaced along a support rod from a first baffle plate to a last baffle plate, the baffle plates alternately disposed above and below the support rod and alternately disposed in an upper region and a lower region of the baffle housing.

A guide device for a diffusion vacuum pump having a plurality of annular guide plates. The guide plates being arranged radially, wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point. Therein, the first section extends axially in a first direction, the second section extending axially in the opposite second direction. Therein the first section is designed to taper radially and/or the second section is designed to taper radially.

A guide device for a diffusion vacuum pump having a plurality of annular guide plates. The guide plates being arranged radially, wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point. Therein, the first section extends axially in a first direction, the second section extending axially in the opposite second direction. Therein the first section is designed to taper radially and/or the second section is designed to taper radially.

A nano gas pump for generating gas flow, gas compression and gas rarefication is disclosed, which provides up to several orders of magnitude pressure difference, operates over a wide range of pressure from several millitorr to several atmospheres, and with pumping speeds from several nano liters to several liters per minute. The nano gas pump does not require any moving parts and generate gas flow using steep temperature gradients of more than 100 milli Kelvin over a mean free path of the local gas in the direction of the gas flow. Temperature gradients are created and restricted mostly to the gas doing the work, through an arrangement of PNP, NPN, PP, NN thermoelectric segments together with conductive interconnects. Contact resistance which drastically reduces the efficiency of a nanoscale thermoelectric heat pump is mitigated by overlapping thermoelectric segments and electric connections. Several exemplary embodiments are described based on linear (straight) and non-linear (turn) gas flow paths. Various staging configurations are also described.

A vacuum pump includes a liquid getter that is sprayed into a pump chamber. The sprayed liquid getter can chemically bind with gaseous substance in the pump chamber to create ultra-low pressure in the pump chamber and an attached vacuum chamber. The liquefied getter can be circulated and recycled in the vacuum pump.

A diffusion pump is provided that includes a housing and a boiling chamber connected to the housing. The boiling chamber has a heating element. The housing has a nozzle that is connected to the boiling chamber. The housing also has a condenser is arranged at an internal surface, where the condenser has a cooling system. The boiling chamber is thermally isolated from the condenser by an isolator. The cooling system is at least partially a water cooling system and is connected to the heating element via a heat pump such that heat from the condenser is supplied to the heating element.

Provided is an oil diffusion pump equipped with an oil vapor generator capable of eliminating a problem that arises when a heater wire is used as a heating source for a hydraulic oil. The oil diffusion pump is a vacuum pump in which an oil vapor generator (70) is arranged in a casing (51) and operated to vaporize a hydraulic oil (8) and produce oil vapor, and this oil vapor is sprayed from a jet (53, 53a) to exhaust an intake air. The oil vapor generator (70) comprises a tubular case (71) (object to be heated) extending in an upright direction, an induction coil (75) wound around the tubular member (71) via an insulating material (73), and a power supply means for applying an alternating current to the induction coil (75). The case (71) and the coil (75) are installed in the casing so as to be immersed in the hydraulic oil (8) stored in the casing (51). The power supply means is operated to apply an alternating current to the induction coil (75) to heat the case (71) itself and thus vaporize the hydraulic oil (8).

Provided is an oil diffusion pump equipped with an oil vapor generator capable of eliminating a problem that arises when a heater wire is used as a heating source for a hydraulic oil. The oil diffusion pump is a vacuum pump in which an oil vapor generator (70) is arranged in a casing (51) and operated to vaporize a hydraulic oil (8) and produce oil vapor, and this oil vapor is sprayed from a jet (53, 53a) to exhaust an intake air. The oil vapor generator (70) comprises a tubular case (71) (object to be heated) extending in an upright direction, an induction coil (75) wound around the tubular member (71) via an insulating material (73), and a power supply means for applying an alternating current to the induction coil (75). The case (71) and the coil (75) are installed in the casing so as to be immersed in the hydraulic oil (8) stored in the casing (51). The power supply means is operated to apply an alternating current to the induction coil (75) to heat the case (71) itself and thus vaporize the hydraulic oil (8).

Provided is an oil diffusion pump equipped with an oil vapor generator capable of eliminating the problems occurring when a heater wire is used as a heating source for an operating oil. The present invention is a vacuum pump for which an oil vapor generator (70) is arranged within a casing (51) and this oil vapor generator is operated to vaporize an operating oil (8), thereby producing oil vapor and this oil vapor is sprayed from a jet (53, 53a) to exhaust intake air. The oil vapor generator (70) is equipped with: a container (71, 72) in the interior of which oil is stored, with the lower end of the tubular member (71), which comprises a material to be heated, being closed; and induction coil (75) wrapped around the atmosphere-side perimeter of the tubular member (71) (in particular, the case inner wall (71b)) with an insulating material (73) therebetween; and a power supply means that applies a low-frequency alternating current of several tens of Hz to several hundreds of Hz to the induction coil (75). The configuration is such that the tubular member (71) itself is heated when the power supply means is operated and the low-frequency alternating current is applied to the induction coil (75), thereby vaporizing the oil within the container.