An air conditioner includes: an outdoor unit; a plurality of indoor units respectively including indoor heat exchangers; expansion valves respectively provided to the plurality of indoor units, the expansion valves being configured to adjust flow rates of a refrigerant in the indoor heat exchangers; and a controller for executing a refrigerant amount balance control for adjusting opening degrees of the expansion valves so that operation state amounts, with which the indoor heat exchangers exert heat exchange amounts, of the plurality of indoor units become equal to each other.

A substrate processing system includes a multi-zone cooling apparatus to provide cooling for all or substantially all of a window in a substrate processing chamber. In one aspect, the apparatus includes one or more plenums to cover all or substantially all of a window in a substrate processing chamber, including under an energy source for transformer coupled plasma in the substrate processing chamber. One or more air amplifiers and accompanying conduits provide air to the one or more plenums to provide air flow to the window. The conduits are connected to plenum inlets at various distances from the center, to direct airflow throughout the window and thus address center hot, middle hot, and edge hot conditions, depending on the processes being carried out in the chamber. In one aspect, the one or more plenums include a central air inlet, to direct air toward the center portion of the window, to address center hot conditions.

The present disclosure relates to a refrigerator, and more particularly, to a refrigerator including one or more modules having a plurality of rooms. An embodiment of the present disclosure may provide a refrigerator including a plurality of refrigerator modules, wherein the refrigerator modules include: a cabinet forming an outer shape and having a plurality of storage chambers therein; doors provided in the cabinet and provided for each storage chamber; a radiant cooling plate which forms the rear wall of the storage chambers, and is provided to block the communication of air between the inner portions of the storage chambers and cool the inner portions of the storage chambers through radiant cooling; a refrigerant pipe flow path located at the rear side of the radiant cooling plate to exchange heat with the radiant cooling plate; and a machine room which discharges the refrigerant to the refrigerant pipe flow path and sucks the refrigerant having exchanged heat with the radiant cooling plate.

The present disclosure relates to a refrigerator, and more particularly, to a refrigerator including one or more modules having a plurality of rooms. An embodiment of the present disclosure may provide a refrigerator including a plurality of refrigerator modules, wherein the refrigerator modules include: a cabinet forming an outer shape and having a plurality of storage chambers therein; doors provided in the cabinet and provided for each storage chamber; a radiant cooling plate which forms the rear wall of the storage chambers, and is provided to block the communication of air between the inner portions of the storage chambers and cool the inner portions of the storage chambers through radiant cooling; a refrigerant pipe flow path located at the rear side of the radiant cooling plate to exchange heat with the radiant cooling plate; and a machine room which discharges the refrigerant to the refrigerant pipe flow path and sucks the refrigerant having exchanged heat with the radiant cooling plate.

A refrigerating apparatus applied to a refrigerator is disclosed. The refrigerating apparatus includes a refrigerant, a depressurization gas, an evaporator, a condenser, a first connecting pipe, a second connecting pipe, a third connecting pipe, a blower device and a refrigerator body. The evaporator is provided with an inlet and an outlet; the condenser is provided with a condensation cavity, a gas inlet, a gas outlet and a liquid outlet; a molecular sieve membrane is disposed in the condensation cavity; one end of the first connecting pipe is connected to the outlet and the other end to the gas inlet; one end of the second connecting pipe is connected to the liquid outlet and the other end to the inlet; one end of the third connecting pipe is connected to the gas outlet and the other end to the inlet.

A refrigerating apparatus applied to a refrigerator is disclosed. The refrigerating apparatus includes a refrigerant, a depressurization gas, an evaporator, a condenser, a first connecting pipe, a second connecting pipe, a third connecting pipe, a blower device and a refrigerator body. The evaporator is provided with an inlet and an outlet; the condenser is provided with a condensation cavity, a gas inlet, a gas outlet and a liquid outlet; a molecular sieve membrane is disposed in the condensation cavity; one end of the first connecting pipe is connected to the outlet and the other end to the gas inlet; one end of the second connecting pipe is connected to the liquid outlet and the other end to the inlet; one end of the third connecting pipe is connected to the gas outlet and the other end to the inlet.

A refrigeration system includes at least one refrigeration circuit 2. The refrigeration circuit 2 includes a compressor 10, a first heat rejecting heat exchanger 6, a second heat rejecting heat exchanger 8, an expansion valve 12 and a heat absorbing heat exchanger 4. The refrigeration circuit 2 further includes a heat recovery control valve 14 for controlling flow of the compressed refrigerant fluid between the first heat rejecting heat exchanger and the second heat rejecting heat exchanger. The first heat rejecting heat exchanger 6 is for receiving compressed refrigerant fluid from the compressor 10 and exchanging heat between the compressed refrigerant fluid and a second fluid to increase the temperature of the second fluid. The second heat rejecting heat exchanger 8 is for receiving the compressed refrigerant fluid and exchanging heat with ambient air to cool the compressed refrigerant fluid.

A high efficiency airflow management system can be used to reliably and consistently draw air through palletized product stacks with a minimum of energy expenditure. A racking system is provided with a grid of pallet bays separated from an air plenum/chamber by a wall having an airflow opening for each pallet bay. An air dam selectively permits or prevents airflow through portions of the airflow opening such that airflow may be allowed to flow through the entire opening, only a portion of the opening, or none of the opening.

The storage cell includes ventilation means suitable for creating a rear-to-front air flow or a front-to-rear air flow, an inflatable sealing device, and inflation means which allow the inflatable sealing device to be inflated. The inflatable sealing device includes an upper inflatable sealing element and at least one side inflatable sealing element which directly or indirectly allow, in the inflated state, a seal between the upper wall of the cell and at least one part of the top face of a set of products positioned in the cell and a seal between at least one side wall of the cell and at least one part of one of the side faces of this set of products. The upper inflatable sealing element and the side inflatable sealing element delimit a single inflatable chamber, and the inflation means allow the upper inflatable sealing element and the side inflatable sealing element to be inflated by blowing air into this single inflatable chamber.

A plenum, positioned beneath a first coil and above a window disposed on a top portion of a processing chamber, has side walls and a top surface covering an upper surface of the window and has a first air inlet positioned at a center portion to receive airflow from a first air amplifier. The first air inlet includes holes to distribute the air across the window within the side walls to reduce hotspots at a center portion of the window. The plenum includes a second air inlet at an edge portion of the top surface to receive the airflow from a second air amplifier to reduce hotspots at an edge portion of the window, and a third air inlet between the center and edge portions of the top surface to receive the airflow from a third air amplifier to reduce hotspots at a middle portion of the window.