A substrate processing apparatus 1 includes a controller 61 configured to perform a first recipe and a second recipe in parallel. Each of the first recipe and the second recipe includes a first transfer processing of transferring a substrate from a transit unit 14 to a liquid processing unit 17, a liquid processing, a second transfer processing of transferring the substrate from the liquid processing unit 17 to a drying unit 18 and a drying processing. The controller 61 determines, while the first recipe on a first substrate in substrates is being performed, when the second recipe on a second substrate in the substrates is started, a start timing of the first transfer processing of the second substrate such that a time period of the second transfer processing of the first substrate does not overlap with a time period of the second transfer processing of the second substrate.

A solid-liquid separation device performs dehydration or deoiling from a treated object using a substance A that is a gas at normal temperature and pressure and is capable of dissolving water and oil when liquefied. The separation device includes a substance B that circulates while generating phase change in a closed system, a compressor that compresses the substance B, a first heat exchanger that condenses substance B and evaporates of the substance A, an expansion valve that decompresses the condensed substance B, a second heat exchanger that evaporates substance B and condenses substance A, and a treatment tank wherein substance A is mixed with the treated object, substance A is evaporated while separated from the liquid in the first heat exchanger, and condensed in the second heat exchanger. The center of gravity of the first heat exchanger is lower than the second heat exchanger in a vertical direction.

To provide a solid-liquid separation system in which a stable operation can be continuously conducted and the introduction cost and the running cost can be suppressed, in cases where moisture or oil are separated from a substance containing moisture or oil by using changes in phase of a working fluid having a nature of dissolving moisture or oil in a liquid phase. Provided is a solid-liquid separation system in which a working fluid that dissolves moisture or oil in a liquid phase is liquefied and brought into contact with a solid substance to thereby allow the working fluid to contain moisture or oil that has been contained in the solid substance, and then the working fluid is vaporized to precipitate the moisture or oil, characterized in that the solid-liquid separation system is provided with a fluid circuit in which a high-temperature-side heat exchanger that vaporizes the working fluid by a refrigerant, a low-temperature-side heat exchanger that liquefies the working fluid by the refrigerant are connected to circulate the working fluid, and a refrigerating cycle in which a compressor, a condenser that exchanges heat with a heat source other than the working fluid, the high-temperature-side heat exchanger, an expansion mechanism, and the low-temperature-side heat exchanger are sequentially connected to circulate the refrigerant, and that the solid-liquid separation system includes a recovery operation mode in which the working fluid in a filling tank is vaporized, besides the solid-liquid separation. For performing the recovery operation mode, a second expansion mechanism is provided between the condenser and the high-temperature-side heat exchanger. The system is also characterized in that the fluid circuit is provided with a heating unit that does not use the refrigerant as a heat source.

The present invention provides a blank on-line water blowing device. The blank on-line water blowing device includes a frame, a lift cylinder, bearing seats A, linear bearings, guide shafts, a support, a servomotor, a lifting frame, a speed reducer, a bearing seat B, a bearing, a rotating shaft, a synchronous pulley A, a synchronous belt, a gland, a base, a base plate, a flange, springs, copper sleeves, floating columns, an air supply pipe, air amplifiers and a mounting rack. The blank on-line water blowing device provided by the present invention can meet the requirement of blank water blowing, and meanwhile, has the characteristics of simple structure, convenience in manufacturing, stable performance and capability of meeting the precision machining requirement.

A dryer device for drying plastics pouches, the device comprising a main air admission pipe having a plurality of dryer heads including outlet orifices, each outlet orifice forming an air knife, the dryer heads being associated in pairs so as to define a plurality of passages for plastics pouches, each passage being adapted to dry plastics pouches passing therethrough by applying two opposing air knives.

A dryer device for drying plastics pouches, the device comprising a main air admission pipe having a plurality of dryer heads including outlet orifices, each outlet orifice forming an air knife, the dryer heads being associated in pairs so as to define a plurality of passages for plastics pouches, each passage being adapted to dry plastics pouches passing therethrough by applying two opposing air knives.

A polymeric composition for enhancing grip, including a modified solvent phase and a solid phase dispersed within the modified solvent phase. The modified solvent phase may include calcium-based gel, including calcium acetate particles partially dissolved in an alcoholic solution. The solid phase also includes a polymeric matrix and a plurality of desiccant particles encompassed by the polymeric matrix. The polymeric matrix includes polyvinyl acetate (PVAc) and a thickener.

A device is for drying disc-shaped substrates. The device has an elongated body having a top surface, a bottom surface, and a circumferential surface. The elongated body has a hole in the top surface forming a channel, which extends to a lower drainage part of the elongated body, and is chamfered having a chamfer depth and a chamfer angle forming an edge between the chamfer and the top surface and forming a conical recess suitable for resting a disc shaped substrate. The chamfer angle is more than 10° and less than 30°. The chamfer depth is more than 6 mm and less than 12 mm.

A device is for drying disc-shaped substrates. The device has an elongated body having a top surface, a bottom surface, and a circumferential surface. The elongated body has a hole in the top surface forming a channel, which extends to a lower drainage part of the elongated body, and is chamfered having a chamfer depth and a chamfer angle forming an edge between the chamfer and the top surface and forming a conical recess suitable for resting a disc shaped substrate. The chamfer angle is more than 10° and less than 30°. The chamfer depth is more than 6 mm and less than 12 mm.

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber providing an inner space; a fluid supply unit configured to supply a drying fluid to the inner space; and a fluid exhaust unit configured to exhaust the drying fluid from the inner space, and wherein the fluid exhaust unit includes an exhaust line connected to the chamber; a pressure adjusting member installed at the exhaust line and configured to maintain a pressure of the inner space at a set pressure; and a heating member installed at the pressure adjusting member or a back end of the pressure adjusting member.