A heat treatment device includes: a heat treatment chamber which accommodates an object to be treated; a cooling gas supply unit which supplies a cooling gas into the heat treatment chamber; a cooling gas circulation unit which circulates the cooling gas in the heat treatment chamber; and a gas purge unit which gas-purges, with an inert gas, a portion in which there is a possibility of mixing of the cooling gas supplied into the heat treatment chamber and an oxygen gas, in which the cooling gas supply unit supplies a hydrogen gas into the heat treatment chamber as the cooling gas.

A heat treatment device includes: a heat treatment chamber which accommodates an object to be treated; a cooling gas supply unit which supplies a cooling gas into the heat treatment chamber; a cooling gas circulation unit which circulates the cooling gas in the heat treatment chamber; and a gas purge unit which gas-purges, with an inert gas, a portion in which there is a possibility of mixing of the cooling gas supplied into the heat treatment chamber and an oxygen gas, in which the cooling gas supply unit supplies a hydrogen gas into the heat treatment chamber as the cooling gas.

One or more embodiments of a burner panel for a metallurgical furnace is described herein. The burner panel has a body having a top surface, a bottom surface, a left surface, a right surface, and a front surface surrounding an interior burner area. A spray-cool system disposed in the interior area. A burner tube at least partially disposed in the interior burner area and extends into the front surface. The burner tube is configured to accept a burner.

One or more embodiments of a burner panel for a metallurgical furnace is described herein. The burner panel has a body having a top surface, a bottom surface, a left surface, a right surface, and a front surface surrounding an interior burner area. A spray-cool system disposed in the interior area. A burner tube at least partially disposed in the interior burner area and extends into the front surface. The burner tube is configured to accept a burner.

A first wall structure for a plasma chamber (200). The first wall structure comprises and inner wall (201) and a solid deposit (202). The inner wall is formed from a refractory metal or an alloy or composite thereof and has a plurality of pores. The solid deposit in thermal contact with the inner wall, such that the plurality of pores provide a passage from an exterior of the first wall structure to the deposit. The deposit consists of a material having a boiling point less than a melting point of the refractory metal. The first wall structure is configured such that at a normal operating temperature of the first wall structure, the deposit is solid.

A substrate processing apparatus includes a bake chamber, a chamber door that opens and closes an opening of the bake chamber, a first support plate in the bake chamber, a first partition wall, which partitions a space provided on the first support plate into first heat treatment spaces spaced apart from each other in a first horizontal direction, and extends in a second horizontal direction and a vertical direction, first heat treatment modules arranged in the first heat treatment spaces, a first exhaust duct extending in the first horizontal direction across the first heat treatment spaces, a first sealing bracket coupled to the first exhaust duct, a first horizontal packing configured to seal a gap between the first sealing bracket and the chamber door, and a first vertical packing configured to seal a gap between the first partition wall and the chamber door.

A substrate processing apparatus includes a bake chamber, a chamber door that opens and closes an opening of the bake chamber, a first support plate in the bake chamber, a first partition wall, which partitions a space provided on the first support plate into first heat treatment spaces spaced apart from each other in a first horizontal direction, and extends in a second horizontal direction and a vertical direction, first heat treatment modules arranged in the first heat treatment spaces, a first exhaust duct extending in the first horizontal direction across the first heat treatment spaces, a first sealing bracket coupled to the first exhaust duct, a first horizontal packing configured to seal a gap between the first sealing bracket and the chamber door, and a first vertical packing configured to seal a gap between the first partition wall and the chamber door.

One embodiment is a cooling system for regulating temperature of a surface of a metallurgical furnace. The cooling system includes a plurality of spray conduits. Each spray conduit has one or more control valves and has a plurality of nozzles. A plurality of temperature sensors are disposed proximate the surface of the metallurgical furnace. A control system adjusts the control valves of the plurality of spray conduits in response to temperature information derived from the plurality of temperature sensors.

One embodiment is a cooling system for regulating temperature of a surface of a metallurgical furnace. The cooling system includes a plurality of spray conduits. Each spray conduit has one or more control valves and has a plurality of nozzles. A plurality of temperature sensors are disposed proximate the surface of the metallurgical furnace. A control system adjusts the control valves of the plurality of spray conduits in response to temperature information derived from the plurality of temperature sensors.

The invention concerns a process for detecting water leaks in smelting furnaces (2; 4) or in metal or alloy treatment plants, comprising the following steps: (i) providing at least one smelting furnace (2; 4), or at least one metal or alloy treatment plant provided with a water cooling system (5) and being connected to a process fume exhaust system; (ii) mixing in the cooling water a tracer chemical which is volatile in the event of water leakage together with the exhaust gases and which is suitable to be detected by an analysis system of the exhaust gases; and (iii) detecting said tracer chemical contained in the exhaust gases by said analysis system comprised in said process fume exhaust plant, wherein said tracer chemical is deuterated water. The invention further refers to a Plant for the production of metals or alloys.