According to an aspect there is provided an apparatus comprising at least one electrode and a movable sensor membrane, wherein the apparatus comprises means for: measuring a voltage or a current; determining an amount of external pressure based on the measured voltage or current; based on the determined amount of external pressure, providing electrostatic feedback force such that the movable sensor membrane is undeflected; and determining a correlation between the electrostatic force feedback and the external pressure.

Multiple calibration results for calibrating a barometric pressure sensor based on data received from a device containing the sensor are determined and stored in a table. The table is updated based on rules regarding a relationship between each calibration result and a current calibration value. The calibration results are weighted and combined to determine a combined calibration result. The calibration value for calibrating the sensor is selected from the calibration results, the combined calibration results, or the current calibration value based on a selection criteria.

A method for monitoring an oil flow, generated by an oil pump, in an oil cooling circuit of a thermal management system, includes: arranging a first pressure sensor at a first point in the cooling circuit; arranging a second pressure sensor at a second point in the oil cooling circuit; determining pressure difference values based on recorded pressures; and comparing the pressure difference values with a predeterminable comparison value for the pressure difference so as to check for a fault.

There is provided a method of calibrating multiple chamber pressure sensors of a substrate processing system. The substrate processing system includes: multiple chambers; multiple chamber pressure sensors; multiple gas suppliers configured to supply a gas to an internal space of the multiple chambers; multiple exhausters connected to the internal spaces of the multiple chambers via multiple exhaust flow paths; and multiple first gas flow paths. The method includes: acquiring a third volume, which is a sum of a first volume and a second volume; acquiring a first pressure change rate of the internal space of a selected chamber; calculating a second pressure change rate of the internal space of the selected chamber; and calibrating the selected chamber pressure sensor such that a difference between the first pressure change rate and the second pressure change rate is within a preset range.

The invention relates to a leak detection system on board of a vehicle comprising a fuel tank (301, 401), a filler pipe (302, 402), a venting line (303, 403) for recirculating fuel vapors from the tank to the filler pipe, said system having a combination pressure and temperature sensor mounted in the vapor dome of the fuel tank, and a pressure sensor located in the recirculation line above the highest possible liquid level that could be present in the recirculation line and to methods to detect said leak.

A method of calibrating a virtual force sensor of a robot manipulator, wherein in a plurality of poses, the method comprises: applying an external wrench to the robot manipulator ascertaining an estimate of the external wrench, ascertaining a respective cost function based on a difference between the determined estimate of the external wrench and a specified external wrench, ascertaining a respective calibration function by minimizing the respective cost function, and storing the respective calibration function in a data set of all calibration functions with assignment of the respective calibration function to a respective pose for which the respective calibration function was ascertained.

A pressure sensor for a pipe includes: a flexible strip; at least one strain sensing element; and a tensioning device. A first end of the flexible strip passes through a second end of the flexible strip. Between the first end of the flexible strip and the second end of the flexible strip, the flexible strip includes the at least one strain sensing element. The pressure sensor is attachable to the pipe. The first end of the flexible strip extends through or past the second end of the flexible strip. The tensioning device tensions the pressure sensor around the pipe.

An arrangement for sensor node calibration, including a calibration chamber including or being connected to a unit to facilitate control of at least one calibration quantity or attribute in the calibration chamber, a reference measuring unit arranged to measure at least one calibration quantity or attribute inside the calibration chamber, and a computing unit arranged to obtain from at least one sensor node sensor node identifier (ID) information, sensor node measurement information, wherein the computing unit is arranged to identify a sensor node based on sensor node ID information received from the sensor node, obtain measurement information the identified 0sensor node, obtain calibration quantity or attribute measurement in-formation from the reference measuring unit, and compare calibration quantity or attribute measurement information with sensor node measurement information. Corresponding device and method are also disclosed.

Fiber-optic equipment is often deployed in various locations, and performance of fiber-optic transmissions may be monitored as a gauge of equipment status to prevent costly and inconvenient communication outages. Events that damage equipment that eventually result in outage and may be desirable to address proactively, but the occurrence of such events may be difficult to detect only through equipment performance Presented herein are techniques for monitoring and maintaining fiber-optic equipment performance via enclosure sensors that measure physical properties within a fiber-optic equipment enclosure, such as temperature, pressure, light, motion, vibration, and moisture, which are often diagnostic and predictive of causes of eventual communication outages, such as temperature-induced cable loss (TICL), incomplete flash-testing during installation, exposure to hazardous environmental conditions, and tampering. An enclosure sensor package transmits the physical measurements to a monitoring station, and automatic determination of enclosure-related events may enable triaging and transmission of repair alerts to maintenance personnel.

The present invention relates to microfluidic or millifluidic chips (1) comprising at least one pressure sensing unit (4) able to measure a fluid flow pressure. The present invention also relates to a method for a direct and contact-free measuring of a local pressure of a fluid circulating in a microfluidic circuit, using a microfluidic or millifluidic chips (1) according to the invention.