There is provided a method of calibrating multiple chamber pressure sensors of a substrate processing system. The substrate processing system includes: multiple chambers; multiple chamber pressure sensors; multiple gas suppliers configured to supply a gas to an internal space of the multiple chambers; multiple exhausters connected to the internal spaces of the multiple chambers via multiple exhaust flow paths; and multiple first gas flow paths. The method includes: acquiring a third volume, which is a sum of a first volume and a second volume; acquiring a first pressure change rate of the internal space of a selected chamber; calculating a second pressure change rate of the internal space of the selected chamber; and calibrating the selected chamber pressure sensor such that a difference between the first pressure change rate and the second pressure change rate is within a preset range.

There is provided a method of calibrating multiple chamber pressure sensors of a substrate processing system. The substrate processing system includes: multiple chambers; multiple chamber pressure sensors; multiple gas suppliers configured to supply a gas to an internal space of the multiple chambers; multiple exhausters connected to the internal spaces of the multiple chambers via multiple exhaust flow paths; and multiple first gas flow paths. The method includes: acquiring a third volume, which is a sum of a first volume and a second volume; acquiring a first pressure change rate of the internal space of a selected chamber; calculating a second pressure change rate of the internal space of the selected chamber; and calibrating the selected chamber pressure sensor such that a difference between the first pressure change rate and the second pressure change rate is within a preset range.

The invention relates to a device for monitoring the contact of a workpiece (1) or tool on a spindle (2) of a machine tool, which device has a contact surface (3) for the workpiece (1) or tool. At least one measurement nozzle (4) is arranged in the region of the contact surface in order to produce a fluid flow directed away from the contact surface (3). Upstream of the measurement nozzle, the fluid flow is conducted through a vacuum nozzle, which can comprise a jet nozzle (7c) and a collector nozzle (7b). When the fluid medium flows through the vacuum nozzle, the vacuum nozzle produces a negative pressure in a negative pressure chamber (9c). A pressure sensor (6) or pressure switch senses a measurement pressure (p3) in the negative pressure chamber.

The invention relates to a device for monitoring the contact of a workpiece (1) or tool on a spindle (2) of a machine tool, which device has a contact surface (3) for the workpiece (1) or tool. At least one measurement nozzle (4) is arranged in the region of the contact surface in order to produce a fluid flow directed away from the contact surface (3). Upstream of the measurement nozzle, the fluid flow is conducted through a vacuum nozzle, which can comprise a jet nozzle (7c) and a collector nozzle (7b). When the fluid medium flows through the vacuum nozzle, the vacuum nozzle produces a negative pressure in a negative pressure chamber (9c). A pressure sensor (6) or pressure switch senses a measurement pressure (p3) in the negative pressure chamber.

A reconfigurable pressure transducer assembly having an input tube filter assembly is provided. The resonant frequency and dampening characteristics associate with the pressure transducer assembly may be configured by the input tube filter assembly. The input tube filter assembly includes one or more inserts disposed in an input tube channel, the one or more inserts including one or more bores of selectable dimensions and extending therethrough from a first end to a second end. The one or more inserts define an effective input tube bore, and the input tube filter assembly is tunable by selection of the selectable dimensions of the one or more inserts.

A reconfigurable pressure transducer assembly having an input tube filter assembly is provided. The resonant frequency and dampening characteristics associate with the pressure transducer assembly may be configured by the input tube filter assembly. The input tube filter assembly includes one or more inserts disposed in an input tube channel, the one or more inserts including one or more bores of selectable dimensions and extending therethrough from a first end to a second end. The one or more inserts define an effective input tube bore, and the input tube filter assembly is tunable by selection of the selectable dimensions of the one or more inserts.

Impact testing apparatuses are disclosed which simulate and measure various impact-related events associated with the operation of a drug delivery device. The impact testing apparatus may include an impactor configured to simulate a plunger rod of the drug delivery device, and a guide sleeve configured to receive a syringe corresponding to the drug delivery device. The syringe may have a proximal end, a distal end defining an outlet, and an interior chamber extending between the proximal and distal ends and carrying a plunger. Additionally, the impact testing apparatus may include an energy source configured to reduce a distance between the impactor and the plunger so that the impactor strikes the plunger. Various sensors may be included to measure characteristics of one or more impacts caused by the impactor. Methods of impact testing a syringe filled with a fluid and carrying a plunger are also disclosed.

A physical quantity measuring device includes a cylindrical case, a cap member, and a sealing member. The cap member covers a circumferential portion of a through-hole of the cylindrical case, while the sealing member provides a seal between the through-hole and the cap member. The cap member is pivotally supported by an attachment target portion of a lid member so that the cap member is rotatable between a first orientation and a second orientation. A cap member engagement portion is insertable into an engagement-portion insertion hole in the first orientation and is engageable with the attachment target portion in the second orientation. A linear member of the sealing member is located, in the first orientation, in a region in a rotation direction from the first orientation to the second orientation. The linear member prevents loss of the cap member and is replaceable, together with the seal member, if damaged.

Pressure gauges according to this invention provide pressure measurement on all brands of crimping tools, including 6-Ton D3 tools. In particular, this design eliminates the need to remove the tool crimp head to measure the pressure of the crimping tool. Additionally, this design eliminates the need to install additional dedicated fixtures on the crimping tool to measure the ram pressure. This design incorporates a self-centering profile to avoid side-loading when mounting the pressure gauge in the crimping tool. The dial indicator on pressure gauges of this invention captures and holds the maximum pressure reading with the use of a simple manual lever. The lever can be easily reset for the next pressure reading. Pressure gauges according to various embodiments of this invention include dual piston pressure sensors. Additionally, pressure measurement is accomplished with a simple hydro mechanical manometer display.

A sensor unit includes a transducer element monitoring a measurand and generating an electrical output signal correlated with the measurand, a sensor substrate having a first surface and an opposite second surface, a recess extending from the first surface of the substrate through to the second surface of the substrate, and a circuit carrier. The transducer element and a first electrically conductive contact pad are arranged on the first surface and electrically connected. The circuit carrier has a second electrically conductive contact pad. The sensor substrate is mounted on the circuit carrier with the first surface facing the circuit carrier. The first electrically conductive contact pad and the second electrically conductive contact pad are interconnected by an electrically conductive material filled in from the second surface towards the first surface of the sensor substrate.