A probe unit according to the present invention is suitable for allowing a large current to flow. In the probe unit that accommodates a plurality of contact probes for electrically connecting an inspection target object and a signal processing device used to output an inspection signal, both ends of a large current probe (3) are electrically connected to electrodes of a contact target object, and a large current is made to flow via a metal block (50) that comes into contact with both end portions of the large current probe (3).

An abnormality detection device includes: a coupling-capacitor having a first-end and a second-end coupled with a high-voltage circuit; a signal output unit; a signal extraction unit; and a signal input unit. The signal output unit is coupled with the first-end of the coupling-capacitor via a detection-resistor, and outputs an alternating-current inspection-signal. The signal extraction unit extracts the inspection-signal, as an extraction-signal, output between the detection-resistor and the coupling-capacitor. The signal input unit detects abnormality of insulation resistance of the high-voltage circuit based on a level of the inputted extraction-signal. The signal extraction unit includes a signal removing filter and a subtraction circuit. The filter removes a signal equal in frequency to the inspection-signal and passes low-frequency noises lower in frequency than the inspection-signal. The subtraction circuit outputs a differential signal, as the extraction-signal, between a signal having passed through the filter and a signal not having passed through the filter.

A workpiece evaluating method evaluates the gettering property of a device wafer having a plurality of devices formed on the front side of the wafer and having a gettering layer formed inside the wafer. The method includes the steps of applying excitation light for exciting a carrier to the wafer, applying microwaves to a light applied area where the excitation light is applied and also to an area other than the light applied area, measuring the intensity of the microwaves reflected from the light applied area and from the area other than the light applied area, subtracting the intensity of the microwaves reflected from the area other than the light applied area from the intensity of the microwaves reflected from the light applied area to thereby obtain a differential signal, and determining the gettering property of the gettering layer according to the intensity of the differential signal obtained above.

A humidity sensor includes a lower electrode formed above a substrate, a first humidity sensing film covering the lower electrode, an upper electrode formed above the first humidity sensing film, and a second humidity sensing film covering the upper electrode and making contact with the first humidity sensing film through openings of the upper electrode. The upper electrode has a predetermined opening pattern. The area of the upper electrode is larger than the area of the lower electrode, and is smaller than the area of the first humidity sensing film.

A humidity sensor includes a lower electrode formed above a substrate, a first humidity sensing film covering the lower electrode, an upper electrode formed above the first humidity sensing film, and a second humidity sensing film covering the upper electrode and making contact with the first humidity sensing film through openings of the upper electrode. The upper electrode has a predetermined opening pattern. The area of the upper electrode is larger than the area of the lower electrode, and is smaller than the area of the first humidity sensing film.

Measuring a sample includes providing a magnetic field at the sample using an electromagnetic field resonator. The electromagnetic field resonator includes two or more resonant structures at least partially contained within dielectric material of a substrate, at least a first resonant structure configured to provide the magnetic field at the sample positioned in proximity to the first resonant structure. The sample is characterized by an electron spin resonance frequency. A size of an inner area of the first resonant structure and a number of resonant structures included in the electromagnetic field resonator at least partially determine a range of an operating resonance frequency of the electromagnetic field resonator that includes the electron spin resonance frequency. Measuring the sample also includes receiving an output optical signal from the sample generated based at least in part on a magnetic field generated by the electromagnetic field resonator.

Systems and methods of operating a test apparatus to simulate testing a production aircraft component include assembling a test assembly having a test specimen and a wear protection material disposed on opposing sides of the test specimen, an outer plate disposed on each side of the test specimen in contact with the wear protection material, and a bolt disposed through the test specimen and the outer plates and applying a preload against the wear protection material. The test assembly is secured in a test machine, and the test machine is operated to provide a predetermined displacement of the test specimen relative to the outer plates at a predetermined frequency at a determined frequency of displacement cycles. The preload, the predetermined displacement, and the predetermined frequency of displacement cycles are determined through finite element analysis of an analytical model of the production component.

Systems and methods of operating a test apparatus to simulate testing a production aircraft component include assembling a test assembly having a test specimen and a wear protection material disposed on opposing sides of the test specimen, an outer plate disposed on each side of the test specimen in contact with the wear protection material, and a bolt disposed through the test specimen and the outer plates and applying a preload against the wear protection material. The test assembly is secured in a test machine, and the test machine is operated to provide a predetermined displacement of the test specimen relative to the outer plates at a predetermined frequency at a determined frequency of displacement cycles. The preload, the predetermined displacement, and the predetermined frequency of displacement cycles are determined through finite element analysis of an analytical model of the production component.

A magnetostrictive transducer assembly for generating a longitudinal elastic guided wave of a selected frequency and mode and for guiding the wave into an open end of a heat exchanger tube for testing the tube. The transducer assembly comprises a current-carrying coil of wire, a magnetostrictive material wrapped around the coil of wire, a mechanism for pressing the magnetostrictive material against an inner surface of the tube, and one or more biasing magnets placed in the vicinity of the current-carrying coil of wire and the magnetostrictive material.

An electronic device for the diagnosis of insulation loss of an energized electrical apparatus, with respect to a ground. The device includes a first resistance-switch group and a second resistance-switch group, connectable or disconnectable in a controlled manner, and also a first measurement circuit and a second measurement circuit, arranged in parallel to the first and second resistance-switch groups, respectively. The first and second measurement circuits include respective first and second detection circuits, first and second charge modulation circuits and first and second partition resistors (RB.sub.minus, RB.sub.plus). The first and second charge modulation circuits allow a dynamic switching measurement technique. Moreover, a method is described for measuring the insulation resistances (RI.sub.minus, RI.sub.plus) of an energized electrical apparatus with respect to ground, in which the method is carried out by a device according to the invention. Finally, a self-diagnosis method of device is described.