A storage medium stores correction data for obtaining a correction amount for correcting image data, obtained from an image formed by a lens apparatus, with respect to a distribution of a light amount in the image, wherein the correction data includes a coefficient of an n-th order polynomial (where n is a non-negative integer) with respect to an image height h, the coefficient corresponding to a state of the lens apparatus. The coefficient satisfies a first inequality
−0.15≤dD′(h)−dDlens(h)≤1.98, where dDlens(h) represents a change amount of the light amount at the image height h per an increase amount dh of the image height h, and dD′(h) represents a change amount of an inverse of a value of the n-th order polynomial at the image height h per the increase amount dh.

A storage medium stores correction data for obtaining a correction amount for correcting image data, obtained from an image formed by a lens apparatus, with respect to a distribution of a light amount in the image, wherein the correction data includes a coefficient of an n-th order polynomial (where n is a non-negative integer) with respect to an image height h, the coefficient corresponding to a state of the lens apparatus. The coefficient satisfies a first inequality
−0.15≤dD′(h)−dDlens(h)≤1.98, where dDlens(h) represents a change amount of the light amount at the image height h per an increase amount dh of the image height h, and dD′(h) represents a change amount of an inverse of a value of the n-th order polynomial at the image height h per the increase amount dh.

An apparatus for treating a substrate includes a developing chamber that performs a developing process on the substrate by supplying a developing solution, a supercritical chamber that treats the substrate by supplying a supercritical fluid, and a transfer chamber having a transfer unit that transfers the substrate W between the developing chamber and the supercritical chamber.

Provided are a processing method and a processing apparatus in which a concentration of a solid content of a development fatigue liquid is low and a moisture content of a discharged solid substance is small. The processing method is a method for removing a first solid substance having a smaller specific gravity than the washout liquid and a second solid substance having a larger specific gravity than the washout liquid from a development fatigue liquid including a solid substance generated by removal of a non-exposed portion of a photosensitive resin plate that has been exposed in an image shape by development using the washout liquid. The method includes a first step of centrifugally separating the first solid substance and the second solid substance included in the development fatigue liquid in a rotating container, accumulating the second solid substance on an inner wall of the container, and accumulating the first solid substance on a holding member provided in the container, a second step of discharging the development fatigue liquid from the container in a state in which the first solid substance accumulated on the holding member is held on the holding member, and a third step of rotating the container, thereby removing the first solid substance held on the holding member from the holding member.

A storage medium stores correction data for obtaining a correction amount for correcting image data, obtained from an image formed by a lens apparatus, with respect to a distribution of a light amount in the image, wherein the correction data includes a coefficient of an n-th order polynomial (where n is a non-negative integer) with respect to an image height h, the coefficient corresponding to a state of the lens apparatus. The coefficient satisfies a first inequality

0.15dD(h)dDlens(h)1.98, where dDlens(h) represents a change amount of the light amount at the image height h per an increase amount dh of the image height h, and dD(h) represents a change amount of an inverse of a value of the n-th order polynomial at the image height h per the increase amount dh.

After a developing step is performed by feeding developer to the substrate, a second nozzle starts dispensation of a surfactant rinse liquid to a position away from the center of a rotating substrate. This operation is performed such that the center of the substrate does not enter into a reaching region of the substrate where the surfactant rinse liquid dispensed from the second nozzle firstly reaches. Accordingly, a point of the reaching region of the surfactant rinse liquid is dispersed, leading to suppression in locally smaller or larger line width of a resist pattern at the center and around the center of the substrate. Consequently, this achieves enhanced uniformity of the line widths of the resist pattern within a surface of the substrate during the rinse process.

A method for controlling an infrared illuminator and a related image-recording device are provided. The method for controlling an infrared illuminator includes: turning on the infrared illuminator in a filming environment to provide light; filtering out light-reflection interference caused by the light to obtain an actual visible illuminance value; and controlling on and off states of the infrared illuminator based on the actual visible illuminance value.

A method for controlling an infrared illuminator and a related image-recording device are provided. The method for controlling an infrared illuminator includes: turning on the infrared illuminator in a filming environment to provide light; filtering out light-reflection interference caused by the light to obtain an actual visible illuminance value; and controlling on and off states of the infrared illuminator based on the actual visible illuminance value.

A dispensing head for dispensing a developer onto a substrate is provided. The dispensing head includes a housing configured to receive the developer. The dispensing head further includes at least one liquid outlet provided on the housing. The liquid outlet is configured to spray the developer onto an elongated area on the substrate. Also, the liquid outlet is configured to spray the developer along a dispensing direction that is tilted with respect to the normal direction of the substrate and perpendicular to the long-axis direction of the elongated area.

A method for controlling an infrared illuminator and a related image-recording device are provided. The method for controlling an infrared illuminator includes: turning on the infrared illuminator in a filming environment to provide light; filtering out light-reflection interference caused by the light to obtain an actual visible illuminance value; and controlling on and off states of the infrared illuminator based on the actual visible illuminance value.