The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.

The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.

An antenna device (1) includes an antenna element (6) and a plurality of EBG elements (10), in which the plurality of EBG elements (10) includes a plurality of first EBG elements (11) and a plurality of second EBG elements (12) having a structure different from a structure of the plurality of first EGB elements (11).

A sensor measurement device includes: an impedance analyzer to determine an impedance of a sample; a first antenna configured to generate electromagnetic radiation having a first wavelength; an impedance-matching device, positioned in a radiation path between the first antenna and the sample, to receive the electromagnetic radiation from the first antenna and transmit electromagnetic radiation of the first wavelength into the sample, the impedance-matching device comprising a metasurface including: a substrate having a thickness no greater than the first wavelength of the electromagnetic radiation; and a plurality of elements supported by the substrate, wherein: the plurality of elements are spaced apart from one another across the substrate, each element has a first dimension no greater than the first wavelength of the electromagnetic radiation, and at least two elements of the plurality of elements differ in one or more of shape or size; and a second antenna configured to receive the electromagnetic radiation from the sample.

A sensor measurement device includes: an impedance analyzer to determine an impedance of a sample; a first antenna configured to generate electromagnetic radiation having a first wavelength; an impedance-matching device, positioned in a radiation path between the first antenna and the sample, to receive the electromagnetic radiation from the first antenna and transmit electromagnetic radiation of the first wavelength into the sample, the impedance-matching device comprising a metasurface including: a substrate having a thickness no greater than the first wavelength of the electromagnetic radiation; and a plurality of elements supported by the substrate, wherein: the plurality of elements are spaced apart from one another across the substrate, each element has a first dimension no greater than the first wavelength of the electromagnetic radiation, and at least two elements of the plurality of elements differ in one or more of shape or size; and a second antenna configured to receive the electromagnetic radiation from the sample.

A new method for calibrating slide screw tuners, both using hexahedron vertically moving and disc-shaped eccentrically rotating reflective tuning probes, allows straightening the reflection factor phase response (anti-skewing); it uses a new scaling method and a new coordinate system of tuning probe control. The method is agnostic and self-regulating, it treats the tuner as a black box and depends on the test frequency. The result is improved mathematical interpolation and tuning results using reduced number of calibration points and allowing higher calibration speed.

Embodiments of the present disclosure generally relate to metasurface devices and methods of forming metasurfaces. The metasurface devices include a plurality of device structures. Each of the device structures are formed from multiple layers, at least one of which is an impedance matching layer. The impedance matching layer may be formed as either an inner impedance matching layer between the substrate and the device layer or as a separate outer impedance matching layer on top of the device layer. The refractive indices of the impedance matching layers are chosen to be between the refractive index of the mediums on either side of the impedance matching layer.

Embodiments of the present disclosure generally relate to metasurface devices and methods of forming metasurfaces. The metasurface devices include a plurality of device structures. Each of the device structures are formed from multiple layers, at least one of which is an impedance matching layer. The impedance matching layer may be formed as either an inner impedance matching layer between the substrate and the device layer or as a separate outer impedance matching layer on top of the device layer. The refractive indices of the impedance matching layers are chosen to be between the refractive index of the mediums on either side of the impedance matching layer.

An impedance converter includes an insulating layer; a first wire provided on a first surface of the insulating layer and extending in a first direction; a second wire provided on a second surface of the insulating layer and extending in the first direction and face the first wire, the second surface being located on a side opposite to the first surface; a third wire provided on the first surface and extending in a second direction orthogonal to the first direction; a fourth wire provided on the second surface and extending in the second direction and face the third wire; a fifth wire provided on the first surface and extending in the second direction; and a sixth wire provided on the second surface and extending in the second direction and face the fifth wire.

An impedance converter includes an insulating layer; a first wire provided on a first surface of the insulating layer and extending in a first direction; a second wire provided on a second surface of the insulating layer and extending in the first direction and face the first wire, the second surface being located on a side opposite to the first surface; a third wire provided on the first surface and extending in a second direction orthogonal to the first direction; a fourth wire provided on the second surface and extending in the second direction and face the third wire; a fifth wire provided on the first surface and extending in the second direction; and a sixth wire provided on the second surface and extending in the second direction and face the fifth wire.