A comb drive for MEMS device includes a stator and a rotor displaceable relative to the stator in a first direction. The stator includes stator comb fingers and the rotor includes rotor comb fingers. The stator comb fingers are coupled to two high impedance nodes to form high impedance node domains arranged in the first direction. The rotor comb fingers are coupled to two oppositely biased electrodes to form oppositely biased domains. Pairs of capacitors with opposite acoustic polarity are respectively formed between the high impedance node domains and the oppositely biased domains. The comb drive of the present invention has increased electrostatic sensitivity for a given unit cell cross-sectional area whilst maintaining an acceptable capacitance and linearity of voltage signal vs displacement. Extra force shim unit cells may be used, which allows for the stiffness between the rotor and stator to be controlled and reduced to zero for a particular displacement range, without impacting sensitivity.

An actuator includes a base electrode, a counter electrode facing the base electrode, a first terminal connected to the base electrode, and a second terminal connected to the counter electrode. The base electrode includes a non-metal base material, a conductive thin film disposed on a side of the non-metal base material, the side facing the counter electrode, and an insulation layer disposed on the conductive thin film. The first terminal is connected to the conductive thin film. The counter electrode includes a flexible conductor that is deformable via a Coulomb force acting between the base electrode and the counter electrode upon application of a voltage to the first terminal and the second terminal.

A Static Electrostatic Generator (SEG) is disclosed which produces static charges at high voltage and low current. The SEG is capable of generating positive or negative charges on a metal sphere by reversing the polarity of a DC source. The conversion efficiency of the system is about 47% and its design is simple, lightweight, and easy to manufacture. The SEG is a static device and no mechanical movement is required to produce charges. Also, the design is easily scalable.

A Static Electrostatic Generator (SEG) is disclosed which produces static charges at high voltage and low current. The SEG is capable of generating positive or negative charges on a metal sphere by reversing the polarity of a DC source. The conversion efficiency of the system is about 47% and its design is simple, lightweight, and easy to manufacture. The SEG is a static device and no mechanical movement is required to produce charges. Also, the design is easily scalable.

Microelectromechanical systems (MEMS) have found widespread applications across biotechnology, medicine, communications, and consumer electronics. These are typically one-dimensional MEMS (e.g. rotation, linear translation on a single axis) or two-dimensional MEMS (e.g. linear translation in two directions in the plane of the MEMS). It would be beneficial therefore for designers of components, circuits, and systems to exploit MEMS elements that produce both out-of-plane and in-plane motion thereby allowing for novel two-dimensional and three-dimensional MEMS micropositioners.

A capacitive actuator motor according to an embodiment of the present invention includes a capacitive actuator having six actuator units and a motor output cam having a periodic shape portion. Each of the six actuator units includes a buckling displacement expansion mechanism configured to convert an output of a piezoelectric element and urge an output joint in a predetermined output direction and a preload adjustment spring configured to urge an output joint with a certain characteristic in a direction in which the periodic shape portion and the output joint come into contact with each other.

A capacitive actuator motor according to an embodiment of the present invention includes a capacitive actuator having six actuator units and a motor output cam having a periodic shape portion. Each of the six actuator units includes a buckling displacement expansion mechanism configured to convert an output of a piezoelectric element and urge an output joint in a predetermined output direction and a preload adjustment spring configured to urge an output joint with a certain characteristic in a direction in which the periodic shape portion and the output joint come into contact with each other.

Robust electro-static (ES) device embodiments, with application to energy storage flywheels as an example, are described that provide reliable, high-efficiency operation in the presence of thermal and mechanical perturbations, as well as seismic events. Electro-static generators and motors, when augmented with magnetic bearings, passive three-dimensional stabilization techniques and dynamic touch-down bearings, enable robust performance in the face of these environmental concerns, as well as efficient operation during typical operational sequences, including spin-up and steady-state modalities.

Robust electro-static (ES) device embodiments, with application to energy storage flywheels as an example, are described that provide reliable, high-efficiency operation in the presence of thermal and mechanical perturbations, as well as seismic events. Electro-static generators and motors, when augmented with magnetic bearings, passive three-dimensional stabilization techniques and dynamic touch-down bearings, enable robust performance in the face of these environmental concerns, as well as efficient operation during typical operational sequences, including spin-up and steady-state modalities.

MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. An actuator coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.