Problem All conductive bodies and particularly humans bodies, living in an electrified environment are traversed by alternating currents. Especially with the rise of electromobility, these currents are also present outside the typical house or office or factory environment, influencing the body almost during the whole 24 hours life cycle. Solution The invention proposes simple, contactless means to protect the body, by compensating the induced currents from the electrified environment. An isolated, intermediate conductive plate between the ground and the body is used to sense and minimize the induced currents. A coil at the periphery of the intermediate plate is used to sense and compensate the induced magnetic field, in its simplest embodiment.

Problem All conductive bodies and particularly humans bodies, living in an electrified environment are traversed by alternating currents. Especially with the rise of electromobility, these currents are also present outside the typical house or office or factory environment, influencing the body almost during the whole 24 hours life cycle. Solution The invention proposes simple, contactless means to protect the body, by compensating the induced currents from the electrified environment. An isolated, intermediate conductive plate between the ground and the body is used to sense and minimize the induced currents. A coil at the periphery of the intermediate plate is used to sense and compensate the induced magnetic field, in its simplest embodiment.

The present application relates to static charge reduction device comprising a humid medium generator for generating a humid medium with a specified relative humidity, a humid medium delivery apparatus for delivering the humid medium to a target object, a grounded apparatus connecting the humid medium delivery apparatus and ground, and a conductive means which both contacting the target object and connecting the grounded apparatus; wherein the humid medium delivery apparatus, the conductive means and the target object are arranged successively along a delivery path of the humid medium, such that the humid medium is delivered through the humid medium delivery apparatus, the conductive means and the target object successively for static charge reduction. The discovery is surprising because no air ionizer has been used in neutralizing and cutting down the static charge

The present application relates to static charge reduction device comprising a humid medium generator for generating a humid medium with a specified relative humidity, a humid medium delivery apparatus for delivering the humid medium to a target object, a grounded apparatus connecting the humid medium delivery apparatus and ground, and a conductive means which both contacting the target object and connecting the grounded apparatus; wherein the humid medium delivery apparatus, the conductive means and the target object are arranged successively along a delivery path of the humid medium, such that the humid medium is delivered through the humid medium delivery apparatus, the conductive means and the target object successively for static charge reduction. The discovery is surprising because no air ionizer has been used in neutralizing and cutting down the static charge

Embodiments of the present invention provide a method, anti-static bag, and kit for transporting an electronic component in the anti-static bag. Along with the electronic component, a desiccant and a temperature indicator are added to the anti-static bag. The anti-static bag is then vacuum sealed to reduce the air and moisture in the anti-static bag. The vacuum sealed bag, desiccant, and temperature indicator, insure that the formation of condensation on the electronic component will be minimized, which will potentially prolong the life of the electronic component.

Embodiments of the present invention provide a method, anti-static bag, and kit for transporting an electronic component in the anti-static bag. Along with the electronic component, a desiccant and a temperature indicator are added to the anti-static bag. The anti-static bag is then vacuum sealed to reduce the air and moisture in the anti-static bag. The vacuum sealed bag, desiccant, and temperature indicator, insure that the formation of condensation on the electronic component will be minimized, which will potentially prolong the life of the electronic component.

A stocker for holding a plurality of reticle pods is provided. Each of the reticle pods is configured to accommodate a reticle assembly. The reticle assembly includes a reticle and a pellicle covering the reticle. The stocker includes a main frame and an electrostatic generator. The main frame has an inner space and at least one pod support disposed in the inner space. The pod support divides the inner space into a plurality of chambers configured to respectively accommodate the plurality of reticle pods. The electrostatic generator is coupled to the reticle assembly and configured to generate static electricity to the reticle assembly. The static electricity alternates between positive electricity and negative electricity.

A stocker for holding a plurality of reticle pods is provided. Each of the reticle pods is configured to accommodate a reticle assembly. The reticle assembly includes a reticle and a pellicle covering the reticle. The stocker includes a main frame and an electrostatic generator. The main frame has an inner space and at least one pod support disposed in the inner space. The pod support divides the inner space into a plurality of chambers configured to respectively accommodate the plurality of reticle pods. The electrostatic generator is coupled to the reticle assembly and configured to generate static electricity to the reticle assembly. The static electricity alternates between positive electricity and negative electricity.

Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.

Semiconductor processing apparatuses and methods are provided in which an electrostatic discharge (ESD) prevention layer is utilized to prevent or reduce ESD events from occurring between a semiconductor wafer and one or more components of the apparatuses. In some embodiments, a semiconductor processing apparatus includes a wafer handling structure that is configured to support a semiconductor wafer during processing of the semiconductor wafer. The apparatus further includes an ESD prevention layer on the wafer handling structure. The ESD prevention layer includes a first material and a second material, and the second material has an electrical conductivity that is greater than an electrical conductivity of the first material.