A method of manufacturing a passivation film, which includes a passivation process in which a substrate on the surface of which at least one of germanium and molybdenum is contained is treated with a passivation gas containing an oxygen-containing compound, which is a compound containing an oxygen atom in the molecule, and hydrogen sulfide to form a passivation film containing a sulfur atom on the surface of the substrate. The concentration of the oxygen-containing compound in the passivation gas is from 0.001 mole ppm to less than 75 mole ppm.

A method of manufacturing a passivation film, which includes a passivation process in which a substrate on the surface of which at least one of germanium and molybdenum is contained is treated with a passivation gas containing an oxygen-containing compound, which is a compound containing an oxygen atom in the molecule, and hydrogen sulfide to form a passivation film containing a sulfur atom on the surface of the substrate. The concentration of the oxygen-containing compound in the passivation gas is from 0.001 mole ppm to less than 75 mole ppm.

The invention relates to a method for increasing the wear resistance of a metal screen cloth made of wire, the method comprising treating a surface of a metal screen cloth by means of a thermochemical surface layer method for increasing the surface hardness and the wear resistance of metals, wherein the thermochemical surface layer method changes the structural conditions of the treated metal to a predetermined depth of penetration, wherein a hard surface layer is formed in the metal surface. A corresponding device and a screen cloth and a screen panel with increased wear resistance are also part of the invention.

A semiconductor manufacturing apparatus according to an embodiment includes: a chamber that houses a semiconductor substrate; and a plurality of coils provided on a lateral surface of the chamber. The chamber has a first spatial region enclosed above the semiconductor substrate by a first coil that is one of the plurality of coils, a first gas introduction port communicating with the first spatial region, a second spatial region enclosed by a second coil that is different from the first coil among the plurality of coils, and a second gas introduction port communicating with the second spatial region.

The invention relates to a method for patinating zinc surfaces of a structural element, including the steps of: providing a structural element with a zinc surface in a housing; providing an atmosphere around the zinc surface, wherein said atmosphere comprises carbon based gas and humidity; and heating the zinc surface for at least one hour, to provide a patinated zinc surface. The heating of the zinc surface occurs by heating the atmosphere to a temperature of at least 50° C., the humidity is at least 70%, and the carbon-based gas concentration is at least 5% by volume. The invention also relates to a patinated evaporative condenser in a closed-circuit cooling tower The patinated evaporative condenser in a closed-circuit cooling tower is by the method according to the invention. A system for patinating zinc surfaces according to the invention is also disclosed.

A method for manufacturing a forged article, capable of improving the durability of a die for forging is provided. The method, includes forging a steel material by using a die, by spraying or applying a water-soluble polymer lubricant containing 0.01 to 0.98 mass % of a water-soluble sulfate onto a working surface of the die, the die being made of a raw material having a constituent composition of by mass %, of 0.4 to 0.7% of C, 1.0% or less of Si, 1.0% or less of Mn, 4.0 to 6.0% of Cr, 2.0 to 4.0% of (Mo+½W), 0.5 to 2.5% of (V+Nb), 0 to 1.0% of Ni, 0 to 5.0% of Co, 0.02% or less of N, and a remnant composed of Fe and impurities, and having hardness of 55 to 60 HRC, and the die including a nitrided layer or a nitrosulfidized layer on the working surface thereof.

A method for producing a surface-hardened material, comprising: an immersion step of immersing an iron steel material having nitrogen attached in the form of a solid solution on the surface thereof in a melt containing a chloride at a temperature ranging from 650 C. to 900 C.; and a cooling step of cooling the immersed iron steel material to a temperature equal to or lower than a martensitic transformation start temperature at a cooling rate equal to or higher than a lower critical cooling rare at which martensitic transformation starts.

The present invention relates to a case hardened component of a titanium alloy, the component having a diffusion zone of a thickness of at least 50 ll, as calculated from the surface of the component, the diffusion zone comprising oxygen and carbon in solid solution and having a distinct phase of a carbo-oxide compound having the composition TiO.sub.xC.sub.1-x, wherein x is a number in the range of 0.01 to 0.99, which diffusion zone has a microhardness of at least 800 HV0.025 and which carbo-oxide compound has a microhardness of at least 1200 HV0.025. In another aspect the invention relates to a method of producing the case hardened component. In a further aspect the invention relates to a method of oxidising a component of a Group IV metal.

The present invention relates to a case hardened component of a titanium alloy, the component having a diffusion zone of a thickness of at least 50 ll, as calculated from the surface of the component, the diffusion zone comprising oxygen and carbon in solid solution and having a distinct phase of a carbo-oxide compound having the composition TiO.sub.xC.sub.1-x, wherein x is a number in the range of 0.01 to 0.99, which diffusion zone has a microhardness of at least 800 HV0.025 and which carbo-oxide compound has a microhardness of at least 1200 HV0.025. In another aspect the invention relates to a method of producing the case hardened component. In a further aspect the invention relates to a method of oxidising a component of a Group IV metal.

A number of variations may include a ferritic nitrocarburized part comprising steel, wherein the ferritic nitrocarburized steel has a tensile strength exceeding the parent steel material and sufficient ductility, bendability, and flangeability to support subsequent flanging and press-fitting of bushings. Exact strength increases and bendability will be dependent on exact process and alloy combinations.