A mask device, a mask plate and frame are provided. The mask device includes a frame and a first mask plate. The frame includes an inner edge, an outer edge, and a plurality of mounting grooves. A first mask plate includes a substrate, at least one first mask opening on the substrate, and a plurality of clamping portions protruding and extending outward from at least part of a periphery of the substrate. The plurality of clamping portions are mounted in the plurality of mounting grooves, respectively, so that the substrate is mounted on the inner edge of the frame. A direction along which the clamping portion extends from the substrate to a direction away from the substrate is a first direction, a direction perpendicular to the first direction is a second direction.

A metal mask substrate includes a metal obverse surface configured such that a resist is placed on the obverse surface. The obverse surface has a three-dimensional surface roughness Sa of less than or equal to 0.11 μm. The obverse surface also has a three-dimensional surface roughness Sz of less than or equal to 3.17 μm.

An embodiment of a line-of-sight coating fixture includes a support structure, a spindle, and a shadow structure. The support structure includes a plurality of compartments disposed below a platter, each compartment having an opening on a periphery of the support structure. Each compartment is adapted to receive and secure a base of a workpiece such that a body of each workpiece to be coated is disposed about a periphery of the support structure and extends above the platter. The spindle is disposed through a center of the platter or support structure for rotating the workpieces thereabout. The shadow structure is disposed about the spindle, inside of the periphery, the shadow structure sized and adapted to shield a portion of each workpiece from line-of-sight coating material.

Disclosed is a method for preparing a high-flatness metal foil suitable for making a metal mask, and the method comprises the following steps: forming a raw metal coarse foil; rolling the raw metal coarse foil at least once into a high-flatness metal foil; performing, by a heat treatment device, heat treatment processing on the precisely rolled metal foil according to a preset temperature and a preset time; using a tension leveler to perform tension leveling on the rolled and heat-treated metal foil; and obtaining a high-flatness metal foil after completion of the tension leveling and forming a rolled metal foil in a continuous forming process. The resulting metal foil has high flatness and low residual stress, which improves quality and performance of the metal foil and is suitable for the fabrication of fine metal masks.

Provided are a display panel, an evaporation mask, a display device and a preparation method. A display region of the display panel includes multiple first sub-pixels and multiple second sub-pixels, and the multiple first sub-pixels and the multiple second sub-pixels have a same shape and a same size and are different in color; a pattern composed of the multiple first sub-pixels is at least partially consistent with a pattern composed of the multiple second sub-pixels, and mutually consistent patterns are staggered in a first direction, and denotes a staggered vector in the first direction; a non-display region includes a first offset mark A1 and a second offset mark A2, denotes a vector connecting a center of the first offset mark A1 and a center of the second offset mark A2, and the vector satisfies: =+; where denotes a first preset deviation.

One or more embodiments described herein generally relate to methods and systems for monitoring film thickness using a sensor assembly. In embodiments described herein, a process chamber having a chamber body, a substrate support disposed in the chamber body, a lid disposed over the chamber body, and a sensor assembly coupled to the chamber body at a lower portion of the sensor assembly. The sensor assembly is coupled to the lid at an upper portion of the sensor assembly. The sensor assembly includes one or more apertures disposed through one or more sides of the sensor assembly, and the one or more sensors are disposed in the sensor assembly through the one or more of the apertures.

A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.

One or more embodiments include a display apparatus including an opening, an apparatus for manufacturing the display apparatus, and a method of manufacturing the display apparatus capable of reducing generation of gas or foreign matter.

A mask includes a first mask that includes a first long side that extends in a first direction and a first short side that extends in a second direction that crosses the first direction and that includes a first edge portion, a first center portion, and a first welded portion, that are sequentially arranged in the first direction. The mask further includes a second mask that includes a second long side that extends in the first direction and a second short side that extends in the second direction and that includes a second welded portion, a second center portion, and a second edge portion, that are sequentially arranged in the first direction. The first welded portion is in contact with the second welded portion.

A display device, a mask assembly, and an apparatus for manufacturing the display device are provided. The display device may reduce glare and includes sub-pixels having accurate and precise patterns. The display device including a first sub-pixel having a quadrangular shape, a second sub-pixel facing a first side of the first sub-pixel, the second sub-pixel having a quadrangular shape, and a third sub-pixel facing the first side of the first sub-pixel and spaced apart from the second sub-pixel, the third sub-pixel having a quadrangular shape, where a distance from the first side of the first sub-pixel to the second sub-pixel and a distance from the first side of the first sub-pixel to the third sub-pixel are different from each other.