Patent classifications
C23C14/24
EVAPORATION APPARATUS, SUBLIMATION PURIFICATION APPARATUS, ORGANIC ELECTRONIC DEVICE PRODUCTION METHOD, AND SUBLIMATION PURIFICATION METHOD
Provided is an evaporation apparatus configured to form an organic layer made from organic material on a substrate, the apparatus including: a container configured to contain the organic material, at least a portion of which is composed of conductor; a heating coil disposed around the container; a DC power supply; an inverter connected to the DC power supply; a primary coil connected to the inverter; and a secondary coil connected to the heating coil, wherein the primary coil and the secondary coil form a matching transformer.
MASK
A mask includes a mask frame including a first opening part; a first mask disposed on the mask frame and including a second opening part overlapping the first opening part in a plan view; a second mask including a mesh part having a mesh shape overlapping the second opening part in a plan view and disposed on the first mask; and a fixing part disposed on the second mask and extending along an edge of the second mask to surround the mesh part.
MASK
A mask includes a mask frame including a first opening part; a first mask disposed on the mask frame and including a second opening part overlapping the first opening part in a plan view; a second mask including a mesh part having a mesh shape overlapping the second opening part in a plan view and disposed on the first mask; and a fixing part disposed on the second mask and extending along an edge of the second mask to surround the mesh part.
METHODS FOR PREPARING VOID-FREE COATINGS FOR PLASMA TREATMENT COMPONENTS
Methods for preparing a void-free protective coating are disclosed herein. The void-free protective coating is used on a dielectric window having a central hole, which is used in a plasma treatment tool. A first protective coating layer is applied to the window, leaving an uncoated annular retreat area around the central hole. The first protective coating layer is polished to produce a flat surface and fill in any voids on the window. A second protective coating layer is then applied upon the flat surface of the first protective coating layer to obtain the void-free coating. This increases process uptime and service lifetime of the dielectric window and the plasma treatment tool.
METHODS FOR PREPARING VOID-FREE COATINGS FOR PLASMA TREATMENT COMPONENTS
Methods for preparing a void-free protective coating are disclosed herein. The void-free protective coating is used on a dielectric window having a central hole, which is used in a plasma treatment tool. A first protective coating layer is applied to the window, leaving an uncoated annular retreat area around the central hole. The first protective coating layer is polished to produce a flat surface and fill in any voids on the window. A second protective coating layer is then applied upon the flat surface of the first protective coating layer to obtain the void-free coating. This increases process uptime and service lifetime of the dielectric window and the plasma treatment tool.
DEPOSITION MASK, METHOD OF MANUFACTURING DISPLAY DEVICE USING THE DEPOSITION MASK, AND DISPLAY DEVICE
Provided are a deposition mask, a method of manufacturing a display device using the deposition mask, and a display device. The deposition mask includes a main frame defining a first opening; ribs extending away from a side of the main frame, the ribs being apart from each other and defining second openings; and bridges connecting the ribs to one another across the second openings, wherein the bridges and the ribs form the same top surface, and a thickness of each of the bridges is less than a thickness of each of the ribs.
DEPOSITION MASK, METHOD OF MANUFACTURING DISPLAY DEVICE USING THE DEPOSITION MASK, AND DISPLAY DEVICE
Provided are a deposition mask, a method of manufacturing a display device using the deposition mask, and a display device. The deposition mask includes a main frame defining a first opening; ribs extending away from a side of the main frame, the ribs being apart from each other and defining second openings; and bridges connecting the ribs to one another across the second openings, wherein the bridges and the ribs form the same top surface, and a thickness of each of the bridges is less than a thickness of each of the ribs.
Mask and manufacturing method thereof, fine metal mask, mask device and use method thereof
A mask, a manufacturing method thereof, a fine metal mask, a mask device and a use method thereof are provided. The mask includes at least one opening region and a shielding part surrounding and defining the at least one opening region. The shielding part includes a main part and at least one protrusion, in each opening region, the protrusion is protruded towards the opening region on a side of the main part facing the opening region; the main part includes an edge disposed on a side of the protrusion opposite to the opening region and with an extension direction being a same with an extension direction of the protrusion, the protrusion and a portion of the main part disposed between the edge and the protrusion includes a thinning portion with a thickness being less than a thickness of other portions of the shielding part.
Line-of-sight coating fixture and apparatus
An embodiment of a line-of-sight coating fixture includes a support structure, a spindle, and a shadow structure. The support structure includes a plurality of compartments disposed below a platter, each compartment having an opening on a periphery of the support structure. Each compartment is adapted to receive and secure a base of a workpiece such that a body of each workpiece to be coated is disposed about a periphery of the support structure and extends above the platter. The spindle is disposed through a center of the platter or support structure for rotating the workpieces thereabout. The shadow structure is disposed about the spindle, inside of the periphery, the shadow structure sized and adapted to shield a portion of each workpiece from line-of-sight coating material.
Sliding member
Disclosed herein is a sliding member having an alloy overlay layer that comes into sliding contact with a counterpart member thereof and has improved fatigue resistance. The sliding member comprises a base material layer and an alloy overlay layer formed on the base material layer, in which the alloy overlay layer has a soft metal phase made of tin and precipitated in a metallic matrix phase made of aluminum, and when an average aspect ratio of the soft metal phase is defined as A, and its standard deviation is defined as Aσ, A+Aσ is 3.0 or less. In this case, the soft metal phase has a shape close to a sphere without elongating in a certain direction.