A film forming method of forming a carbon film includes: cleaning an interior of a processing container by using oxygen-containing plasma in a state in which no substrate is present inside the processing container; subsequently, extracting and removing oxygen inside the processing container by using plasma in the state in which no substrate is present inside the processing container; and subsequently, loading a substrate into the processing container and forming the carbon film on the substrate through plasma CVD using a processing gas including a carbon-containing gas, wherein the cleaning, the extracting and removing the oxygen, and the forming the carbon film are repeatedly performed.

Provided by the invention disclosure is a coating equipment. The coating equipment comprises a reaction chamber body provided with a reaction chamber, a gas supply part configured to supply gas to the reaction chamber, a pumping device configured to communicate with the reaction chamber, a pulse power supply adapted to provide the reaction chamber body with a pulsed electric field and a radio frequency power supply adapted to provide the reaction chamber body with a radio frequency electric field, wherein the reaction chamber is adapted to accommodate a plurality of workpiece. When the pulse power supply and the radio frequency power supply are turned on, the gas in the reaction chamber body is ionized under the radio frequency electric field and the pulsed electric field to generate plasma, and the plasma is deposited on the surface of the workpieces.

Provided by the invention disclosure is a coating equipment. The coating equipment comprises a reaction chamber body provided with a reaction chamber, a gas supply part configured to supply gas to the reaction chamber, a pumping device configured to communicate with the reaction chamber, a pulse power supply adapted to provide the reaction chamber body with a pulsed electric field and a radio frequency power supply adapted to provide the reaction chamber body with a radio frequency electric field, wherein the reaction chamber is adapted to accommodate a plurality of workpiece. When the pulse power supply and the radio frequency power supply are turned on, the gas in the reaction chamber body is ionized under the radio frequency electric field and the pulsed electric field to generate plasma, and the plasma is deposited on the surface of the workpieces.

A bioscaffold comprising a graphene matrix for use in cellular therapy is disclosed. In particular, a bioscaffold having a coating of dexamethasone on a three-dimensional graphene matrix is provided, wherein the bioscaffold elutes dexamethasone to reduce inflammatory responses following implantation of the bioscaffold in a subject. Having the dexamethasone released locally in the vicinity of the bioscaffold avoids the systemic side effects from conventional intravenous delivery while allowing the dexamethasone to modulate the inflammatory milieu within the transplantation microenvironment.

Embodiments of the present disclosure generally relate to carbon materials for battery electrodes and methods for preparing such carbon materials. More specifically, embodiments relate to methods for coating a carbon film onto nano-ordered carbon particles to produce carbon-coated particles which can be used as an anode material within a battery, such as a lithium-ion battery, a sodium-ion battery, other types of batteries. In one or more embodiments, a method for producing carbon-coated particles is provided and includes positioning nano-ordered carbon particles within a processing region of a processing chamber, purging the processing region containing the nano-ordered carbon particles with an inert gas, heating the nano-ordered carbon particles to a temperature of about 700° C. or greater during an annealing process, and depositing a carbon film on the nano-ordered carbon particles to produce carbon-coated particles during a vapor deposition process.

Embodiments of the present disclosure generally relate to carbon materials for battery electrodes and methods for preparing such carbon materials. More specifically, embodiments relate to methods for coating a carbon film onto nano-ordered carbon particles to produce carbon-coated particles which can be used as an anode material within a battery, such as a lithium-ion battery, a sodium-ion battery, other types of batteries. In one or more embodiments, a method for producing carbon-coated particles is provided and includes positioning nano-ordered carbon particles within a processing region of a processing chamber, purging the processing region containing the nano-ordered carbon particles with an inert gas, heating the nano-ordered carbon particles to a temperature of about 700° C. or greater during an annealing process, and depositing a carbon film on the nano-ordered carbon particles to produce carbon-coated particles during a vapor deposition process.

The present invention provides a growth method of grapheme, which at least comprises the following steps: S1: providing an insulating substrate, placing the insulating substrate in a growth chamber; S2: heating the insulating substrate to a preset temperature, and introducing a gas containing catalytic element into the growth chamber; S3: feeding carbon source into the growth chamber and growing a graphene thin film on the insulating substrate. The present invention adopts a catalytic manner of introducing catalytic element, and rapid grows a high quality graphene on the insulating substrate, which avoids the transition process of the graphene, enables to improve the production yield of the graphene, reduces the growth cost of the graphene, and thus the mass production can be facilitated. The graphene grown by the present invention may be applied in the field of novel graphene electronic devices, graphene transparent conducting film, transparent conducting coating and the like.

The present invention provides a growth method of grapheme, which at least comprises the following steps: S1: providing an insulating substrate, placing the insulating substrate in a growth chamber; S2: heating the insulating substrate to a preset temperature, and introducing a gas containing catalytic element into the growth chamber; S3: feeding carbon source into the growth chamber and growing a graphene thin film on the insulating substrate. The present invention adopts a catalytic manner of introducing catalytic element, and rapid grows a high quality graphene on the insulating substrate, which avoids the transition process of the graphene, enables to improve the production yield of the graphene, reduces the growth cost of the graphene, and thus the mass production can be facilitated. The graphene grown by the present invention may be applied in the field of novel graphene electronic devices, graphene transparent conducting film, transparent conducting coating and the like.

A method for manufacturing an electrode having a porosity of between 20% and 60% by volume and pores with an average diameter of less than 50 nm. In the method, provision is made of a substrate and a colloidal suspension of aggregates or agglomerates of monodisperse primary nanoparticles of an active electrode material, having an average primary diameter D.sub.50 of between 2 and 100 nm, the aggregates or agglomerates having an average diameter D.sub.50 of between 50 nm and 300 nm. A layer is deposited from said colloidal suspension on the substrate. The deposited layer is then dried and consolidated to obtain a mesoporous layer. A coating of an electronically conductive material is then deposited on and inside the pores of the porous layer. Such a porous electrode can be used in lithium-ion microbatteries.

A method for manufacturing an electrode having a porosity of between 20% and 60% by volume and pores with an average diameter of less than 50 nm. In the method, provision is made of a substrate and a colloidal suspension of aggregates or agglomerates of monodisperse primary nanoparticles of an active electrode material, having an average primary diameter D.sub.50 of between 2 and 100 nm, the aggregates or agglomerates having an average diameter D.sub.50 of between 50 nm and 300 nm. A layer is deposited from said colloidal suspension on the substrate. The deposited layer is then dried and consolidated to obtain a mesoporous layer. A coating of an electronically conductive material is then deposited on and inside the pores of the porous layer. Such a porous electrode can be used in lithium-ion microbatteries.