C23C18/12

Plasma-assisted process of ceramization of polymer precursor on surface, surface comprising ceramic polymer

The present invention lies in the fields of chemistry and materials engineering. More specifically, the present invention describes a process of heat treatment of polymeric precursors including as active phases particle charge or a mixture of active phases with inert phases called “fillers”. It is also described a surface including ceramic polymer obtained by said process. The volumetric positive variation resulting from the formation of new phases, which for their formation, incorporate atoms from the gaseous phase, contributes to a minor shrinkage of the composition during the heat treatment process. The process of the present invention allows obtaining the desired phases in smaller treatment times and lower temperatures, when compared to a thermal treatment process as conventional pyrolysis (PC) due to the presence of highly reactive species, as for example atomic nitrogen produced by the dissociation of nitrogen molecules in the plasma environment.

Method for forming insulating film, apparatus for processing substrate, and system for processing substrate

There is provided a technique of forming an insulating film containing silicon oxide. A coating solution containing polysilazane is applied onto a wafer W, the solvent of the coating solution is volatilized, and the coating film is irradiated with ultraviolet rays in nitrogen atmosphere before performing a curing process. Dangling bonds are generated in silicon which is a pre-hydrolyzed site in polysilazane. Therefore, the energy for hydrolysis is reduced, and unhydrolyzed sites are reduced even when the temperature of the curing process is 350° C. Since efficient dehydration condensation occurs, the crosslinking rate is improved, and a dense (good-quality) insulation film is formed. By forming a protective film on the surface of the coating film to which ultraviolet rays irradiated, the reaction of dangling bonds prior to the curing process is suppressed.

CARBON NANOTUBE COMPOSITE HYDROGEN EVOLUTION CATALYTIC FILM AND METHOD FOR MAKING THE SAME
20230304158 · 2023-09-28 ·

A method of making a carbon nanotube composite hydrogen evolution catalytic film is provided. The method includes: providing a carbon nanotube film, wherein the carbon nanotube film defines a plurality of spaced holes; providing a precursor solution containing a molybdenum source and a carbon source, and placing the precursor solution on the carbon nanotube film and drying to obtain a precursor film; and energizing the precursor film.

DEVICE AND METHOD FOR DEPOSITING THICK METAL NITRIDE COATINGS BY THE SUPERCRITICAL FLUID ROUTE

A device for depositing a thick metal nitride on a sample by supercritical fluids includes a first enclosure forming a first closed volume; a second enclosure placed in the first enclosure and delimited by internal walls transparent to electromagnetic radiation forming a second closed volume intended to include fluid under supercritical conditions; a heat transfer dielectric fluid circulating in the first volume around the second enclosure; a sample holder present in the second volume; an induction heating device surrounding the second enclosure; inlets for introducing a fluid and at least one precursor material into the second enclosure, and an outlet to purge the second volume.

Display panel and fabricating method thereof

A display panel and a fabricating method thereof are provided. The fabricating method of the display panel has steps of: providing a substrate; forming a light conversion layer on the substrate, wherein material of the light conversion layer has a perovskite structural material with a chemical formula of ABX.sub.3, wherein A represents an inorganic element, B represents an inorganic element, and X represents a halogen; performing a patterning step on the light conversion layer by an antisolvent method, wherein the light conversion layer forms a plurality of light conversion patterns; and forming a pixel layer on the light conversion layer, wherein the pixel layer has a plurality of pixel units, and the plurality of pixel units are respectively aligned with the plurality of light conversion patterns. The fabricating method can reduce a dark state brightness of the display panel, thereby improving contrast of the display panel.

BIOCOMPATIBLE Mg-P COATING ON SURFACE OF ZINC-BASED BIOMEDICAL MATERIAL, AND PREPARATION METHOD AND USE THEREOF

A biocompatible Mg—P coating on the surface of a zinc-based biomedical material, and a preparation method and use thereof are disclosed. In the method, zinc and a zinc alloy are first subjected to surface pretreatment and then soaked in a phosphate solution at a constant temperature to form the Mg—P coating through chemical liquid deposition (CLD). The control on the composition, thickness and surface morphology of the coating is realized by using the CLD method. The biocompatible Mg—P coating has a thickness of 0.5 μm to 50 μm, is dense and uniform, and comprises a main component of zinc-magnesium-phosphate and a small amount of zinc phosphate.

Ceramic Surface Modification Materials and Methods of Use Thereof
20220024824 · 2022-01-27 ·

Porous, binderless ceramic surface modification materials are described, and applications of use thereof. The ceramic material may include a metal oxide and/or metal hydroxide, and/or hydrates thereof, on a substrate surface.

Two phase shell formation on metal nanostructures

The present disclosure relates to a method of making an electrochemically active material, which comprises metal nanostructures encapsulated in LaF.sub.3 shells. The electrochemically active material may be included in an electrode of an F-shuttle battery that includes a liquid electrolyte, which, optionally, allows the F-shuttle batteries to operate at room temperature.

METHOD AND APPARATUS FOR MICROMACHINING SEMICONDUCTOR MATERIAL FROM OPPOSING SIDES THROUGH SYNCHRONOUS COORDINATION OF LASER AND ELECTROCHEMISTRY

An apparatus for micromachining a semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry includes an optical path system, a stable low-pressure jet generation system, and an electrolytic machining system. The optical path system includes a laser generator, a beam expander, a reflector, a galvanometer, and a lens. The electrolytic machining system includes a direct-current pulsed power supply, an adjustable cathode fixture, an electrolyte tank, a current probe, and an oscilloscope. The stable low-pressure jet generation system provides an electrolyte flow into a metal needle. The electrolyte flow forms an electrolyte layer between a semiconductor material and a cathode copper plate, such that the cathode and the anode are in electrical contact with each other. In a method employing the apparatus, a laser beam is irradiated onto the semiconductor material to form a local high-temperature region, which leads to a localized increase in electrical conductivity.