Patent classifications
C23C24/082
SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER, AND DISPLAY MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS COMPRISING SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER
According to one embodiment, a semiconductor manufacturing apparatus member includes a base and a particle-resistant layer. The base includes a main portion and an alumite layer. The main portion includes aluminum. The alumite layer is provided at a front surface of the main portion. The particle-resistant layer is provided on the alumite layer and includes a polycrystalline ceramic. An Al purity of the main portion is 99.00% or more.
METHOD FOR PRODUCING AN OPEN-PORE MOLDED BODY WHICH IS MADE OF A METAL, AND A MOLDED BODY PRODUCED USING SAID METHOD
A method for producing open-pored molded bodies made of a metal. The surface of the metal open-pored molded body being used as a semi-finished product, is coated with particles of the same metal with which the semi-finished product is made or with particles of a chemical compound of the metal the semi-finished product is made, wherein the compound or particles can be reduced or thermally or chemically decomposed in a thermal treatment. After the coating process, a thermal treatment in a suitable atmosphere is carried out, in which the particles are connected to the surface of the semi-finished product and/or adjacent particles such that the specific surface area of the obtained open-pore molded body is increased to at least 30 m.sup.2/l and/or at least by a factor of 5 in comparison to the starting material.
METHOD FOR PRODUCING FILM
The present application provides a method for producing a film. In the present application, for example, a method for producing a film which can be applied to production of a heat-dissipating material such as a heat pipe can be provided.
METHOD OF MANUFACTURING PLASMA-RESISTANT COATING FILM AND PLASMA-RESISTANT MEMBER FORMED THEREBY
The present invention relates to a method of manufacturing a plasma-resistant coating film, including (1) forming a first rare-earth metal compound coating layer by subjecting a first rare-earth metal compound to thermal-spray coating on a coating object, (2) polishing the surface of the first rare-earth metal compound coating layer formed in step (1), and (3) forming a second rare-earth metal compound coating layer by subjecting a second rare-earth metal compound to aerosol deposition coating on the first rare-earth metal compound coating layer processed in step (2), the second rare-earth metal compound being the same component as the first rare-earth metal compound.
Nonstick Utensil and Manufacturing Method Thereof
The present invention relates to the technical field of cooking utensils, and in particular, to a nonstick utensil and its method of manufacturing. The nonstick utensil comprises a utensil substrate and a nonstick layer covering an inner surface of the utensil substrate; the material of the nonstick layer comprises black titanium dioxide. In these method of the present invention, an inner surface of a substrate of the nonstick utensil is covered with a material comprising black titanium dioxide by means of hot spraying, cold spraying or plasma spraying, so that a black titanium dioxide nonstick layer is formed. Compared to the prior art, instead of using a coating material, the present invention achieves the objective of nonstickness by forming nonstick layer comprising black titanium dioxide on a surface of a substrate, thanks to the low surface energy characteristic of black titanium dioxide.
HYDROPHOBIC COATINGS FOR METALS INCORPORATING ANODIC AND RARE-EARTH OXIDES AND METHODS OF APPLYING SAME
A hydrophobic coating and a method for applying such a coating to a surface of a metallic substrate. The method can include anodizing a nanoporous layer of anodic metal oxide on the surface; cathodizing yttrium oxide nanoparticles onto the surface; applying a hydrophobic ceramic coating composition to the surface by an application method selected from the group consisting of: flowing, dipping, and spraying; and heating the coated surface at a cure temperature from about 150 C. to about 300 C. for at least 2 hours.
Roll comprising an abradable coating
A protective and abradable coating composition is suitable for application on rolls and more particularly for application on conveyor rolls. The abradable coating is suitable for use in high temperature applications. Rolls incorporating the coating may be produced and used according to disclosed processes and procedures. Application of the composition to rolls reduces corrosion by aluminium melt, and enables the removal of built-up substances by friction. The life time of the roll is thereby increased.
Coating of particulate substrates
The present invention relates to a method for coating large area solid substrates with titanium by reacting the substrate surface with a mixture comprising titanium halide or subhalide powders in the presence of a reducing agent. The method is suited for coating large area substrates such as flakes, powder, beads and fibres with elemental Ti-base metals or alloys of Ti with coating additives based on any number of non inert elements from the periodic table.
Cold-spray braze material deposition
Aspects include supplying a plurality of nickel-enriched braze powder particles to a cold spray system through a particle supply inlet. The nickel-enriched braze powder particles are accelerated through a transfer tube and out an exit in the transfer tube towards a substrate to produce a braze cold-sprayed substrate. A component surface is positioned proximate to the braze cold-sprayed substrate. The braze cold-sprayed substrate is heated to bond the braze cold-sprayed substrate to the component surface.
METHOD OF PRODUCING A NTCR SENSOR
The present invention relates to a method of producing a negative temperature coefficient resistor (NTCR) sensor, the method comprising the steps of: providing a mixture comprising uncalcined powder and a carrier gas in an aerosol-producing unit, with the uncalcined powder comprising metal oxide components; forming an aerosol from said mixture and said carrier gas and accelerating said aerosol in a vacuum towards a substrate arranged in a deposition chamber; forming a film of the uncalcined powder of said mixture on said substrate; and transforming the film into a layer of spinel-based material by applying a heat treatment step.