Provided is a sliding member having a hard carbon coating that makes high wear resistance compatible with a low coefficient of friction and that has excellent peeling resistance. A sliding member (100) includes a base member (10) and a hard carbon coating (12) formed on the base member (10). The indentation hardness of the hard carbon coating (12) decreases gradually from the base member side to the surface side. The hard carbon coating (12) has an indentation hardness distribution at 0T/Ttotal0.6 approximated by a first line and an indentation hardness distribution at 0.9T/Ttotal1 approximated by a second line, and the intersection between the first line and the second line (T2/Ttotal, H2) satisfies Expression (1), (H3H1)T2/Ttotal+H1<H20.9H1, and Expression (2), 0.6T2/Ttotal0.9.

A method of manufacturing an article comprises providing an article. An ion assisted deposition (IAD) process is performed to deposit a second protective layer over a first protective layer. The second protective layer is a plasma resistant rare earth oxide having a thickness of less than 50 microns and a porosity of less than 1%. The second protective layer seals a plurality of cracks and pores of the first protective layer.

A superalloy target wherein the superalloy target has a polycrystalline structure of random grain orientation, the average grain size in the structure is smaller than 20 m, and the porosity in the structure is smaller than 10%. Furthermore, the invention includes a method of producing a superalloy target by powder metallurgical production, wherein the powder-metallurgical production starts from alloyed powder(s) of a superalloy and includes the step of spark plasma sintering (SPS) of the alloyed powder(s).

Methods for forming high temperature coating systems are provided. In embodiments, the coating formation method includes forming a fracture-resistant Thermal Barrier Coating (TBC) layer over a workpiece surface. The fracture-resistant TBC layer is produced from a first coating precursor material containing an amount of zirconia in mole percent (ZrO.sub.mol%1) and an amount of tantala in mole percent (TaO.sub.mol%1). A Calcium-Magnesium Aluminosilicate (CMAS) resistant TBC layer is formed over the fracture-resistant TBC layer from a second coating precursor material, which contains an amount of zirconia in mole percent (ZrO.sub.mol%2), an amount of tantala in mole percent (TaO.sub.mol%2), and an amount of one or more rare earth oxides in mole percent (REO.sub.mol%2). The first and second coating precursor materials are formulated such that ZrO.sub.mol%1 is greater than ZrO.sub.mol%2, TaO.sub.mol%1 is less than TaO.sub.mol%2, and TaO.sub.mol%2 is substantially equivalent to REO.sub.mol%2.

A surface coated member having improved stability and a longer service life is provided. The surface coated member includes a base member and a hard coating formed on a surface thereof. The hard coating is constituted of one or more layers. At least one layer among the layers is a layer including hard particles. The hard particles include a multilayer structure having a first unit layer and a second unit layer being layered alternately. The first unit layer includes a first compound. The second unit layer includes a second compound. The first compound and the second compound are respectively made of one or more kind of element selected from the group consisting of a group 4 element, a group 5 element, a group 6 element of a periodic table, and Al, and one or more kind of element selected from the group consisting of B, C, N, and O.

A coated article includes a substrate, a functional layer over at least a portion of the substrate, and a protective coating over at least a portion of the functional layer, wherein an uppermost layer of the functional layer is a metal oxide layer, and wherein the protective coating comprises a metal nitride layer and a metal oxynitride layer that is disposed between and in contact with at least part of the metal nitride layer and the metal oxide layer of the functional layer.

A chamber component comprises a body, a first protective layer and a conformal second protective layer over the first protective layer. The first protective layer comprises a plasma resistant ceramic, has a thickness of greater than approximately 50 microns and comprises a plurality of cracks and pores. The conformal second protective layer comprises a plasma resistant rare earth oxide, has a thickness of less than 50 microns, has a porosity of less than 1%, and seals the plurality of cracks and pores of the first protective layer.

In some examples, an article may include a substrate and a coating on the substrate. The substrate may include a superalloy, a ceramic, or a ceramic matrix composite. The coating may include a layer comprising a matrix material and a plurality of nanoparticles. The matrix material may include at least one of silica, zirconia, alumina, titania, or chromia, and the plurality of nanoparticles may include nanoparticles including at least one of yttria, zirconia, alumina, or chromia. In some examples, an average diameter of the nanoparticles is less than about 400 nm.

Thermal barrier coatings and methods to make such coatings present improved resistance to CMAS infiltration. The method for forming a thermal barrier coating includes applying a layer of the thermal barrier coating to a component having a surface, forming a plurality of first channels in the thermal barrier coating, and forming a plurality of second channels in the thermal barrier coating. The first channels extend through a thickness of the thermal barrier coating from an interface with the surface of the component to a free surface opposite the interface. The second channels are disposed between the free surface and the interface and extending lengthwise generally parallel to the free surface of the thermal barrier coating.

A protective coating layer, an electronic device including such a protective coating layer, and the methods of making the same are provided. The electronic device includes a substrate, a thin film circuit layer disposed over the substrate, and a protective coating layer disposed over the thin film circuit layer. The protective coating layer includes a first coating and a second coating disposed over the first coating. Each coating has a cross-plane thermal conductivity in a direction normal to a respective coating surface equal to or higher than 0.5 W/(m*K). The first coating and the second coating have different crystal structures, or different crystalline orientations, or different compositions, or a combination thereof to provide different nanoindentation hardness. The first coating has a hardness lower than that of the second coating.